JPS6322761U - - Google Patents
Info
- Publication number
- JPS6322761U JPS6322761U JP11526886U JP11526886U JPS6322761U JP S6322761 U JPS6322761 U JP S6322761U JP 11526886 U JP11526886 U JP 11526886U JP 11526886 U JP11526886 U JP 11526886U JP S6322761 U JPS6322761 U JP S6322761U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- outlet
- fluid inlet
- valve body
- deflection element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000012530 fluid Substances 0.000 claims 4
- 239000012212 insulator Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11526886U JPS6322761U (cs) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11526886U JPS6322761U (cs) | 1986-07-29 | 1986-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6322761U true JPS6322761U (cs) | 1988-02-15 |
Family
ID=30998755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11526886U Pending JPS6322761U (cs) | 1986-07-29 | 1986-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6322761U (cs) |
-
1986
- 1986-07-29 JP JP11526886U patent/JPS6322761U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6322761U (cs) | ||
| JPH02109084U (cs) | ||
| JPS62107596U (cs) | ||
| JPS59188376U (ja) | ダイヤフラム式開閉弁 | |
| JPS62181768U (cs) | ||
| JPS62181769U (cs) | ||
| JPS62261778A (ja) | 電歪素子を用いた弁 | |
| JPH01131898U (cs) | ||
| JPH0265773U (cs) | ||
| JPH038680U (cs) | ||
| JPS6138303U (ja) | 流体制御アクチユエ−タ | |
| JPS614002U (ja) | ノズルフラツパ機構のフラツパ | |
| JPS6439664U (cs) | ||
| JPS6322404U (cs) | ||
| JPS64242U (cs) | ||
| JPS62115571U (cs) | ||
| JPH03123553U (cs) | ||
| JPS61138884U (cs) | ||
| JPS6311530U (cs) | ||
| JPS621498U (cs) | ||
| JPS6360777U (cs) | ||
| JPS62181770U (cs) | ||
| JPS6330681U (cs) | ||
| JPH01154460U (cs) | ||
| JPS62115570U (cs) |