JPS6322731U - - Google Patents
Info
- Publication number
- JPS6322731U JPS6322731U JP11722586U JP11722586U JPS6322731U JP S6322731 U JPS6322731 U JP S6322731U JP 11722586 U JP11722586 U JP 11722586U JP 11722586 U JP11722586 U JP 11722586U JP S6322731 U JPS6322731 U JP S6322731U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- optical system
- irradiating
- voltage
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 2
- 238000007493 shaping process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11722586U JPS6322731U (de) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11722586U JPS6322731U (de) | 1986-07-29 | 1986-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6322731U true JPS6322731U (de) | 1988-02-15 |
Family
ID=31002541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11722586U Pending JPS6322731U (de) | 1986-07-29 | 1986-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6322731U (de) |
-
1986
- 1986-07-29 JP JP11722586U patent/JPS6322731U/ja active Pending
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