JPH02288386A - Gas laser oscillator - Google Patents
Gas laser oscillatorInfo
- Publication number
- JPH02288386A JPH02288386A JP11008189A JP11008189A JPH02288386A JP H02288386 A JPH02288386 A JP H02288386A JP 11008189 A JP11008189 A JP 11008189A JP 11008189 A JP11008189 A JP 11008189A JP H02288386 A JPH02288386 A JP H02288386A
- Authority
- JP
- Japan
- Prior art keywords
- tube
- ray
- anode
- laser
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 abstract description 9
- 229910052751 metal Inorganic materials 0.000 abstract description 9
- 239000003990 capacitor Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
- H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation
- H01S3/09716—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation by ionising radiation
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、金属あるいは非金属材料の加工等に適用され
るＸ線予備電離放電励起パルスガスレーザ発振器に関す
る。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an X-ray preionization discharge excited pulsed gas laser oscillator that is applied to processing metal or nonmetal materials.
［従来の技術］
従来のこの種ガスレーザ発振器の構成を第３図に例示す
る。[Prior Art] The configuration of a conventional gas laser oscillator of this type is illustrated in FIG.
第３図に於いて、Ｘ線管０２１は、カソード０２゜アノ
ード０１．及び隔壁０１９等から構成され、直流電源０
７によって充電されたコンデンサ０５のエネルギーをス
イッチ０６によって短時間に取り出し、トランス０４に
よって昇圧し、Ｘ線管０２１のカソード０２、アノード
０１間に高電圧を印加し、Ｘ線を発生させる。レーザ管
０２０は、アノード０８とカソードＯ１８から構成され
、Ｘ線管０２１とは別の回路系からエネルギーが供給さ
れる。In FIG. 3, the X-ray tube 021 has a cathode 02°, an anode 01. It consists of a partition wall 019, etc., and a DC power source 0
The energy of the capacitor 05 charged by the X-ray tube 021 is taken out in a short time by the switch 06, boosted by the transformer 04, and a high voltage is applied between the cathode 02 and the anode 01 of the X-ray tube 021 to generate X-rays. The laser tube 020 is composed of an anode 08 and a cathode O18, and is supplied with energy from a circuit system different from that of the X-ray tube 021.
Ｘ線管０２１とレーザ管０２０のカソード０１８を隔て
る隔壁０１９は、両者の気圧差を保持し、同時にＸ線の
透過窓も兼ねているが、Ｘ線管０２１のアノードＯ１と
、レーザ管０２０のカソード０１８とは分離された構造
となっている。The partition wall 019 that separates the cathode 018 of the X-ray tube 021 and the laser tube 020 maintains the pressure difference between the two and also serves as an X-ray transmission window. It has a structure separated from the cathode 018.
［発明が解決しようとする課題］
上記した従来技術に於いては以下の（１）乃至（４）項
で述べるような問題点があった。[Problems to be Solved by the Invention] The above-mentioned prior art has problems as described in the following sections (1) to (4).
（１）、Ｘ線は、隔壁０１９とレーザ管０２０のカソー
ド０１８の両金属板を透過せねばならず、減衰量が大き
い。(1) The X-ray must pass through both the metal plates of the partition wall 019 and the cathode 018 of the laser tube 020, and the amount of attenuation is large.
（２）、Ｘ線の減衰を少なくするため、レーザ管０２０
のカソード０１８を薄くすると、電極寿命が短くなる（
放電時のスパッタリング等の作用による消耗）。(2) In order to reduce the attenuation of X-rays, the laser tube 020
If the cathode 018 of is made thinner, the electrode life will be shortened (
consumption due to sputtering, etc. during discharge).
（３）、隔壁０１９と、Ｘ線管０２１のアノードｏｉ。(3) The partition wall 019 and the anode oi of the X-ray tube 021.
及びレーザ管０２０のカソード０１８が互いに離れて設
置されるため、Ｘ線管０２１のアノード（Ｘ線発生部）
Ｏｆと、レーザ管０２０の放電発生部（レーザ管のカ
ソード０１８およびアノード０８によって挟まれた領域
）との距離が長くなり、Ｘ線強度が弱くなる（Ｘ線強度
は、発生点からの距離の２乗に反比例する）。Since the cathode 018 of the laser tube 020 and the cathode 018 of the laser tube 020 are installed apart from each other, the anode (X-ray generating part) of the X-ray tube 021
The distance between Of and the discharge generation part of the laser tube 020 (the area sandwiched between the cathode 018 and the anode 08 of the laser tube) becomes longer, and the X-ray intensity becomes weaker (the X-ray intensity depends on the distance from the generation point). (inversely proportional to the square).
