JPS63213737A - Device for mounting equipment in clean room - Google Patents
Device for mounting equipment in clean roomInfo
- Publication number
- JPS63213737A JPS63213737A JP4530387A JP4530387A JPS63213737A JP S63213737 A JPS63213737 A JP S63213737A JP 4530387 A JP4530387 A JP 4530387A JP 4530387 A JP4530387 A JP 4530387A JP S63213737 A JPS63213737 A JP S63213737A
- Authority
- JP
- Japan
- Prior art keywords
- air
- room
- equipment
- clean room
- indoor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003749 cleanliness Effects 0.000 abstract description 15
- 239000000428 dust Substances 0.000 description 7
- 238000011109 contamination Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 238000004887 air purification Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000003915 air pollution Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Landscapes
- Ventilation (AREA)
Abstract
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明はクリーンルームにおける温度調節器。[Detailed description of the invention] (Industrial application field) The present invention is a temperature controller for a clean room.
湿度調節器、清浄度検出器等の各種機器の取付装置に係
るものである。This relates to mounting devices for various devices such as humidity controllers and cleanliness detectors.
（従来の技術）
クリーンルームは室内と、他のクリーンルーム、−膜室
の如き周辺室との室間差圧を確保してクリーンルーム室
内の空気清浄度を維持し、清浄度の高い室から低い室に
空気清浄度のグレードに応じて室間の空気の流れを設定
して、各室の要求される空気清浄度を維持するように構
成されている。(Conventional technology) A clean room maintains the air cleanliness inside the clean room by ensuring a pressure difference between the room and surrounding rooms such as other clean rooms and membrane rooms. It is configured to maintain the required air cleanliness in each room by setting the air flow between rooms according to the grade of air cleanliness.
而してクリーンルーム内の仕上げ、特に壁面においては
、塵埃の滞留する原因となる無用な突起を可能な限り無
くすか、或いは突起部の突出長を最小限にする必要があ
る。Therefore, in the finishing of the clean room, especially on the walls, it is necessary to eliminate as much as possible unnecessary protrusions that cause dust to accumulate, or to minimize the protruding length of the protrusions.
而して従来クリーンルームに温度調節器等の機器を取付
ける場合、室内壁面に同轡器を直接取付けていた。Conventionally, when installing equipment such as a temperature controller in a clean room, the equipment was attached directly to the interior wall.
（発明が解決しようとする間印点）
この場合、機器が壁面より突出するため塵埃が滞留し易
く、また機器内部を通過する空気から温度を検出するた
め、機器内部に塵埃が蓄積され、振動や衝撃等によって
再飛散して室内の清浄空気を低下させる慣れが生じる。(Points to be solved by the invention) In this case, since the equipment protrudes from the wall surface, dust tends to accumulate, and since the temperature is detected from the air passing through the equipment, dust accumulates inside the equipment, causing vibrations. They become accustomed to being re-dispersed due to air pollution or impact, reducing the level of clean air in the room.
また層流方式のクリーンルームでは壁面より突出した前
記機器によって気流が撹乱される慣れがある。Furthermore, in a laminar flow clean room, the airflow is often disturbed by the equipment protruding from the wall surface.
（問題点を解決するための手段）
本発明はこのような問題点を解決するために提案された
ものであって、クリーンルームの壁体内に、室内側プレ
ートにはチャツキダンパーを具えた室内空気導入流路、
室外側プレートには室内空気排出流路を有する機器収納
ボックスを埋設するとともに、同ボックス内に収納した
機器を前記室外側プレートに泡付けたことを特徴とする
クリーンルームにおける機器取付装置に係るものである
。(Means for Solving the Problems) The present invention has been proposed to solve these problems, and the present invention is an indoor air damper equipped with a damper on the indoor side plate within the wall of the clean room. introduction channel,
This relates to an equipment mounting device for a clean room, characterized in that an equipment storage box having an indoor air exhaust flow path is buried in the outdoor side plate, and the equipment stored in the box is bubbled onto the outdoor side plate. be.
