JPS6321560U - - Google Patents
Info
- Publication number
- JPS6321560U JPS6321560U JP1986112718U JP11271886U JPS6321560U JP S6321560 U JPS6321560 U JP S6321560U JP 1986112718 U JP1986112718 U JP 1986112718U JP 11271886 U JP11271886 U JP 11271886U JP S6321560 U JPS6321560 U JP S6321560U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- polished
- surface plate
- polishing pad
- cooling water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 12
- 239000000498 cooling water Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims 2
- 238000010276 construction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986112718U JPS6321560U (en:Method) | 1986-07-24 | 1986-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986112718U JPS6321560U (en:Method) | 1986-07-24 | 1986-07-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6321560U true JPS6321560U (en:Method) | 1988-02-12 |
Family
ID=30993851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986112718U Pending JPS6321560U (en:Method) | 1986-07-24 | 1986-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6321560U (en:Method) |
-
1986
- 1986-07-24 JP JP1986112718U patent/JPS6321560U/ja active Pending
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