JPS63220422A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPS63220422A JPS63220422A JP5368287A JP5368287A JPS63220422A JP S63220422 A JPS63220422 A JP S63220422A JP 5368287 A JP5368287 A JP 5368287A JP 5368287 A JP5368287 A JP 5368287A JP S63220422 A JPS63220422 A JP S63220422A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic recording
- recording medium
- substrate
- carbon film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 23
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000010408 film Substances 0.000 claims abstract description 28
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000010409 thin film Substances 0.000 claims abstract description 18
- 239000000314 lubricant Substances 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 239000007787 solid Substances 0.000 claims abstract description 13
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 9
- 239000012808 vapor phase Substances 0.000 claims abstract description 7
- 229910018104 Ni-P Inorganic materials 0.000 claims abstract description 6
- 229910018536 Ni—P Inorganic materials 0.000 claims abstract description 6
- 238000007747 plating Methods 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 14
- 239000007789 gas Substances 0.000 claims description 8
- 229930195733 hydrocarbon Natural products 0.000 claims description 8
- 150000002430 hydrocarbons Chemical class 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 239000004215 Carbon black (E152) Substances 0.000 claims description 6
- 238000001308 synthesis method Methods 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 abstract description 7
- 239000000956 alloy Substances 0.000 abstract description 7
- 238000005260 corrosion Methods 0.000 abstract description 7
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 abstract description 6
- 230000007797 corrosion Effects 0.000 abstract description 6
- REZQBEBOWJAQKS-UHFFFAOYSA-N triacontan-1-ol Chemical compound CCCCCCCCCCCCCCCCCCCCCCCCCCCCCCO REZQBEBOWJAQKS-UHFFFAOYSA-N 0.000 abstract description 6
- 229910018134 Al-Mg Inorganic materials 0.000 abstract description 4
- 229910018467 Al—Mg Inorganic materials 0.000 abstract description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 abstract description 4
- 230000015572 biosynthetic process Effects 0.000 abstract description 4
- 238000003786 synthesis reaction Methods 0.000 abstract description 4
- 239000000203 mixture Substances 0.000 abstract description 2
- 239000002904 solvent Substances 0.000 abstract description 2
- 229910000531 Co alloy Inorganic materials 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
- 238000005461 lubrication Methods 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- -1 and at the same time Substances 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- OESYAPCYPZGMRH-UHFFFAOYSA-N trimethoxy(triacontyl)silane Chemical compound CCCCCCCCCCCCCCCCCCCCCCCCCCCCCC[Si](OC)(OC)OC OESYAPCYPZGMRH-UHFFFAOYSA-N 0.000 description 1
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は耐久性、高温特性および耐腐食特性に優れた表
面潤滑性能を有する磁気記録媒体の製造方法に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method for producing a magnetic recording medium having surface lubrication performance with excellent durability, high-temperature properties, and anti-corrosion properties.
(従来の技術)
磁気記録媒体の表面は磁気ヘッドを浮上させるために平
滑で潤滑性能をもつことが必要であり、また磁気ヘッド
がコンタクト・スタート・ストップをくりかえすために
耐久性、耐腐食性の表面をも必要とする。このため従来
の塗布型の磁気記録媒体にあっては磁性材料を接着させ
る接着剤中にAl2O5等を混入させたり、潤滑剤を含
有させたりする方法が行われてきた。しかしながら近年
磁気記録媒体の高密度化が進み、金属薄膜の媒体が用い
られるようになってきたため、従来のような塗布型の媒
体は採用できなくなり、これに代り得る媒体表面を作製
する必要が生じている。(Prior art) The surface of a magnetic recording medium must be smooth and lubricated in order to allow the magnetic head to fly, and since the magnetic head repeats contact start and stop, it must be durable and corrosion-resistant. It also requires a surface. For this reason, in conventional coating-type magnetic recording media, methods have been used in which Al2O5 or the like is mixed into the adhesive for bonding the magnetic material, or a lubricant is included. However, in recent years, the density of magnetic recording media has increased and metal thin film media have come to be used, making it no longer possible to use conventional coated media, and it has become necessary to create a media surface that can replace this. ing.