（作 用）
本発明は前記したように構成されているので、室内空気
はクリーンルーム壁体内に埋設された機器収納ボックス
の室内側プレートの室内空気導入流路に配設されたチャ
ツキダンパーを押し開き、同ＪＬ路より機器の収納され
た機器収納ボックス内に入り、同ボックスの室外側プレ
ートに設けた室内空気排出流路より隣室に排出される。(Function) Since the present invention is configured as described above, the indoor air pushes against the Chatsuki damper disposed in the indoor air introduction channel of the indoor side plate of the equipment storage box embedded in the wall of the clean room. The air enters the equipment storage box in which the equipment is stored through the same JL path, and is exhausted to the adjacent room through the indoor air exhaust flow path provided on the outdoor side plate of the box.
この際、前記ボックス内に収納された機器が通過空気の
温度等を検出して、空調機の制御装置等に制御信号や表
示信号を送る。At this time, the equipment housed in the box detects the temperature of the passing air and sends control signals and display signals to the air conditioner control device and the like.
また夜間に空気清浄システム等を停止する場合や５給排
気系統に故障を生じた場合等において、クリーンルーム
の室内加圧が維持できない場合や、隣室より空気が逆流
する惧れがある場合、前記チャツキダンパーが機器収納
ボックスにおける室内空気導入流路を閉塞する。In addition, if the air purification system, etc. is stopped at night, or if there is a failure in the air supply/exhaust system, the pressurization of the clean room cannot be maintained, or if there is a risk of air flowing back from an adjacent room, the above-mentioned The Tsuki damper blocks the indoor air introduction flow path in the equipment storage box.
（発明の効果）
このように本発明だよれば、クリーンルーム壁体内に機
器収納ボックスを埋設し、同ボックス内に傍器を収容し
たことによって、同機器の取付に伴なう室内側への突出
部をなくし、塵埃等の滞留を防止し、室内空気の塵埃等
による汚染を防止する。(Effects of the Invention) According to the present invention, by embedding the equipment storage box in the wall of the clean room and accommodating side equipment in the box, it is possible to prevent the equipment from protruding toward the indoor side when the equipment is installed. This prevents the accumulation of dust, etc., and prevents contamination of indoor air by dust, etc.
また前記ボックスの室外側及び室内側各プレートには夫
々室内空気導入流路及び室内空気排出流路を設けること
によって、清浄度の高い室から低い室に、空気清浄度の
グレードに応じて室間の空気の流れを設定して、各室に
要求される空気清浄度を維持するものであり、巣に前記
ボックスの室内側プレートにおける室内空気導入流路に
チャツキダンパーを配設することによって、クリーンル
ームの室内加圧が維持できない場合や、空気の逆流する
慣れのある場合におけるクリーンルーム内の空気の汚染
を防止しうるものである。In addition, by providing an indoor air introduction channel and an indoor air exhaust channel on each of the outdoor and indoor plates of the box, it is possible to move the air between rooms from high to low cleanliness depending on the grade of air cleanliness. The air flow is set to maintain the air cleanliness required in each room, and by installing a chatki damper in the indoor air introduction flow path on the indoor side plate of the box, This prevents contamination of the air in the clean room when pressurization of the clean room cannot be maintained or when air is used to flowing backwards.
（実施例） 以下本発明を図示の実施例について説明する。(Example) The present invention will be described below with reference to the illustrated embodiments.
（Ｎはクリーンルームで、壁体（１）を介して相隣るク
リーンルーム（Ｂｌより空気清浄度が高く、同クリーン
ルーム（Ｂ）との間に室間差圧が確保され、クリーンル
ーム室内の空気清浄度が維持されている。(N is a clean room, which has higher air cleanliness than the adjacent clean room (B) through the wall (1), and a differential pressure between the rooms and the same clean room (B) is ensured, and the air cleanliness inside the clean room is is maintained.
