JPS6321171B2 - - Google Patents
Info
- Publication number
- JPS6321171B2 JPS6321171B2 JP54081171A JP8117179A JPS6321171B2 JP S6321171 B2 JPS6321171 B2 JP S6321171B2 JP 54081171 A JP54081171 A JP 54081171A JP 8117179 A JP8117179 A JP 8117179A JP S6321171 B2 JPS6321171 B2 JP S6321171B2
- Authority
- JP
- Japan
- Prior art keywords
- optical scanning
- mask
- photosensitive material
- disk
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 10
- 238000003384 imaging method Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000011295 pitch Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 108010010803 Gelatin Proteins 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical compound [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Description
【発明の詳細な説明】
この発明は光走査用円盤とその製作方法に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an optical scanning disk and a manufacturing method thereof.
レーザ装置の信頼性が向上するにつれて、レー
ザビーム走査が図形の形成、あるいは図形の読み
取りに使用されるようになり、すでにレーザ・フ
アツクス、レーザプリンター、レーザPOS
（Point of sales）として実用化されている。こ
れらの実用化装置においては、レーザビームで画
面を走査しつつ、レーザビームを変調して画像を
形成したり、レーザビームで図形を走査して得ら
れる反射光の強弱から図形を読み取つたりしてい
る。この場合、レーザビームの走査には回転多面
鏡、またはガルバノミラーとレンズを組み合わせ
た光走査装置が用いられている。近年、回転多面
鏡を使用せずにレーザビームを走査するための手
段としてホログラムを用いることが提案されてい
る。ホログラムを用いることによつて安価な光走
査装置が実現されているが、走査線形状と変換効
率の点で問題がある。光学的にホログラムを製作
する方法は、ピツチの異なつた干渉縞をデイスク
の円周上に記録していく方法で、干渉縞のピツチ
はホログラム単位ごとに不連続に変化する。干渉
縞にレーザビームを入射すると回折光が得られ、
干渉縞が回転すると回折光も回転して円孤を描
く。デイスク円周上に記録されたホログラムの干
渉縞ピツチが異なるので、各ホログラムからの回
折光は異なつた円孤を描き、走査線群が形成され
る。ホログラムの干渉縞は正弦波状のプロフアイ
ルをもつていて、理論的に変換効率を30％以上を
こえるのは容易でない。記録材料にボリユーム型
の材料（重クロム酸ゼラチン、フオトポリマーな
ど）を用いれば変換効率を90％近くにあげること
は不可能でないが、複製を得ることができない。
次にコンピユータホログラムによつて光走査円盤
を得る方法は、任意の干渉縞を得ることができる
ので直線走査は可能である。しかし、干渉縞の形
状はデイジタル的な線描であるために効率は数％
と低い。また、デイスク状に大面積の干渉縞を計
算機の出力装置でもつて描くには、記録時間、記
録分解能の点から実現性に乏しい。 As the reliability of laser equipment improves, laser beam scanning is increasingly being used to form or read figures, and is already used in laser faxes, laser printers, and laser POS systems.
It has been put into practical use as a point of sales. These practical devices scan a screen with a laser beam and modulate the laser beam to form an image, or scan a figure with a laser beam and read the figure from the strength of the reflected light. ing. In this case, a rotating polygon mirror or an optical scanning device combining a galvanometer mirror and a lens is used for laser beam scanning. In recent years, it has been proposed to use a hologram as a means for scanning a laser beam without using a rotating polygon mirror. Although inexpensive optical scanning devices have been realized by using holograms, there are problems in terms of scanning line shape and conversion efficiency. The method of optically producing a hologram is to record interference fringes of different pitches on the circumference of a disk, and the pitch of the interference fringes changes discontinuously for each hologram. When a laser beam is incident on the interference fringes, diffracted light is obtained,
When the interference fringes rotate, the diffracted light also rotates and draws an arc. Since the interference fringe pitches of the holograms recorded on the disk circumference are different, the diffracted light from each hologram draws different arcs, forming a group of scanning lines. The interference fringes of a hologram have a sinusoidal profile, and it is theoretically difficult to achieve a conversion efficiency of more than 30%. If a volume-type material (dichromate gelatin, photopolymer, etc.) is used as the recording material, it is possible to increase the conversion efficiency to nearly 90%, but it is not possible to obtain copies.
Next, in the method of obtaining an optical scanning disk using a computer hologram, linear scanning is possible because arbitrary interference fringes can be obtained. However, since the shape of the interference fringes is a digital line drawing, the efficiency is only a few percent.
and low. Furthermore, it is difficult to draw large-area interference fringes in the form of a disk using a computer output device in terms of recording time and recording resolution.