（４）、Ｘ線発生効率は一般に１％以下であるので、Ｘ
ｔＩ管に注入されたエネルギーのうち、多くはアノード
Ｏ１に於いて熱となる。従って高繰返し動作に於いては
、アノードＯ１がかなり高温になるが、隔壁０１９とア
ノード０１が分離されているため、アノードＯ１の冷却
が困難である（アノード０１は通常、５〜１０μｍｔの
フォイルを用いるため、熱伝導では冷却され難い）。(4) Since the X-ray generation efficiency is generally less than 1%,
Most of the energy injected into the tI tube becomes heat at the anode O1. Therefore, during high-repetition operations, the anode O1 becomes quite hot, but since the partition wall 019 and the anode 01 are separated, it is difficult to cool the anode O1 (the anode 01 is usually covered with a 5-10 μmt foil). (Because of this, it is difficult to cool down by heat conduction.)
［課題を解決するための手段］
本発明は、第２図に示すように、Ｘ線管とレーザ管を隔
てる隔壁を１枚の金属板とし、そのＸ線管側に、Ｘ線を
発生するＸ線管のアノードｌを蒸着あるいはメツキし、
レーザ管側は上記隔壁をレーザ管のアノード１８（平板
電極）として使用する。[Means for Solving the Problems] As shown in FIG. 2, the present invention uses a single metal plate as the partition wall separating the X-ray tube and the laser tube, and generates X-rays on the X-ray tube side. Evaporating or plating the anode l of the X-ray tube,
On the laser tube side, the partition wall is used as the anode 18 (flat plate electrode) of the laser tube.
これにより、Ｘ線が透過せねばならない金属板は１枚と
なり、また、Ｘ線発生部（Ｘ線管のアノードｌ）とレー
ザ管の放電発生部（レーザ管のアノード１８とカソード
８とで挟まれた領域）とが非常に接近した状態で近接配
置される。尚、第２図に於いて２はＸ線管のカソードで
ある。As a result, there is only one metal plate through which X-rays must pass, and the metal plate is sandwiched between the X-ray generating section (anode 1 of the X-ray tube) and the discharge generating section of the laser tube (anode 18 and cathode 8 of the laser tube). area) are placed very close to each other. In addition, in FIG. 2, 2 is the cathode of the X-ray tube.
［作用］
Ｘ線管とレーザ管とを隔てる隔壁が、Ｘ線発生部（Ｘ線
管のアノードｌ）と、レーザ管の放電電極（アノード１
Ｂ）を兼ねているため、Ｘ線が透過する必要のある金属
板は１枚と少なく、かつＸ線発生部とレーザ管の放電部
（レーザ管のアノード１８とカソード８に挟まれた領域
）とが非常に近いため、Ｘ線強度の減衰が少なく、Ｘ線
管のエネルギー効率を増加させることができる。[Function] The partition wall that separates the X-ray tube and the laser tube connects the X-ray generation part (anode 1 of the X-ray tube) and the discharge electrode (anode 1
B), there is only one metal plate through which X-rays need to pass, and the X-ray generation part and the discharge part of the laser tube (the area sandwiched between the anode 18 and cathode 8 of the laser tube) Since they are very close to each other, the attenuation of the X-ray intensity is small, and the energy efficiency of the X-ray tube can be increased.
［実施例］ 本発明の実施例を第１図に示す。[Example] An embodiment of the invention is shown in FIG.
Ｘ線管ＩＢとレーザ管１７は、レーザ管１７のアノード
！８を隔壁として設置されている。この隔壁１Ｂは、２
ｍＩＩＩＬのＡＮ合金で、レーザ管１７側６ａｔｍ、Ｘ
線管１Ｂ側真空（Ｉ Ｘ １０−Ｔｏｒｒ）の圧力を保
持する。The X-ray tube IB and the laser tube 17 are the anode of the laser tube 17! 8 is installed as a partition wall. This partition wall 1B is 2
mIIIL AN alloy, 6 atm on the laser tube 17 side,
The vacuum pressure (I x 10-Torr) on the wire tube 1B side is maintained.
レーザ管のアノード１８のＸ線管ｌＢ側には、Ｘ線管１
０のアノード（金、６μＩｔ）がメツキされている。On the X-ray tube lB side of the anode 18 of the laser tube, there is an X-ray tube 1
0 anode (gold, 6μIt) is plated.
