JPS6322457U - - Google Patents
Info
- Publication number
- JPS6322457U JPS6322457U JP11653686U JP11653686U JPS6322457U JP S6322457 U JPS6322457 U JP S6322457U JP 11653686 U JP11653686 U JP 11653686U JP 11653686 U JP11653686 U JP 11653686U JP S6322457 U JPS6322457 U JP S6322457U
- Authority
- JP
- Japan
- Prior art keywords
- fixed
- movable base
- base
- feed screw
- contract
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Transmission Devices (AREA)
- Moving Of Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986116536U JPH0625735Y2 (ja) | 1986-07-28 | 1986-07-28 | 精密移動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986116536U JPH0625735Y2 (ja) | 1986-07-28 | 1986-07-28 | 精密移動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6322457U true JPS6322457U (me) | 1988-02-15 |
| JPH0625735Y2 JPH0625735Y2 (ja) | 1994-07-06 |
Family
ID=31001220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986116536U Expired - Lifetime JPH0625735Y2 (ja) | 1986-07-28 | 1986-07-28 | 精密移動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0625735Y2 (me) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102491163B1 (ko) * | 2020-12-31 | 2023-01-19 | 포항공과대학교 산학협력단 | 초고진공용 정밀 변위구동 액추에이터 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56127521U (me) * | 1980-02-25 | 1981-09-28 |
-
1986
- 1986-07-28 JP JP1986116536U patent/JPH0625735Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56127521U (me) * | 1980-02-25 | 1981-09-28 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0625735Y2 (ja) | 1994-07-06 |