JPS63217678A - Pulse laser - Google Patents
Pulse laserInfo
- Publication number
- JPS63217678A JPS63217678A JP5018687A JP5018687A JPS63217678A JP S63217678 A JPS63217678 A JP S63217678A JP 5018687 A JP5018687 A JP 5018687A JP 5018687 A JP5018687 A JP 5018687A JP S63217678 A JPS63217678 A JP S63217678A
- Authority
- JP
- Japan
- Prior art keywords
- rays
- generating
- anode
- main
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000003990 capacitor Substances 0.000 abstract description 5
- 239000000463 material Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000005284 excitation Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 101100508105 Rattus norvegicus Ide gene Proteins 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の目的〕
（産業上の利用分野）
本発明は、ＴＥＡＣＯ，レーザ、エキシマレーザ、金属
蒸気レーザ、ハロゲンガスレーザなど、レーザガス中で
パルス放電励起を行うパルスレーザ装置に関する。[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention relates to a pulse laser device that performs pulse discharge excitation in a laser gas, such as a TEACO, laser, excimer laser, metal vapor laser, or halogen gas laser. .
（従来の技術）
レーザガスを励起してパルスレーザ発振を行うレーｆ装
にとしてＴＢＡＣＯ，レーザ、エキシマレーザ、金属蒸
気レーザ、ハロゲンガスレーザなどがある。これらは、
電子線励起の大出力のものを除けば、放電励起のものが
一般的である。放電励起方式で、大出力化を行い、かつ
高繰返しのパルスレーザ発振を行うために、レーザガス
圧力を上げる必要がある。そのために、予備電離の方法
としてＸ線予備電離法が用いられている。第３図は従来
使用されているＸ線予備電離法である。２つの主電極１
，１１のうち陰極にあたる主電極１の背後に真空容−器
９が一体化され、Ｘ線発生装置が設置されている。真空
容器９内にＸ線発生用陰極１０が設置され、またＸ線発
生用陽極１６が、設置されている。高圧電源からコンデ
ンサ１４に充電され、スイッチング素子１３によシ、抵
抗素子１２を介して高電圧パルスをＸ線発生用陰極１０
とＸ線発生用陽極１６の間に印加する。その結果、Ｘ線
がＸ線発生用陽極１６から発生し、Ｘ線が主電極１を透
過し主電極１，１１の間の主放電領域を予備電離する。(Prior Art) Laser f systems that excite laser gas to perform pulsed laser oscillation include TBACO lasers, lasers, excimer lasers, metal vapor lasers, and halogen gas lasers. these are,
Except for high-output electron beam excitation, discharge excitation is common. With the discharge excitation method, it is necessary to increase the laser gas pressure in order to achieve high output and high repetition pulse laser oscillation. For this purpose, an X-ray preionization method is used as a preionization method. FIG. 3 shows the conventionally used X-ray preionization method. two main electrodes 1
, 11, a vacuum container 9 is integrated behind the main electrode 1, which is a cathode, and an X-ray generator is installed therein. An X-ray generating cathode 10 is installed in the vacuum container 9, and an X-ray generating anode 16 is also installed. A capacitor 14 is charged from a high-voltage power supply, and a high-voltage pulse is passed through a switching element 13 and a resistor 12 to an X-ray generating cathode 10.
and the X-ray generating anode 16. As a result, X-rays are generated from the X-ray generating anode 16, and the X-rays pass through the main electrode 1 and pre-ionize the main discharge region between the main electrodes 1 and 11.