この発明の目的は直線走査が可能で、走査ビー
ムへの変換効率が高い光走査円盤の製作方法を提
供するものである。 An object of the present invention is to provide a method for manufacturing an optical scanning disk that is capable of linear scanning and has high conversion efficiency into a scanning beam.
この発明によれば、円周上に回折格子が記録さ
れている光走査円盤で、前記回折格子の周期が円
周方向に連続的に変化し、かつ前記回折格子の形
状がブレーズド条件を満足する鋸歯状波であるこ
とを特徴とする光走査円盤の製作方法において、
鋸歯状波の開口部又はパターンを有するマスクの
像が結像されるように配置した感光材料に、前記
マスクを介して前記開口部又はパターンの形状を
有する光を照射した状態で、前記感光材料を前記
マスク面と平行な面内で回転移動させ、かつ結像
倍率を変化させながら連続露光を与えることを特
徴とする光走査円盤の製作方法を提供することが
できる。 According to this invention, in the optical scanning disk in which a diffraction grating is recorded on the circumference, the period of the diffraction grating changes continuously in the circumferential direction, and the shape of the diffraction grating satisfies a blazed condition. In a method for manufacturing an optical scanning disk characterized by a sawtooth wave,
A photosensitive material arranged so that an image of a mask having a sawtooth opening or pattern is formed is irradiated with light having the shape of the opening or pattern through the mask. It is possible to provide a method of manufacturing an optical scanning disk, characterized in that continuous exposure is provided while rotating the optical scanning disk in a plane parallel to the mask surface and changing the imaging magnification.
以下この発明について図面を参照しつつ詳しく
説明する。第１図は、本発明による光走査円盤の
製作方法の原理を示すものである。開口を有する
マスク２に照射光１が入射し、開口部ｇ（ｘ，ｙ）
を通過した光がレンズ３によつて感光材料４上に
結像される。感光材料を第１図に示したようにＹ
方向に速度Ｖで移動させると、感光材料４には結
像された照射光パターン５Ｇ（Ｘ，Ｙ）の時間積
分的な露光量が与えられる。感光材料が受ける露
光量はＧ（Ｘ，Ｙ）をＹ方向に積分して得られる
分布になる。すなわち、任意のアナログ的な強度
分を感光材料に露光することが可能になる。ま
た、レンズ３を可変焦点距離のレンズ（ズームレ
ンズ）を用いて、照射光パターンＧ（Ｘ，Ｙ）の
大きさを変化させながら露光を与えることができ
る。第２図は本発明による光走査円盤の製作方法
の実施例を示すものである。光源６からの照射光
７はマスク８を通過し、そのパターンは光学系９
によつて感光材料１１、例えばガラス基盤にフオ
トレジストを塗布したものに照射光パターン１０
となつて入射する。感光材料１１をモータ１２に
よつて回転し、光学系９によつて照射光パターン
１０の大きさを変えながら連続露光を与える。第
３図は露光量とフオトレジストに記録されるレリ
ーフの高さをプロツトしたものである。フオトレ
ジストを用いると露光量に比例したレリーフの高
さが得られる。第４図はブレーズド格子の回折条
件を説明する図である。空気中に置かれた屈折率
ｎをもつ透過型のブレイズド格子に入射光が入射
したとする。入射光は格子のピツチをＰとすると
(1)式で表わされるθの方向に回折される。 This invention will be described in detail below with reference to the drawings. FIG. 1 shows the principle of a method for manufacturing an optical scanning disk according to the present invention. Irradiation light 1 enters a mask 2 having an opening, and the opening g(x,y)
The light that has passed through is imaged onto a photosensitive material 4 by a lens 3. The photosensitive material is Y as shown in Figure 1.
When the photosensitive material 4 is moved in the direction at a speed V, a time-integral exposure amount of the imaged irradiation light pattern 5G (X, Y) is applied to the photosensitive material 4. The amount of exposure that the photosensitive material receives is a distribution obtained by integrating G(X, Y) in the Y direction. In other words, it becomes possible to expose the photosensitive material to any analog intensity. Further, by using a variable focal length lens (zoom lens) as the lens 3, exposure can be applied while changing the size of the irradiation light pattern G (X, Y). FIG. 2 shows an embodiment of the method for manufacturing an optical scanning disk according to the present invention. The irradiated light 7 from the light source 6 passes through a mask 8, and the pattern is formed by an optical system 9.
A light pattern 10 is irradiated onto a photosensitive material 11, for example, a glass substrate coated with a photoresist.