(発明の構成)
本発明はこれにかんがみ耐久性、高温特性および耐腐食
特性に優れた表面潤滑性能を有する磁気記録媒体を得る
ことを目的としてなされたものでその要旨とするところ
はNi−Pメッキ層を有する非磁性基板上に強磁性金属
薄膜を形成させたのち、該金属薄膜の表面に、炭化水素
とアルゴンの混合ガスからプラズマ気相合成法により炭
素膜を形成させ、ついで該炭素膜上に極性固体潤滑剤の
薄膜を形成させることを特徴とする磁気記録媒体の製造
方法にある。(Structure of the Invention) In view of this, the present invention has been made for the purpose of obtaining a magnetic recording medium having surface lubrication performance with excellent durability, high-temperature properties, and corrosion resistance properties, and the gist thereof is that Ni-P After forming a ferromagnetic metal thin film on a nonmagnetic substrate having a plating layer, a carbon film is formed on the surface of the metal thin film using a plasma vapor phase synthesis method from a mixed gas of hydrocarbon and argon, and then the carbon film is A method for manufacturing a magnetic recording medium, comprising forming a thin film of a polar solid lubricant thereon.
本発明者らは目的とする磁気記録媒体の製造方法につい
て種々検討した結果、従来公知の非磁性基板上に形成し
た磁気記録媒体の表面を炭化水素とアルゴンの混合ガス
からプラズマ気相合成した炭素膜で被膜し、さらにその
上を極性固体潤滑剤を被覆すれば、金属薄膜と炭素膜は
それぞれ新生固体であるため化学的結合が強まり、同時
に炭素膜と固体潤滑剤層との間にも化学的結合が行われ
るための各膜間の密着性が向上するとともに耐久性が得
られることを知見した。これに加えてプラズマ気相合成
法によって形成された炭素膜は、ピンホール等の欠陥を
有しないため、金属薄膜媒体に対して対腐食性を付与す
るとともに、それ自身高温特性が良いことから、媒体全
体の高温特性が向上することを見出すと共に、この炭素
膜上に極性固体潤滑剤を被覆することにより、極性固体
潤滑剤自身の潤滑性と炭素膜の潤滑性とが相乗された表
面潤滑性能をもつ磁気記録媒体が得られることを確認し
て本発明を完成させた。本発明の方法に用いる非磁性基
板は従来公知のもので良くこれにはNi−Pメッキした
A l−Mg合金アルマイト処理したAl−Mg合金等
の金属、プラスチック、セラミックス、ガラスの板が例
示される。また強磁性金属薄膜にはスパッタリング法ま
たはメッキ法等で作製されるCo系合金、Fe2O8等
−の金属あるいは金属酸化物の薄膜が例示さ
れる。As a result of various studies on manufacturing methods for the intended magnetic recording medium, the inventors of the present invention found that the surface of a magnetic recording medium formed on a conventionally known non-magnetic substrate was made by plasma vapor phase synthesis using a mixed gas of hydrocarbon and argon. If a film is coated and then a polar solid lubricant is coated on top of that, the chemical bond will be strengthened because the metal thin film and carbon film are each new solids, and at the same time, chemical bonds will be formed between the carbon film and the solid lubricant layer. It was found that the adhesion between each film for the purpose of effective bonding was improved, and durability was also obtained. In addition, carbon films formed by plasma vapor phase synthesis do not have defects such as pinholes, so they provide corrosion resistance to metal thin film media, and they themselves have good high-temperature properties. We discovered that the high-temperature properties of the entire medium were improved, and by coating this carbon film with a polar solid lubricant, we achieved surface lubrication performance that synergized the lubricity of the polar solid lubricant itself with that of the carbon film. The present invention was completed by confirming that a magnetic recording medium having the following characteristics could be obtained. The non-magnetic substrate used in the method of the present invention may be a conventionally known one, and examples include plates of metals such as Ni-P plated Al-Mg alloy, alumite-treated Al-Mg alloy, plastics, ceramics, and glass plates. Ru. Examples of the ferromagnetic metal thin film include Co-based alloys, Fe2O8 and other metals or metal oxide thin films produced by sputtering or plating.
この基板に被覆される炭素膜の厚さは50λ以上では薄
すぎて信頼性の乏しいものとなり、500λ以上では媒
体と磁気ヘッド間のスペーシングが大きくなりすぎるの
で、50〜500Aの範囲、好ましくは100〜200
^の範囲とすることがよい。If the thickness of the carbon film coated on this substrate is 50λ or more, it will be too thin and the reliability will be poor, and if it is 500λ or more, the spacing between the medium and the magnetic head will become too large. 100-200
It is preferable to set it within the range of ^.