一方、予め高圧電源からコンデンサ３に充電されており
、抵抗素子１２を介して高電圧をＸ線発生用陰極１ｏと
Ｘ線発生用陽極１６の間に印加と同時に、遅延回路１５
を通じてスイッチング素子２が動作し、その結果抵抗素
子４を介して高電圧パルスが主電極１，１１の間に印加
され、主放電が行われる。この様な、従来の方法である
と、Ｘ線発生用陰極１ｏは、電界放出にょシミ子を発生
しているため、電子の発生が不安定になシ、その結果Ｘ
線発生が、不均一となり主電極１，１′の間の主放電領
域を一様に予備電離出来ない。従って効率が低下する。On the other hand, the capacitor 3 is charged in advance from a high-voltage power supply, and at the same time a high voltage is applied between the X-ray generation cathode 1o and the X-ray generation anode 16 via the resistance element 12, the delay circuit 15
As a result, a high voltage pulse is applied between the main electrodes 1 and 11 via the resistance element 4, and a main discharge is performed. In such a conventional method, the X-ray generating cathode 1o generates field emission particles, so the generation of electrons becomes unstable, and as a result, the
Line generation becomes non-uniform and the main discharge region between the main electrodes 1 and 1' cannot be uniformly pre-ionized. Efficiency is therefore reduced.
また、高電圧パルスをＸ線発生用陰極１０とＸ線発生用
陽極１６の間に印加するだめ、どうしても、主放電用高
電圧パルスとの同期が難しい。また、装置も複雑になり
大型化し、さらに高価となる。また、Ｘ線発生用陰極１
０は、電界放出によシミ子を発生しているため、Ｘ線発
生用陰極１０の消耗が激しく、寿命が低下する欠点があ
った。Furthermore, since the high voltage pulse is applied between the X-ray generating cathode 10 and the X-ray generating anode 16, it is difficult to synchronize it with the main discharge high voltage pulse. Furthermore, the device becomes complicated, larger, and more expensive. In addition, X-ray generation cathode 1
In the case of No. 0, the X-ray generating cathode 10 was rapidly worn out due to the generation of stains due to field emission, resulting in a shortened lifespan.
（発明が解決しようとする問題点）
以上のように従来のパルスレーザ装置では、主放電領域
を一様に予備電離するが出来ず、効率が低い。また、装
置も複雑になシ大型化し、さらに高価となる。また、パ
ルスレーザの寿命が低下する欠点があった。(Problems to be Solved by the Invention) As described above, the conventional pulse laser device cannot uniformly pre-ionize the main discharge region, resulting in low efficiency. In addition, the device becomes complicated, larger, and more expensive. Further, there was a drawback that the life of the pulsed laser was shortened.
本発明の目的は、これらの欠点を解決し、電子の発生を
安定に行ない、かつ効率の向上、長寿命化を図ったパル
スレーザを提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to solve these drawbacks and provide a pulsed laser that stably generates electrons, has improved efficiency, and has a longer life.
（問題点を解決するための手段）
本発明にかかるパルスレーザ装置は、電界放出による電
子の発生の不安定性を抑制するために、Ｘ線発生陰極を
熱陰極にし、電子の発生を安定に行い、さらに％Ｘ線の
主電極１における透過効率を上げるようにした。(Means for Solving the Problems) The pulse laser device according to the present invention uses a hot cathode as the X-ray generating cathode to suppress the instability of electron generation due to field emission, and stably generates electrons. Furthermore, the transmission efficiency of X-rays at the main electrode 1 was increased by %.
（作用）
本発明は、Ｘ線発生用陰極を熱陰極にし、電子の発生を
安定に行い、さらにＸ線発生用陽極の形状をＸ線が反射
するようにして、主電極ｌ、ｆの間の主放電領域を一様
に予備電離し、従って効率が向上する。さらに、長寿命
化が達成される。(Function) The present invention uses a hot cathode as the X-ray generating cathode to stably generate electrons, and furthermore, the X-ray generating anode is shaped so that the X-rays are reflected, so that the uniformly pre-ionizes the main discharge region of the area, thus improving efficiency. Furthermore, a longer life is achieved.
