JPS6321877U - - Google Patents
Info
- Publication number
- JPS6321877U JPS6321877U JP11418686U JP11418686U JPS6321877U JP S6321877 U JPS6321877 U JP S6321877U JP 11418686 U JP11418686 U JP 11418686U JP 11418686 U JP11418686 U JP 11418686U JP S6321877 U JPS6321877 U JP S6321877U
- Authority
- JP
- Japan
- Prior art keywords
- section
- baring
- next process
- chucks
- transports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 3
- 230000032258 transport Effects 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11418686U JPS6321877U (OSRAM) | 1986-07-25 | 1986-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11418686U JPS6321877U (OSRAM) | 1986-07-25 | 1986-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6321877U true JPS6321877U (OSRAM) | 1988-02-13 |
Family
ID=30996689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11418686U Pending JPS6321877U (OSRAM) | 1986-07-25 | 1986-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6321877U (OSRAM) |
-
1986
- 1986-07-25 JP JP11418686U patent/JPS6321877U/ja active Pending
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