JPS6321863U - - Google Patents
Info
- Publication number
- JPS6321863U JPS6321863U JP11624286U JP11624286U JPS6321863U JP S6321863 U JPS6321863 U JP S6321863U JP 11624286 U JP11624286 U JP 11624286U JP 11624286 U JP11624286 U JP 11624286U JP S6321863 U JPS6321863 U JP S6321863U
- Authority
- JP
- Japan
- Prior art keywords
- cantilever beam
- deflected
- amount
- acceleration
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 1
- 239000000696 magnetic material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
Landscapes
- Micromachines (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Pressure Sensors (AREA)
Description
第１図は本考案に係るセンサの構成を示す断面
図、第２図は従来センサの構成を示す断面図、第
３図は第２図従来センサの作用説明図、第４図は
第１図実施例に接続される外部回路の構成説明図
、第５図は第１実施例におけるコイル３０Ｂの通
電回路を示すブロツク図、第６図は第１図実施例
の作用説明図、第７図は第１図実施例における圧
電素子１６Ｕ，１６Ｌの強制放電を行なうＦＥＴ
４２の挿入位置説明図である。
１０，１０Ｕ，１０Ｌ…片持梁、１４，１４Ｕ
，１４Ｌ…錘、１６，１６Ｕ，１６Ｌ…圧電素子
、３０…電磁石。
Fig. 1 is a sectional view showing the structure of the sensor according to the present invention, Fig. 2 is a sectional view showing the structure of the conventional sensor, Fig. 3 is an explanatory diagram of the operation of the conventional sensor shown in Fig. 2, and Fig. 4 is the same as Fig. 1. FIG. 5 is a block diagram showing the energizing circuit of the coil 30B in the first embodiment. FIG. 6 is an explanatory diagram of the operation of the embodiment shown in FIG. 1. FIG. 1 FET for forced discharge of piezoelectric elements 16U and 16L in the embodiment
42 is an explanatory diagram of the insertion position of 42. 10, 10U, 10L...Cantilever beam, 14, 14U
, 14L... Weight, 16, 16U, 16L... Piezoelectric element, 30... Electromagnet.
Claims (1)
、片持梁に貼着され該梁の撓み量に応じた量の電
荷を加速度検出信号として発生する圧電素子と、
撓み変形した片持梁を復帰方向へ駆動する電磁石
と、を有する、ことを特徴とする圧電型加速度セ
ンサ。 a cantilever beam made of a magnetic material that is deflected and deformed by an acceleration force; a piezoelectric element that is attached to the cantilever beam and generates an amount of charge as an acceleration detection signal according to the amount of deflection of the beam;
A piezoelectric acceleration sensor comprising: an electromagnet that drives a deflected cantilever beam in a return direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11624286U JPS6321863U (en) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11624286U JPS6321863U (en) | 1986-07-29 | 1986-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6321863U true JPS6321863U (en) | 1988-02-13 |
Family
ID=31000648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11624286U Pending JPS6321863U (en) | 1986-07-29 | 1986-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6321863U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03168793A (en) * | 1989-11-29 | 1991-07-22 | Pioneer Electron Corp | Reflecting member for light source |
| JP2007263916A (en) * | 2006-03-30 | 2007-10-11 | National Institute Of Advanced Industrial & Technology | Active accelerometer |
-
1986
- 1986-07-29 JP JP11624286U patent/JPS6321863U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03168793A (en) * | 1989-11-29 | 1991-07-22 | Pioneer Electron Corp | Reflecting member for light source |
| JP2007263916A (en) * | 2006-03-30 | 2007-10-11 | National Institute Of Advanced Industrial & Technology | Active accelerometer |
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