JPS6322730U - - Google Patents
Info
- Publication number
- JPS6322730U JPS6322730U JP11649586U JP11649586U JPS6322730U JP S6322730 U JPS6322730 U JP S6322730U JP 11649586 U JP11649586 U JP 11649586U JP 11649586 U JP11649586 U JP 11649586U JP S6322730 U JPS6322730 U JP S6322730U
- Authority
- JP
- Japan
- Prior art keywords
- light
- exposure device
- photoresist
- wafer
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 2
- 229910052753 mercury Inorganic materials 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 2
Landscapes
- Control Of Exposure In Printing And Copying (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11649586U JPS6322730U ( ) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11649586U JPS6322730U ( ) | 1986-07-29 | 1986-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6322730U true JPS6322730U ( ) | 1988-02-15 |
Family
ID=31001140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11649586U Pending JPS6322730U ( ) | 1986-07-29 | 1986-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6322730U ( ) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5068066A ( ) * | 1973-10-17 | 1975-06-07 | ||
| JPS60177623A (ja) * | 1984-02-24 | 1985-09-11 | Hitachi Ltd | 露光装置 |
-
1986
- 1986-07-29 JP JP11649586U patent/JPS6322730U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5068066A ( ) * | 1973-10-17 | 1975-06-07 | ||
| JPS60177623A (ja) * | 1984-02-24 | 1985-09-11 | Hitachi Ltd | 露光装置 |