（実施例）
第１図に、本発明の一実施例を示す。主放電電極１の背
後にＸ線発生用陽極５と、さらにＸ線発生用陽極５の背
後に熱シールド板６と、さらに熱シールド板６の背後に
ヒータ７を有し、またＸ線発生用陽極５の近傍に制御電
極８を設置し、Ｘ線発生用陽極５、熱シールド板６、ヒ
ータ７、および制御電極８を、主放電電極１′と一体化
された真空容器９で覆われ、また主放電電極１′と真空
容器９が絶縁されている。高圧電源からコンデンサ１４
に充電され、スイッチング素子１３により、抵抗素子１
２を介して高電圧パルスをＸ線発生用陰極であるヒータ
７とＸ線発生用陽極５の間に印加する。その結果、Ｘ線
が陽極５から発生し、Ｘ線が主電極１を透過し主電極１
，１′の間に印加され、主放電が行われる。本発明の構
成によシ、Ｘ線発生が、均一となシ主電極１，１１の間
の主放電領域を一様に予備ｍ離することが出きた。従っ
て効率が向上し、さらに長寿命化が達成された。(Example) FIG. 1 shows an example of the present invention. There is an anode 5 for X-ray generation behind the main discharge electrode 1, a heat shield plate 6 behind the anode 5 for X-ray generation, and a heater 7 further behind the heat shield plate 6. A control electrode 8 is installed near the anode 5, and the X-ray generating anode 5, heat shield plate 6, heater 7, and control electrode 8 are covered with a vacuum container 9 integrated with the main discharge electrode 1'. Further, the main discharge electrode 1' and the vacuum vessel 9 are insulated. Capacitor 14 from high voltage power supply
is charged, and the resistance element 1 is charged by the switching element 13.
2, a high voltage pulse is applied between the heater 7, which is an X-ray generating cathode, and the X-ray generating anode 5. As a result, X-rays are generated from the anode 5, and the X-rays pass through the main electrode 1.
, 1', and a main discharge occurs. According to the configuration of the present invention, X-ray generation is uniform, and the main discharge area between the main electrodes 1 and 11 can be uniformly spaced apart by a predetermined distance of m. Therefore, efficiency has been improved and a longer life has been achieved.
本発明は、Ｘ線発生用陰極であるヒータ７に、タングス
テンなどの高融点材料を用いているが、熱電子放出材料
を用いても、同様に本発明の効果が得られる。熱電子放
出材料として、ホウ化物エミッタ（たとえば、ＣａＢ、
、Ｌａ８６等）、炭化物エミッタ（たとえば、Ｔｉｅ等
）、鼠化物エミッタ（たとえば、ＺｒＮ、ＮｂＮ等）等
ならば、本発明と同様の効果が得られる。第２図に、本
発明の他の一実施例の要部を示す。Ｘ線発生用陰極であ
る熱電子放出材料１１を示し、１５は熱電子放出材料加
熱用ヒータである。In the present invention, a high melting point material such as tungsten is used for the heater 7, which is a cathode for generating X-rays, but the effects of the present invention can be similarly obtained even if a thermionic emission material is used. Boride emitters (e.g. CaB,
, La86, etc.), carbide emitters (for example, Tie, etc.), ratide emitters (for example, ZrN, NbN, etc.), etc., can provide the same effects as the present invention. FIG. 2 shows a main part of another embodiment of the present invention. A thermionic emission material 11 which is an X-ray generating cathode is shown, and 15 is a heater for heating the thermionic emission material.
以上述べたように本発明によるパルスレーザ装置では、
Ｘ線発生用陰極を熱陰極にし、電子の発生を安定に行い
、さらにＸ線発生用陽極の形状をＸ線が反射するように
して、主電極間の主放電領域を一様に予備電離し、従っ
て効率が同上する。As described above, in the pulse laser device according to the present invention,
The X-ray generation cathode is made into a hot cathode to stably generate electrons, and the X-ray generation anode is shaped so that the X-rays are reflected to uniformly pre-ionize the main discharge area between the main electrodes. , so the efficiency is the same as above.
さらに、長寿命化が達成される。Furthermore, a longer life is achieved.