Ｘ線管１６のカソード２は、直流導入端子３を通してパ
ルストランス４に接続されており、直流電源７によって
充電されたコンデンサ５のエネルギーをスイッチ６によ
って短時間のうちにパルストランス４を通してカソード
２に送り、カソード２とアノード１の間に高電圧を印加
する。カソード２に於いて発生した電子は、印加された
高電圧によってアノード１の方向に加速され、アノード
ｌに衝突した時にＸ線を発生する。発生したＸ線は、レ
ーザ管１７のアノード１８を透過して、レーザ管１７の
カソード８とアノード１８とで挟まれた領域（放電領域
）に照射され、この中にあるレーザガスを予備電離する
。The cathode 2 of the X-ray tube 16 is connected to the pulse transformer 4 through the DC introduction terminal 3, and the energy of the capacitor 5 charged by the DC power source 7 is transferred to the cathode 2 through the pulse transformer 4 by the switch 6 in a short time. A high voltage is applied between the cathode 2 and the anode 1. Electrons generated at the cathode 2 are accelerated toward the anode 1 by the applied high voltage, and generate X-rays when they collide with the anode 1. The generated X-rays pass through the anode 18 of the laser tube 17 and are irradiated to a region (discharge region) sandwiched between the cathode 8 and the anode 18 of the laser tube 17 to pre-ionize the laser gas therein.
レーザ管１７側は、コンデンサ１２を、直流電源１４゜
インダクタンス１５によって充電し、このエネルギーを
スイッチ１３によって直流導入端子１１を通ってスイッ
チ９に短時間に移行させ、アノード１８・カソード８間
に高電圧を印加する。アノード１８−カソード８間は、
予めＸ線によって予備電離されているため、大体積のグ
ロー放電が生じ、コンデンサ９のエネルギーは放電電流
路１０を通って放電部に注入され、レーザ発振する。レ
ーザガスは第１図に矢印で示したように放電領域を横切
るように循環し、レーザ管１７のアノード１ｇ、カソー
ド８を冷却すると同時に、Ｘ線管１６のアノードｌを冷
却する。On the laser tube 17 side, the capacitor 12 is charged by the DC power supply 14° inductance 15, and this energy is transferred to the switch 9 through the DC introduction terminal 11 by the switch 13 in a short time, so that a high voltage is generated between the anode 18 and the cathode 8. Apply voltage. Between the anode 18 and the cathode 8,
Since it has been pre-ionized by X-rays, a large volume glow discharge occurs, and the energy of the capacitor 9 is injected into the discharge section through the discharge current path 10, causing laser oscillation. The laser gas circulates across the discharge region as shown by arrows in FIG. 1, cooling the anode 1g and cathode 8 of the laser tube 17, and at the same time cooling the anode 1 of the X-ray tube 16.
上記隔壁１８は、厚さ２市のＡＮ合金とし、Ｘ線管１Ｂ
のアノードｌを厚さ６μｍで、２０韻×２５０關の面積
を有する金メツキで構成し、Ｘ線管１６のアノード１−
カソード２ （長さ２００ｍｍ）間に立上がり速度１０
０．ｎｓ、 ピーク電圧６０ ＫＶ。The partition wall 18 is made of AN alloy with a thickness of 2 cm, and the X-ray tube 1B
The anode 1 of the X-ray tube 16 is made of gold plating with a thickness of 6 μm and an area of 20 mm x 250 mm.
Rise speed 10 between cathode 2 (length 200mm)
0. ns, peak voltage 60 KV.
パルス幅１００ｎｓの電圧を印加したところ、ピーク値
１５０ＡのＸ線管電流が流れ、レーザ管１７のカソード
８表面上に於いて、３５ａ＋ＨのＸ線照射線量が得られ
た。又、レーザ発振器をガス圧力６ａｔＩＩｌの）（ｅ
ｅｌエキシマレーザとして動作させたところ、１パルス
当り約０．２１の出力が得られた。When a voltage with a pulse width of 100 ns was applied, an X-ray tube current with a peak value of 150 A flowed, and an X-ray irradiation dose of 35a+H was obtained on the surface of the cathode 8 of the laser tube 17. In addition, the laser oscillator was operated at a gas pressure of 6atIIl)(e
When operated as an EL excimer laser, an output of about 0.21 per pulse was obtained.
［発明の効果］
上記した本発明の構成によるＸ線予備電離放電励起パル
スガスレーザ発振器に於いては以下のような効果をもつ
。[Effects of the Invention] The X-ray preionization discharge excited pulsed gas laser oscillator according to the above-described configuration of the present invention has the following effects.