前記壁体（１）には加圧側のクリーンルーム（Ａ）にお
ける代表的な室温の検出可能な位置に機器収納ボックス
（２）が埋設され、同ボックス（２）の周枠にビス（３
）を介して取付けられた室内側プレート（４１、及び室
外側プレート（５）には夫々室内空気導入流路（６）及
び室内空気排出流路（７）が配設され、前記室内空気導
入流路（６）にはチャツキダン／”−＋８１が装着され
、同ダンパー（８）は室間差圧が０の場合には前記室内
空気導入流路（６）を閉塞するように構成されている。An equipment storage box (2) is embedded in the wall (1) at a position where a typical room temperature in the clean room (A) on the pressure side can be detected, and screws (3) are installed in the peripheral frame of the box (2).
), an indoor air introduction flow path (6) and an indoor air discharge flow path (7) are provided on the indoor side plate (41) and the outdoor side plate (5), respectively, which are attached to the indoor air introduction flow. A damper (81) is attached to the channel (6), and the damper (8) is configured to close the indoor air introduction channel (6) when the differential pressure between the rooms is zero.
更に前記室外側プレート（５）には％機器（９）として
室内型温度調節器が取付けられている。Furthermore, an indoor temperature controller is attached to the outdoor plate (5) as a % device (9).
図中（９ａ）は前記調節器（９）のベース％ （９ｂ）
はベローズ、（９Ｃ）は冷暖房切替スイッチ％ （９ｄ
）はマイクロスイッチ％（９ｅ）は室温指針、 （９ｆ
）は室温設定の調整ねじ％ （９ｇ）は調整スプリング
で何れも公知の温度調節器と同一であるから説明を省略
する。In the figure (9a) is the base percentage (9b) of the regulator (9).
is the bellows, (9C) is the heating/cooling selector switch% (9d
) is the microswitch% (9e) is the room temperature indicator, (9f
) is an adjustment screw for setting the room temperature, % (9g) is an adjustment spring, and since they are the same as those of known temperature controllers, their explanation will be omitted.
その他、００は室内側プレート（４）に蝶番αＢを介し
て装着された点検蓋であり、（９ｈ）はその点検蓋に組
込んだガラス製の点検窓である。また゛（１２１は前記
機器（９）に接続された制御配線で、０３は同配線Ｌ５
の前記ボックス（２）の周枠貫通部におけるシーリング
部％Ｉは同周枠部分における充填材、 Ｑ５１は室内側
及び室外側プレー） （４１（５１と壁体（１）との間
のシーリング部である。In addition, 00 is an inspection lid attached to the indoor side plate (4) via a hinge αB, and (9h) is a glass inspection window built into the inspection lid. In addition, ゛(121 is the control wiring connected to the device (9), and 03 is the same wiring L5
The sealing part %I in the peripheral frame penetrating part of the box (2) is the filler in the same peripheral frame part, Q51 is the indoor side and outdoor side play) (41 (the sealing part between 51 and the wall (1) It is.
図示の実施例は前記したように構成されているのでクリ
ーンルーム（相の室内空気は、前記機器収納ボックス（
２）における室内側プレート（４）の室内空気導入流路
（６）よりチャツキダンパー（８）を点線に示すように
押上げて前記ボックス（２）に入り、室外側プレート（
５）の室内空気排出流路（力より隣のクリーンルームｆ
Ｂ）に排出され、かくして清浄度の高いクリーンルーム
（Ａｌから低いクリーンルーム（Ｂｌに空気清浄度のグ
レーｙ＜応じて室間の空気の流れを設定して、各室の空
気ｆｆ１ｌｌｊを維持する、またこのように、室内空気
が前記ボックス（２）を通過する間に、同ボックス（２
）内に収容された機器（９）が通過空気の温度を検出し
て、空調機の動力制御盤や監視盤等へ制御信号や表示信
号等を制御配線０２等を経由して送る。Since the illustrated embodiment is configured as described above, indoor air in the clean room (phase) is supplied to the equipment storage box (
Push up the Chatsuki damper (8) from the indoor air introduction channel (6) of the indoor side plate (4) in 2) as shown by the dotted line and enter the box (2),
5) Indoor air exhaust flow path (clean room f next to the
B), thus maintaining the air ff1llj in each room by setting the air flow between the rooms according to the gray level of air cleanliness y< from a high clean room (Al) to a low clean room (Bl), and In this way, while the indoor air passes through the box (2),
) A device (9) housed in the device (9) detects the temperature of the passing air and sends control signals, display signals, etc. to the power control panel, monitoring panel, etc. of the air conditioner via the control wiring 02, etc.