It is incident as follows. A photosensitive material 11 is rotated by a motor 12, and continuous exposure is applied while changing the size of an irradiation light pattern 10 by an optical system 9. FIG. 3 is a plot of the exposure amount and the height of the relief recorded on the photoresist. When using a photoresist, a relief height proportional to the exposure amount can be obtained. FIG. 4 is a diagram illustrating the diffraction conditions of the blazed grating. Assume that incident light is incident on a transmission type blazed grating placed in air and having a refractive index n. If the pitch of the grating is P, the incident light is
It is diffracted in the direction of θ expressed by equation (1).
Psinθ＝mλ (1)
ここでｍは整数、λは光の波長である。このと
き入射光が境界面で屈折される方向と一致したと
きブレーズ条件と呼ばれ、特定方向に100％に近
い回折光が得られる。すなわち
sinθ1＝nsinθ0 (2)
θ＝θ1―θ0 (3)
により、(1)、(2)、(3)式で得られるθ0がプレーズ条
件を満たすブレーズド格子の傾きになる。たとえ
ば、格子ピツチＰが2μm（空間周波数500本／mm）
の時、１次方向（ｍ＝１）の回折角θは(1)式よ
り、θ＝18.4゜になる。フオトレジストの屈折率
はｎ＝1.5であるので、(2)式よりθ0〜30゜が求まる。
したがつて鋸歯状波の高さは1.15μmとなり、こ
の厚み以上にフオトレジストを塗布して走査露光
を与えれば良い。第５図はブレーズド格子の製作
用マスクである。感光材料の移動方向はＹ方向
で、これらのパターンの拡大、縮小パターンの照
射光を与えることによつて任意のピツチの格子が
連続的に感光材料上に露光される。格子のピツチ
が異なればブレイズド条件を満足する格子の傾き
が(1)式により異なる。レリーフの高さを変えるた
めには露光量を変えれば良く、照射光強度を変化
させるか、回転速度を変化させることによつて実
現できる。第６図は本発明による光走査円盤を示
すものである。光走査円盤１１には格子を記録し
たトラツク１３があり、トラツクの拡大図がａ、
ｂ、ｃである。ｂの部分はマスクパターンを等倍
に結像して露光を与えた部分で、ａ部はマスクパ
ターンを縮小して露光、ｅ部はマスクパターンを
拡大して露光した部分である。記録された格子の
ピツチは円周方向に連続的に変化している。第７
図に本発明によつて製作された光走査円盤の使用
例を示す。レーザ１４から出射されたレーザ光１
５はモータ１６によつて回転する光走査円盤１１
に入射し、格子から回折される走査ビーム１７が
得られる。走査ビームの方向はレーザ光１５の入
射部での光走査円盤の格子のピツチで決まるため
に、光走査円盤１１の回転に伴つて、走査ビーム
は異なつた方向に連続的に移動する。記録されて
いる格子の方向はつねに円盤の接線方向に向いて
いるので、走査ビームは円盤の半径方向に直線的
な走査をおこなう。ブレーズド格子を記録した光
走査円盤は回折効率が高く、走査ビームへの変換
効率を90％以上にすることが可能である。 Psinθ=mλ (1) where m is an integer and λ is the wavelength of light. At this time, when the incident light matches the direction in which it is refracted at the boundary surface, it is called a blaze condition, and nearly 100% diffracted light is obtained in a specific direction. That is, sinθ 1 =nsinθ 0 (2) θ=θ 1 −θ 0 (3) Accordingly, θ 0 obtained from equations (1), (2), and (3) becomes the slope of the blazed grating that satisfies the blaze condition. For example, the grating pitch P is 2μm (spatial frequency 500 lines/mm)
When , the diffraction angle θ in the primary direction (m=1) is θ=18.4° from equation (1). Since the refractive index of the photoresist is n=1.5, θ 0 to 30° can be determined from equation (2).
Therefore, the height of the sawtooth wave is 1.15 μm, and it is sufficient to apply the photoresist to a thickness greater than this thickness and apply scanning exposure. FIG. 5 shows a mask for manufacturing a blazed grating. The moving direction of the photosensitive material is the Y direction, and by applying irradiation light to enlarge or reduce these patterns, gratings of arbitrary pitches are continuously exposed on the photosensitive material. If the pitch of the lattice differs, the slope of the lattice that satisfies the blazed condition will differ according to equation (1). In order to change the height of the relief, it is sufficient to change the exposure amount, and this can be achieved by changing the irradiation light intensity or the rotation speed. FIG. 6 shows an optical scanning disk according to the present invention. The optical scanning disk 11 has a track 13 on which a lattice is recorded, and enlarged views of the track are shown in a and a.