第１図は、本発明の一実施例によるパルスレーザの要部
を示す構成図、第２図は、本発明の他の一実施例による
パルスレーザの要部を示す構成図、第３図従来のＸ線予
備電離形パルスレーザの要部を示す構成図である。
１．１′・・・主放電室ｆｆｌ、２．１３・・・スイッ
チング素子、３，１４・・・主コンデンサ、４，１２・
・・抵抗素子、６・・・熱シールド板、７・・・ヒータ
、８・・・制御電極、９・・・真空容器、１０・・・Ｘ
線発生用電極、１１・・・熱電子放出材料、１５・・・
熱電子放出材料加熱用ヒータ、１６・・・Ｘ紗発生用陽
極。
代理人 弁理士 則 近 憲 佑
同 竹 花 喜久男
第 １ 図
第 ２ 図
ｒ−−”−−”−−−−一”’ −−コ第 ３
図FIG. 1 is a block diagram showing the main parts of a pulse laser according to an embodiment of the present invention, FIG. 2 is a block diagram showing the main parts of a pulse laser according to another embodiment of the invention, and FIG. 3 is a block diagram showing the main parts of a pulse laser according to another embodiment of the present invention. FIG. 2 is a configuration diagram showing a main part of an X-ray pre-ionization pulse laser. 1.1'... Main discharge chamber ffl, 2.13... Switching element, 3, 14... Main capacitor, 4, 12...
...Resistance element, 6...Heat shield plate, 7...Heater, 8...Control electrode, 9...Vacuum container, 10...X
Line generation electrode, 11... Thermionic emission material, 15...
Heater for heating thermionic emission material, 16... Anode for generating X-ray gauze. Agent Patent Attorney Nori Ken Yudo Takehana Kikuo No. 1 Figure 2 Figure r--"--"---1"'--Co No. 3
figure
Claims (1)
て、前記放電電極の少なくとも一方の電極が、前記電極
の背後にＸ線発生用陽極と、さらに前記Ｘ線発生用陽極
の背後に熱シールド板と、さらに前記熱シールド板の背
後にヒータを有し、また前記Ｘ線発生用陽極近傍に制御
電極を設置し、前記Ｘ線発生用陽極、前記熱シールド板
、前記ヒータ、および前記制御電極を、前記電極の背後
から金属容器で覆われ、また前記電極板と前記金属容器
が絶縁され、かつ、前記金属容器を真空にしたことを特
徴とするパルスレーザ。In a gas circulation pulse laser including a pair of discharge electrodes, at least one of the discharge electrodes has an anode for generating X-rays behind the electrode, and a heat shield plate behind the anode for generating X-rays; Further, a heater is provided behind the heat shield plate, and a control electrode is installed near the X-ray generating anode, and the X-ray generating anode, the heat shield plate, the heater, and the control electrode are connected to the A pulsed laser characterized in that an electrode is covered from behind with a metal container, the electrode plate and the metal container are insulated, and the metal container is evacuated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5018687A JPS63217678A (en) | 1987-03-06 | 1987-03-06 | Pulse laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5018687A JPS63217678A (en) | 1987-03-06 | 1987-03-06 | Pulse laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63217678A true JPS63217678A (en) | 1988-09-09 |
Family
ID=12852149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5018687A Pending JPS63217678A (en) | 1987-03-06 | 1987-03-06 | Pulse laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63217678A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01128482A (en) * | 1987-11-13 | 1989-05-22 | Agency Of Ind Science & Technol | Gas laser oscillator |
| DE4108472A1 (en) * | 1991-03-15 | 1992-09-17 | Lambda Physik Forschung | DEVICE FOR PREIONING GAS IN A PULSED GAS LASER |
-
1987
- 1987-03-06 JP JP5018687A patent/JPS63217678A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01128482A (en) * | 1987-11-13 | 1989-05-22 | Agency Of Ind Science & Technol | Gas laser oscillator |
| DE4108472A1 (en) * | 1991-03-15 | 1992-09-17 | Lambda Physik Forschung | DEVICE FOR PREIONING GAS IN A PULSED GAS LASER |
| US5247535A (en) * | 1991-03-15 | 1993-09-21 | Lambda Physik Forschungsgesellschaft Mbh | Apparatus for preionization of gas in a pulsed gas laser |
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