前記実施例においてはクリーンルーム（Ａ）の壁体（１
）に埋設した機器収納ボックス（２）に機器（９）を収
容することによって、同機器（９）の取付に伴なうクリ
ーンルーム（Ａｌ内への突出部をなくし、塵埃等の滞留
を防止し１機器に付着蓄積した塵埃が室内側に再飛散す
るのを防止する。而して室内の清浄度を保持する。In the above embodiment, the wall (1) of the clean room (A)
) By storing the device (9) in the device storage box (2) buried in the device storage box (2), the protrusion into the clean room (Al) that occurs when the device (9) is installed is eliminated, and the accumulation of dust etc. is prevented. To prevent dust that has adhered and accumulated on one device from being re-dispersed indoors, thereby maintaining the cleanliness of the room.
また夜間に空気清浄システム等を停止する場合や、給排
気系統の故障等によってクリーンルーム（Ａｌの室内加
圧が維持できない場合や、空気が逆流するような場合、
前記チャツキダンパー（８）が室内側プレート（４）の
室内空気導入流路（６）を閉塞し、逆流によるクリーン
ルーム（Ａｌ内の空気の汚染を防止するものである。In addition, when the air purification system etc. is stopped at night, or when the clean room (aluminum indoor pressurization cannot be maintained or air flows backwards) due to a malfunction in the air supply/exhaust system, etc.
The Chatsuki damper (8) closes the indoor air introduction channel (6) of the indoor side plate (4) to prevent air contamination in the clean room (Al) due to backflow.
第１図は本発明に係るクリーンルームにおける機器取付
装置の一実施例を示す縦断側面図、第２図はその正面図
、第３図はその背面図である。
（Ａ）・・・クリーンルーム （１）・・・壁体（２）
・・・機器収納ボックス（４）・・・室内側プレート（
５）・・・室外側プレート（６）・・・室内空気導入流
路（力・・・室内空気排出流路（８）・・・チャツキダ
ンパー（９）・・・機器FIG. 1 is a vertical sectional side view showing an embodiment of the equipment mounting device for a clean room according to the present invention, FIG. 2 is a front view thereof, and FIG. 3 is a rear view thereof. (A)...Clean room (1)...Wall (2)
... Equipment storage box (4) ... Indoor side plate (
5)...Outdoor side plate (6)...Indoor air introduction channel (power...Indoor air exhaust channel (8)...Chatsuki damper (9)...Equipment
Claims (1)
キダンパーを具えた室内空気導入流路、室外側プレート
には室内空気排出流路を有する機器収納ボックスを埋設
するとともに、同ボックス内に収納した機器を前記室外
側プレートに取付けたことを特徴とするクリーンルーム
における機器取付装置。Inside the walls of the clean room, an equipment storage box with an indoor air intake channel equipped with a check damper on the indoor side plate and an indoor air exhaust channel on the outdoor side plate is buried, and the equipment stored in the box is buried. An equipment mounting device for a clean room, characterized in that: is mounted on the outdoor side plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4530387A JPS63213737A (en) | 1987-03-02 | 1987-03-02 | Device for mounting equipment in clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4530387A JPS63213737A (en) | 1987-03-02 | 1987-03-02 | Device for mounting equipment in clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63213737A true JPS63213737A (en) | 1988-09-06 |
| JPH0325704B2 JPH0325704B2 (en) | 1991-04-08 |
Family
ID=12715552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4530387A Granted JPS63213737A (en) | 1987-03-02 | 1987-03-02 | Device for mounting equipment in clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63213737A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5410922A (en) * | 1992-03-31 | 1995-05-02 | Nsk Ltd. | Locating table apparatus |
-
1987
- 1987-03-02 JP JP4530387A patent/JPS63213737A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5410922A (en) * | 1992-03-31 | 1995-05-02 | Nsk Ltd. | Locating table apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0325704B2 (en) | 1991-04-08 |
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