b, c. The part b is a part where the mask pattern is imaged at the same size and exposed to light, the part a is a part where the mask pattern is reduced and exposed, and the part e is a part where the mask pattern is enlarged and exposed. The pitch of the recorded grid changes continuously in the circumferential direction. 7th
The figure shows an example of the use of an optical scanning disk manufactured according to the present invention. Laser light 1 emitted from laser 14
5 is an optical scanning disk 11 rotated by a motor 16;
A scanning beam 17 is obtained which is incident on the grating and diffracted from the grating. Since the direction of the scanning beam is determined by the pitch of the grating of the optical scanning disk at the incident part of the laser beam 15, the scanning beam moves continuously in different directions as the optical scanning disk 11 rotates. Since the direction of the recorded grating is always tangential to the disk, the scanning beam performs a linear scan in the radial direction of the disk. An optical scanning disk recorded with a blazed grating has a high diffraction efficiency, and it is possible to achieve a conversion efficiency of more than 90% to a scanning beam.
以上詳細に説明したように、この発明によれ
ば、直線走査で、走査ビーム変換効率の高い光走
査円盤の製作方法が得られる。 As described in detail above, according to the present invention, a method for manufacturing an optical scanning disk with high scanning beam conversion efficiency by linear scanning can be obtained.
第１図はこの発明による光走査円盤の製作方法
の原理を示す図、第２図は本発明による光走査円
盤製作方法の実施例を示す図、第３図は露光量と
レリーフの高さの関係を示す図、第４図はブレー
ズド格子を説明する図、第５図は光走査円盤製作
に用いられるマスクを示す図、第６図は本発明に
よつて製作された光走査円盤を示す図、第７図は
本発明によつて製作された光走査円盤の使用例を
示した図である。
図において、１，７は照射光、２，８はマス
ク、３，９はレンズ、４，１１は感光材料、５，
１０は照射光パターン、６，１４は光源、１２，
１６はモータ、１５，１７はレーザビームであ
る。
FIG. 1 is a diagram showing the principle of the method for manufacturing an optical scanning disk according to the present invention, FIG. 2 is a diagram showing an embodiment of the method for manufacturing an optical scanning disk according to the invention, and FIG. 4 is a diagram illustrating a blazed grating, FIG. 5 is a diagram showing a mask used for manufacturing an optical scanning disk, and FIG. 6 is a diagram showing an optical scanning disk manufactured according to the present invention. , FIG. 7 is a diagram showing an example of use of the optical scanning disk manufactured according to the present invention. In the figure, 1 and 7 are irradiation lights, 2 and 8 are masks, 3 and 9 are lenses, 4 and 11 are photosensitive materials, and 5,
10 is an irradiation light pattern, 6 and 14 are light sources, 12,
16 is a motor, and 15 and 17 are laser beams.
Claims (1)
回折格子を記録した光走査円盤の製作方法におい
て、鋸歯状波の開口部又はパターンを有するマス
クの像が結像されるように配置した感光材料に、
前記マスクを介して前記開口部又はパターンの形
状を有する光を照射した状態で、前記感光材料を
前記マスク面と平行面内で回転移動させ、かつ結
像倍率を変化させながら連続露光を与えることを
特徴とする光走査円盤の製作方法。1. In a method for manufacturing an optical scanning disk in which a diffraction grating whose period continuously changes in the circumferential direction is recorded on the circumference, the mask is arranged so that an image of a mask having a sawtooth wave aperture or pattern is formed. The photosensitive material
Rotating and moving the photosensitive material in a plane parallel to the mask surface while irradiating light having the shape of the opening or pattern through the mask, and continuously exposing the photosensitive material while changing the imaging magnification. A method of manufacturing an optical scanning disk characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8117179A JPS565521A (en) | 1979-06-27 | 1979-06-27 | Light scanning disc and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8117179A JPS565521A (en) | 1979-06-27 | 1979-06-27 | Light scanning disc and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS565521A JPS565521A (en) | 1981-01-21 |
| JPS6321171B2 true JPS6321171B2 (en) | 1988-05-06 |
Family
ID=13739002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8117179A Granted JPS565521A (en) | 1979-06-27 | 1979-06-27 | Light scanning disc and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS565521A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH038044U (en) * | 1989-06-12 | 1991-01-25 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5313403A (en) * | 1976-07-22 | 1978-02-07 | Nec Corp | Optical disc for scanning |
-
1979
- 1979-06-27 JP JP8117179A patent/JPS565521A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5313403A (en) * | 1976-07-22 | 1978-02-07 | Nec Corp | Optical disc for scanning |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH038044U (en) * | 1989-06-12 | 1991-01-25 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS565521A (en) | 1981-01-21 |
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