（１）Ｘ線管が透過する金属板が１枚であるため、Ｘ線
強攻の減衰が少ない。(1) Since there is only one metal plate through which the X-ray tube passes, there is little attenuation of the strong X-ray attack.
（２）レーザ管のアノードをある程度厚くできるため、
アノードの寿命が延びる。(2) The anode of the laser tube can be made thicker to some extent,
Extends the life of the anode.
（３）Ｘ線発生部と放電領域が接近するため、Ｘ線強度
の減衰が少ない。(3) Since the X-ray generating part and the discharge region are close to each other, the attenuation of the X-ray intensity is small.
（４）Ｘ線管のアノードの冷却が比較的容易にできるた
め１．高繰返し運転が可能である。(4) The anode of the X-ray tube can be cooled relatively easily; 1. High repetition operation is possible.
第１図は本発明の実施例に係るＸ線予備電離放電励起パ
ルスガスレーザ発振器の断面構成図、第２図は本発明の
実施例に係る隔壁部分の拡大構成図、第３図は従来のＸ
線予備電離放電励起パルスガスレーザ発振器を示す構成
図である。
ｌ・・・アノード（隔壁）、２・・・カソード、３・・
・直流導入端子、４・・・パルストランス、５・・・コ
ンデンサ、６・・・スイッチ、７・・・直流電源、８・
・・カソード、９・・・スイッチ、ｌＯ・・・放電電流
路、１１・・・直流導入端子、１２・・・コンデンサ、
１３・・・スイッチ、１４・・・直流電源、１５・・・
インダクタンス、１Ｂ・・・Ｘ線管、１７・・・レーザ
管、１８・・・アノード（隔壁）。
出願人代理人 弁理士 鈴江武彦
第
図
第
図FIG. 1 is a cross-sectional configuration diagram of an X-ray pre-ionization discharge excited pulsed gas laser oscillator according to an embodiment of the present invention, FIG. 2 is an enlarged configuration diagram of a partition wall portion according to an embodiment of the present invention, and FIG. 3 is a conventional
FIG. 2 is a configuration diagram showing a line pre-ionization discharge excited pulsed gas laser oscillator. l...Anode (partition wall), 2...Cathode, 3...
・DC introduction terminal, 4...Pulse transformer, 5...Capacitor, 6...Switch, 7...DC power supply, 8...
...Cathode, 9...Switch, 1O...Discharge current path, 11...DC introduction terminal, 12...Capacitor,
13...Switch, 14...DC power supply, 15...
Inductance, 1B...X-ray tube, 17...Laser tube, 18...Anode (partition). Applicant's Representative Patent Attorney Takehiko Suzue
Claims (1)
て、Ｘ線管とレーザ管を隔てる隔壁が、Ｘ線管の陽極で
あって、Ｘ線を発生させ、該Ｘ線を透過し、更にレーザ
管の放電電極、及びレーザ管とＸ線管のガス圧力差の保
持機能を合せ持つ構造としたガスレーザ発振器。In an X-ray pre-ionization discharge-excited pulsed gas laser oscillator, the partition separating the X-ray tube and the laser tube is the anode of the X-ray tube, generates X-rays, transmits the X-rays, and serves as the anode of the laser tube. A gas laser oscillator with a structure that has a discharge electrode and a function to maintain the gas pressure difference between the laser tube and the X-ray tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11008189A JPH02288386A (en) | 1989-04-28 | 1989-04-28 | Gas laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11008189A JPH02288386A (en) | 1989-04-28 | 1989-04-28 | Gas laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02288386A true JPH02288386A (en) | 1990-11-28 |
Family
ID=14526552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11008189A Pending JPH02288386A (en) | 1989-04-28 | 1989-04-28 | Gas laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02288386A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08167753A (en) * | 1994-12-15 | 1996-06-25 | Nec Corp | X-ray preparatory ionization discharge excited gas laser apparatus and its oscillating method |
| US20220200225A1 (en) * | 2020-12-21 | 2022-06-23 | Hamamatsu Photonics K.K | Light emitting sealed body and light source device |
-
1989
- 1989-04-28 JP JP11008189A patent/JPH02288386A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08167753A (en) * | 1994-12-15 | 1996-06-25 | Nec Corp | X-ray preparatory ionization discharge excited gas laser apparatus and its oscillating method |
| US20220200225A1 (en) * | 2020-12-21 | 2022-06-23 | Hamamatsu Photonics K.K | Light emitting sealed body and light source device |
| US11862922B2 (en) * | 2020-12-21 | 2024-01-02 | Energetiq Technology, Inc. | Light emitting sealed body and light source device |
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