JPS6322732U - - Google Patents

Info

Publication number
JPS6322732U
JPS6322732U JP11629986U JP11629986U JPS6322732U JP S6322732 U JPS6322732 U JP S6322732U JP 11629986 U JP11629986 U JP 11629986U JP 11629986 U JP11629986 U JP 11629986U JP S6322732 U JPS6322732 U JP S6322732U
Authority
JP
Japan
Prior art keywords
container
end opening
opening
semiconductor wafers
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11629986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0128677Y2 (US06272168-20010807-M00014.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11629986U priority Critical patent/JPH0128677Y2/ja
Publication of JPS6322732U publication Critical patent/JPS6322732U/ja
Application granted granted Critical
Publication of JPH0128677Y2 publication Critical patent/JPH0128677Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Weting (AREA)
JP11629986U 1986-07-29 1986-07-29 Expired JPH0128677Y2 (US06272168-20010807-M00014.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11629986U JPH0128677Y2 (US06272168-20010807-M00014.png) 1986-07-29 1986-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11629986U JPH0128677Y2 (US06272168-20010807-M00014.png) 1986-07-29 1986-07-29

Publications (2)

Publication Number Publication Date
JPS6322732U true JPS6322732U (US06272168-20010807-M00014.png) 1988-02-15
JPH0128677Y2 JPH0128677Y2 (US06272168-20010807-M00014.png) 1989-08-31

Family

ID=31000758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11629986U Expired JPH0128677Y2 (US06272168-20010807-M00014.png) 1986-07-29 1986-07-29

Country Status (1)

Country Link
JP (1) JPH0128677Y2 (US06272168-20010807-M00014.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013051267A (ja) * 2011-08-30 2013-03-14 Dainippon Screen Mfg Co Ltd 槽キャリア及び基板処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013051267A (ja) * 2011-08-30 2013-03-14 Dainippon Screen Mfg Co Ltd 槽キャリア及び基板処理装置

Also Published As

Publication number Publication date
JPH0128677Y2 (US06272168-20010807-M00014.png) 1989-08-31

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