JPS5068066A - - Google Patents

Info

Publication number
JPS5068066A
JPS5068066A JP48115762A JP11576273A JPS5068066A JP S5068066 A JPS5068066 A JP S5068066A JP 48115762 A JP48115762 A JP 48115762A JP 11576273 A JP11576273 A JP 11576273A JP S5068066 A JPS5068066 A JP S5068066A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48115762A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48115762A priority Critical patent/JPS5068066A/ja
Publication of JPS5068066A publication Critical patent/JPS5068066A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP48115762A 1973-10-17 1973-10-17 Pending JPS5068066A ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48115762A JPS5068066A ( ) 1973-10-17 1973-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48115762A JPS5068066A ( ) 1973-10-17 1973-10-17

Publications (1)

Publication Number Publication Date
JPS5068066A true JPS5068066A ( ) 1975-06-07

Family

ID=14670401

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48115762A Pending JPS5068066A ( ) 1973-10-17 1973-10-17

Country Status (1)

Country Link
JP (1) JPS5068066A ( )

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5958826A (ja) * 1982-09-28 1984-04-04 Fujitsu Ltd 密着露光方法
JPS59149024A (ja) * 1983-02-16 1984-08-25 Hitachi Ltd 露光装置
JPS61100754A (ja) * 1984-10-23 1986-05-19 Fujitsu Ltd 適正露光時間の検出方法
JPS61216324A (ja) * 1985-03-20 1986-09-26 Nec Corp 縮小投影式露光装置
JPS6236532U ( ) * 1985-08-20 1987-03-04
JPS62183522A (ja) * 1986-02-07 1987-08-11 Nippon Kogaku Kk <Nikon> 投影露光方法及び装置
JPS62204527A (ja) * 1986-03-05 1987-09-09 Hitachi Ltd マスク露光装置
JPS6322730U ( ) * 1986-07-29 1988-02-15
JPH02153517A (ja) * 1988-12-05 1990-06-13 Mitsubishi Electric Corp 半導体装置の製造装置

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5958826A (ja) * 1982-09-28 1984-04-04 Fujitsu Ltd 密着露光方法
JPS6253935B2 ( ) * 1982-09-28 1987-11-12 Fujitsu Ltd
JPS59149024A (ja) * 1983-02-16 1984-08-25 Hitachi Ltd 露光装置
JPH0462167B2 ( ) * 1983-02-16 1992-10-05 Hitachi Ltd
JPS61100754A (ja) * 1984-10-23 1986-05-19 Fujitsu Ltd 適正露光時間の検出方法
JPS61216324A (ja) * 1985-03-20 1986-09-26 Nec Corp 縮小投影式露光装置
JPH0548610B2 ( ) * 1985-03-20 1993-07-22 Nippon Electric Co
JPH0416424Y2 ( ) * 1985-08-20 1992-04-13
JPS6236532U ( ) * 1985-08-20 1987-03-04
JPS62183522A (ja) * 1986-02-07 1987-08-11 Nippon Kogaku Kk <Nikon> 投影露光方法及び装置
JPS62204527A (ja) * 1986-03-05 1987-09-09 Hitachi Ltd マスク露光装置
JPS6322730U ( ) * 1986-07-29 1988-02-15
JPH02153517A (ja) * 1988-12-05 1990-06-13 Mitsubishi Electric Corp 半導体装置の製造装置

Similar Documents

Publication Publication Date Title
AR201758A1 ( )
AU476761B2 ( )
AU465372B2 ( )
AR201235Q ( )
AR201231Q ( )
AU474593B2 ( )
AU474511B2 ( )
AU474838B2 ( )
AU465453B2 ( )
AU465434B2 ( )
AU471343B2 ( )
AU450229B2 ( )
AU476714B2 ( )
AR201229Q ( )
AU476696B2 ( )
AU466283B2 ( )
AU472848B2 ( )
AR199451A1 ( )
AU477823B2 ( )
AU471461B2 ( )
AR195948A1 ( )
AU447540B2 ( )
AU477824B2 ( )
AU461342B2 ( )
AR210729A1 ( )