また、炭素膜上に被覆される極性固体潤滑剤としてはト
リアコンタノール、トリアコンチルトリメトキシシラン
等が例示されるが、その厚さが30Å以下では薄すぎて
信頼性が乏しいものとなり、200λ以上では媒体と磁
気ヘッド間のスペーシングが大きくなりすぎるので、4
0〜180人の範囲、好ましくは50〜80人の範囲が
適当である。In addition, examples of polar solid lubricants coated on the carbon film include triacontanol and triacontyltrimethoxysilane, but if the thickness is less than 30 Å, it is too thin and unreliable; In this case, the spacing between the medium and the magnetic head becomes too large, so 4
A range of 0 to 180 people, preferably 50 to 80 people is suitable.
本発明の方法では炭化水素とアルゴンの混合ガスを用い
てこれをプラズマ処理し、プラズマ気相合成法によって
得られる炭素膜を金属薄膜上に析出させればよい。この
場合のプラズマ気相合成法は常法によって反応器内に基
板を設置し、反応器内に炭化水素とアルゴンの混合ガス
を導入してから器内雰囲気圧力を0.1〜0.2トルと
し、ついで基板を80〜170℃の範囲、好ましくは1
00〜130℃の範囲で加熱しながら1〜30MHzの
高周波電力を印加して、系内にプラズマを発生させれば
よい。この場合混合ガス中の炭化水素の含有率は0.1
〜10%の範囲、好ましくは1〜5%の範囲である。こ
れによって炭化水素とアルゴンの混合ガスは、プラズマ
火炎と接触し、熱分解で発生する炭素は基板上に均一な
板状物として所望の厚さのプラズマ重合膜として被覆さ
れる。In the method of the present invention, a mixed gas of hydrocarbon and argon is used for plasma treatment, and a carbon film obtained by plasma vapor phase synthesis is deposited on a metal thin film. In this case, the plasma vapor phase synthesis method involves installing a substrate in a reactor using a conventional method, introducing a mixed gas of hydrocarbon and argon into the reactor, and then increasing the atmospheric pressure in the reactor by 0.1 to 0.2 torr. and then heat the substrate to a temperature in the range of 80 to 170°C, preferably 1
Plasma may be generated in the system by applying high frequency power of 1 to 30 MHz while heating in the range of 00 to 130°C. In this case, the content of hydrocarbons in the mixed gas is 0.1
-10%, preferably 1-5%. As a result, the hydrocarbon and argon mixture comes into contact with the plasma flame, and the carbon generated by the thermal decomposition is coated on the substrate as a plasma polymerized film of a desired thickness in the form of a uniform plate.
なお、ここに使用される炭化水素としては、メタン、エ
タン、プロパン、エチレン、アセチレン等が例示される
。Note that examples of hydrocarbons used here include methane, ethane, propane, ethylene, and acetylene.
第1図はこのようにして得られた本発明による磁性記録
媒体を示すもので、例えばNi−P下地メッキ層2を有
する非磁性合金基板1に強磁性金属薄膜3を施した磁気
記録媒体表面に炭素膜4とこれを被覆する極性固体潤滑
剤の薄膜5を設けた構成である。FIG. 1 shows a magnetic recording medium according to the present invention obtained in this way. For example, the surface of the magnetic recording medium is formed by applying a ferromagnetic metal thin film 3 to a non-magnetic alloy substrate 1 having a Ni-P underplating layer 2. The structure includes a carbon film 4 and a thin film 5 of polar solid lubricant covering the carbon film 4.
つぎに本発明の実施例をあげる。Next, examples of the present invention will be given.
