JPS6322457U - - Google Patents
Info
- Publication number
- JPS6322457U JPS6322457U JP11653686U JP11653686U JPS6322457U JP S6322457 U JPS6322457 U JP S6322457U JP 11653686 U JP11653686 U JP 11653686U JP 11653686 U JP11653686 U JP 11653686U JP S6322457 U JPS6322457 U JP S6322457U
- Authority
- JP
- Japan
- Prior art keywords
- fixed
- movable base
- base
- feed screw
- contract
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Transmission Devices (AREA)
- Moving Of Heads (AREA)
Description
第１図はこの考案の一実施例を示す縦断面図、
第２図は従来の装置を示す縦断面図である。
図中、１は移動台、２はナツト部材、３は固定
台、５は送りねじ、８は可撓部材である。尚、図
中同一符号は同一または相当部分を示す。
FIG. 1 is a longitudinal sectional view showing an embodiment of this invention.
FIG. 2 is a longitudinal sectional view showing a conventional device. In the figure, 1 is a moving base, 2 is a nut member, 3 is a fixed base, 5 is a feed screw, and 8 is a flexible member. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
を移動台に装着したナツト部材に螺嵌し、上記送
りねじの回動により移動台を微動させる装置にお
いて、上記移動台の外周縁近傍に軸方向に伸縮可
能な可撓部材を一体的に成形するかまたは固着し
、その他端を上記固定台に接合固定したことを特
徴とする精密移動装置。 In a device in which a feed screw rotatably supported through a fixed base is screwed into a nut member attached to a movable base, and the movable base is slightly moved by rotation of the feed screw, near the outer periphery of the movable base. A precision movement device characterized in that a flexible member that can expand and contract in the axial direction is integrally molded or fixed, and the other end is bonded and fixed to the fixed base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986116536U JPH0625735Y2 (en) | 1986-07-28 | 1986-07-28 | Precision moving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986116536U JPH0625735Y2 (en) | 1986-07-28 | 1986-07-28 | Precision moving device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6322457U true JPS6322457U (en) | 1988-02-15 |
| JPH0625735Y2 JPH0625735Y2 (en) | 1994-07-06 |
Family
ID=31001220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986116536U Expired - Lifetime JPH0625735Y2 (en) | 1986-07-28 | 1986-07-28 | Precision moving device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0625735Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102491163B1 (en) * | 2020-12-31 | 2023-01-19 | 포항공과대학교 산학협력단 | Precision displacement motion actuator for ulatra-high vacuum |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56127521U (en) * | 1980-02-25 | 1981-09-28 |
-
1986
- 1986-07-28 JP JP1986116536U patent/JPH0625735Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56127521U (en) * | 1980-02-25 | 1981-09-28 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0625735Y2 (en) | 1994-07-06 |