JPS6321748Y2 - - Google Patents

Info

Publication number
JPS6321748Y2
JPS6321748Y2 JP12550383U JP12550383U JPS6321748Y2 JP S6321748 Y2 JPS6321748 Y2 JP S6321748Y2 JP 12550383 U JP12550383 U JP 12550383U JP 12550383 U JP12550383 U JP 12550383U JP S6321748 Y2 JPS6321748 Y2 JP S6321748Y2
Authority
JP
Japan
Prior art keywords
cryopanel
steady rest
cryopump
supported
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12550383U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6034577U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12550383U priority Critical patent/JPS6034577U/ja
Publication of JPS6034577U publication Critical patent/JPS6034577U/ja
Application granted granted Critical
Publication of JPS6321748Y2 publication Critical patent/JPS6321748Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP12550383U 1983-08-15 1983-08-15 クライオポンプ Granted JPS6034577U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12550383U JPS6034577U (ja) 1983-08-15 1983-08-15 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12550383U JPS6034577U (ja) 1983-08-15 1983-08-15 クライオポンプ

Publications (2)

Publication Number Publication Date
JPS6034577U JPS6034577U (ja) 1985-03-09
JPS6321748Y2 true JPS6321748Y2 (enrdf_load_stackoverflow) 1988-06-15

Family

ID=30285708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12550383U Granted JPS6034577U (ja) 1983-08-15 1983-08-15 クライオポンプ

Country Status (1)

Country Link
JP (1) JPS6034577U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6034577U (ja) 1985-03-09

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