JPS6321863U - - Google Patents

Info

Publication number
JPS6321863U
JPS6321863U JP11624286U JP11624286U JPS6321863U JP S6321863 U JPS6321863 U JP S6321863U JP 11624286 U JP11624286 U JP 11624286U JP 11624286 U JP11624286 U JP 11624286U JP S6321863 U JPS6321863 U JP S6321863U
Authority
JP
Japan
Prior art keywords
cantilever beam
deflected
amount
acceleration
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11624286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11624286U priority Critical patent/JPS6321863U/ja
Publication of JPS6321863U publication Critical patent/JPS6321863U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Micromachines (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
JP11624286U 1986-07-29 1986-07-29 Pending JPS6321863U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11624286U JPS6321863U (enrdf_load_stackoverflow) 1986-07-29 1986-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11624286U JPS6321863U (enrdf_load_stackoverflow) 1986-07-29 1986-07-29

Publications (1)

Publication Number Publication Date
JPS6321863U true JPS6321863U (enrdf_load_stackoverflow) 1988-02-13

Family

ID=31000648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11624286U Pending JPS6321863U (enrdf_load_stackoverflow) 1986-07-29 1986-07-29

Country Status (1)

Country Link
JP (1) JPS6321863U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03168793A (ja) * 1989-11-29 1991-07-22 Pioneer Electron Corp 光源用反射部材
JP2007263916A (ja) * 2006-03-30 2007-10-11 National Institute Of Advanced Industrial & Technology アクティブ型加速度センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03168793A (ja) * 1989-11-29 1991-07-22 Pioneer Electron Corp 光源用反射部材
JP2007263916A (ja) * 2006-03-30 2007-10-11 National Institute Of Advanced Industrial & Technology アクティブ型加速度センサ

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