JPS6321863U - - Google Patents
Info
- Publication number
- JPS6321863U JPS6321863U JP11624286U JP11624286U JPS6321863U JP S6321863 U JPS6321863 U JP S6321863U JP 11624286 U JP11624286 U JP 11624286U JP 11624286 U JP11624286 U JP 11624286U JP S6321863 U JPS6321863 U JP S6321863U
- Authority
- JP
- Japan
- Prior art keywords
- cantilever beam
- deflected
- amount
- acceleration
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 1
- 239000000696 magnetic material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
Landscapes
- Micromachines (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11624286U JPS6321863U (cs) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11624286U JPS6321863U (cs) | 1986-07-29 | 1986-07-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6321863U true JPS6321863U (cs) | 1988-02-13 |
Family
ID=31000648
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11624286U Pending JPS6321863U (cs) | 1986-07-29 | 1986-07-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6321863U (cs) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03168793A (ja) * | 1989-11-29 | 1991-07-22 | Pioneer Electron Corp | 光源用反射部材 |
JP2007263916A (ja) * | 2006-03-30 | 2007-10-11 | National Institute Of Advanced Industrial & Technology | アクティブ型加速度センサ |
-
1986
- 1986-07-29 JP JP11624286U patent/JPS6321863U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03168793A (ja) * | 1989-11-29 | 1991-07-22 | Pioneer Electron Corp | 光源用反射部材 |
JP2007263916A (ja) * | 2006-03-30 | 2007-10-11 | National Institute Of Advanced Industrial & Technology | アクティブ型加速度センサ |