実施例
表面にNL−Pを施したAl−Mg合金板上にメッキ法
にてCo系合金の強磁性金属薄膜を施した基板を内部に
放電電極対を有する反応装置の中の中央部に設置し、両
側に電極を等間隔に設置した。ついで、この反応器内の
圧力を5X10−2トルまで排気したのち、ここにメタ
ンとアルゴンを導入し、ガス流通下に反応器内の圧力を
0.2トルに調整し、この雰囲気下で電極間に13.5
6MHzの高周波電力(30W)を印加してグロー放電
を発生させ、このプラズマによる気相沈積反応を行わせ
たところ、強磁性金属薄膜の表面に約40OAの炭素の
プラズマ重合膜が形成された。Example A substrate with a ferromagnetic metal thin film of Co-based alloy applied by plating on an Al-Mg alloy plate with NL-P applied to the surface was installed in the center of a reactor having a pair of discharge electrodes inside. Electrodes were placed at equal intervals on both sides. Next, the pressure inside this reactor was evacuated to 5X10-2 torr, then methane and argon were introduced there, and the pressure inside the reactor was adjusted to 0.2 torr under gas flow. 13.5 between
A glow discharge was generated by applying a 6 MHz high frequency power (30 W), and a gas phase deposition reaction was caused by this plasma, and a plasma polymerized carbon film of about 40 OA was formed on the surface of the ferromagnetic metal thin film.
つぎに、この基板を器内から取り出したのち、ベンゼン
、エーテル等の溶剤で希釈したトリアコ 4ンタノール
(極性固体潤滑剤)をスピンコーターで処理して約80
人の潤滑剤を形成させた。この基板をCSS特性、摩擦
係数、耐湿特性を検査したところ、CSS特性30.0
00回以上、摩擦係数0,2.40℃、85%RH耐湿
試験結果は満足するものであることが確認された。この
ことは本発明の方法によれば従来品同様またはそれ以上
の耐久性、高温特性および耐食性を有し、優れた表面潤
滑性能を有する磁気記録媒体が得られることを示すもの
である。Next, after taking this substrate out of the container, it is treated with triacontanol (polar solid lubricant) diluted with a solvent such as benzene or ether using a spin coater, and then coated with approximately 80%
Formed a human lubricant. When this board was inspected for CSS characteristics, friction coefficient, and moisture resistance characteristics, the CSS characteristics were 30.0.
It was confirmed that the results of the moisture resistance test at 00 times or more, friction coefficient 0, 2.40°C, 85% RH were satisfactory. This shows that according to the method of the present invention, a magnetic recording medium can be obtained which has durability, high-temperature properties and corrosion resistance similar to or better than conventional products, and has excellent surface lubrication performance.
第1図は本発明方法により得られる磁気記録媒体の1例
を示す説明図である。
1・・・非磁性合金基板、
2・・・Ni−P下地メッキ層、
3・・・強磁性金属薄膜、
4・・・炭素膜、
5・・・極性固体潤滑剤の膜。FIG. 1 is an explanatory diagram showing one example of a magnetic recording medium obtained by the method of the present invention. DESCRIPTION OF SYMBOLS 1...Nonmagnetic alloy substrate, 2...Ni-P base plating layer, 3...Ferromagnetic metal thin film, 4...Carbon film, 5...Polar solid lubricant film.
Claims (1)
膜を形成させたのち、該金属薄膜の表面に、炭化水素と
アルゴンの混合ガスからプラズマ気相合成法により炭素
膜を形成させ、ついで該炭素膜上に極性固体潤滑剤の薄
膜を形成させることを特徴とする磁気記録媒体の製造方
法。After forming a ferromagnetic metal thin film on a nonmagnetic substrate having a Ni-P plating layer, a carbon film is formed on the surface of the metal thin film using a plasma vapor phase synthesis method from a mixed gas of hydrocarbon and argon, and then A method for manufacturing a magnetic recording medium, comprising forming a thin film of a polar solid lubricant on the carbon film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5368287A JPS63220422A (en) | 1987-03-09 | 1987-03-09 | Production of magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5368287A JPS63220422A (en) | 1987-03-09 | 1987-03-09 | Production of magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63220422A true JPS63220422A (en) | 1988-09-13 |
Family
ID=12949586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5368287A Pending JPS63220422A (en) | 1987-03-09 | 1987-03-09 | Production of magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63220422A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5231613A (en) * | 1990-01-19 | 1993-07-27 | Sharp Kabushiki Kaisha | Magneto-optical recording device |
US5386400A (en) * | 1990-01-19 | 1995-01-31 | Sharp Kabushiki Kaisha | Magneto-optical head device having a lubricated member |
-
1987
- 1987-03-09 JP JP5368287A patent/JPS63220422A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5231613A (en) * | 1990-01-19 | 1993-07-27 | Sharp Kabushiki Kaisha | Magneto-optical recording device |
US5386400A (en) * | 1990-01-19 | 1995-01-31 | Sharp Kabushiki Kaisha | Magneto-optical head device having a lubricated member |
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