JPS63209479A - Quadrupole couple ultrasonic rotating vibrator and ultrasonic motor - Google Patents
Quadrupole couple ultrasonic rotating vibrator and ultrasonic motorInfo
- Publication number
- JPS63209479A JPS63209479A JP62041521A JP4152187A JPS63209479A JP S63209479 A JPS63209479 A JP S63209479A JP 62041521 A JP62041521 A JP 62041521A JP 4152187 A JP4152187 A JP 4152187A JP S63209479 A JPS63209479 A JP S63209479A
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- electrodes
- vibrator
- electrode
- disc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010287 polarization Effects 0.000 abstract description 7
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 abstract description 6
- 230000010354 integration Effects 0.000 abstract 1
- 230000005484 gravity Effects 0.000 description 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
C産業上の利用分野〕
本発明は超音波モータおよびそのステータ用超音波振動
子に係わり、さらに詳しくは振動子を二枚対に複合化す
るための電極構造の改良に関する。[Detailed Description of the Invention] C. Industrial Application Field] The present invention relates to an ultrasonic vibrator for an ultrasonic motor and its stator, and more specifically to an improvement in the electrode structure for combining two vibrators into a pair. Regarding.
本発明者は、先に「重心回転型超音波モータ」昭62−
11374号を提案した。このモータに用いる超音波振
動子は「超音波回転振動子」昭62=11373号であ
り、半円部が互いに逆極性となるよう厚み方向に分極さ
れた正・負分域にはそれぞれ複数個の電極が施され独立
に変形し得るように構成されている。この超音波回転振
動子の外周に、穴のあいた円環又はディスクを嵌めると
、これらが滑らかに回転するから超音波回転振動子は機
能的にはモータそのものである。The present inventor previously developed a "center of gravity rotation type ultrasonic motor" in 1982-
No. 11374 was proposed. The ultrasonic vibrator used in this motor is the "Ultrasonic Rotating Vibrator" No. 11373 (Sho 62=11373), and the semicircular parts are polarized in the thickness direction so that the polarity is opposite to each other. It has electrodes and is constructed so that it can be deformed independently. When a perforated ring or disk is fitted around the outer periphery of this ultrasonic rotary vibrator, it rotates smoothly, so that the ultrasonic rotary vibrator is functionally itself a motor.
モータとして見た場合重心の回転は素子の1次共振モー
ドによるので、電極の分割数とは無関係であり、最低分
割数である4分割された四極振動子を相互にπ/4位相
の異なる2相電源で駆動する四極モータが最も単純で優
れている。ところで実用的見地からモータとして見ると
、従来の四極回転振動子は表面に合計8個の電極が露出
しており絶縁カバーを要し、リード線8本を接続するの
は複雑であり事故の要因と見なされる欠点がある。When viewed as a motor, the rotation of the center of gravity is due to the primary resonance mode of the element, so it is unrelated to the number of electrode divisions. A four-pole motor driven by phase power is the simplest and best. By the way, when viewed as a motor from a practical standpoint, a conventional four-pole rotary vibrator has a total of eight electrodes exposed on its surface, requiring an insulating cover, and connecting eight lead wires is complicated, leading to accidents. There are drawbacks that can be considered.
さらに低電圧化するため薄板化すると機械的に弱くなる
ので二枚貼合わせたい、あるいは出力を倍化する目的で
二枚重ねにしたいなどの要求に対しても構造が複雑であ
る。Furthermore, if the plates are made thinner in order to lower the voltage, they become mechanically weaker, so the structure becomes complicated in response to demands such as bonding two layers together or stacking two layers for the purpose of doubling the output.
この発明は、先願の「重心回転型超音波モータ」、「超
音波回転振動子」が持っていた四極以外は無駄、四極の
場合も8電極は複雑、外側を接地できない、簡単に二枚
重ねにできないなどの欠点を解決し、以って実用性の優
れた構造の振動子及びモータの旋与を目的とする。This invention is useless except for the four poles that the previous application's "center of gravity rotation type ultrasonic motor" and "ultrasonic rotary vibrator" had, eight electrodes are complicated even in the case of four poles, the outside cannot be grounded, and it is easy to stack two sheets. The purpose of the present invention is to solve the drawbacks such as impossibility, and thereby provide a vibrator and motor with an excellent structure of practicality.
なお、本発明の四極対超音波回転振動子はフィルター、
センサーなどに利用できることは言うに及ばず、バーワ
フィダ、アクチュエイター等としても利用できるだけで
なく、それ自身がモータそのものでもある。Note that the quadrupole pair ultrasonic rotary vibrator of the present invention includes a filter,
Not only can it be used as a sensor, actuator, etc., but it can also be used as a motor itself.
強力超音波振動子として最も広く実用化されているのは
、ボルト締めランジュバン振動子であり、主要部品が金
属であるため圧電素子の外部電極は短絡される。これを
防ぐ目的で通常二枚−組とし、外側を接地電極、内側を
高電位極とすれば、それ自身で接地側から絶縁保護でき
る。The most widely used powerful ultrasonic transducer is the bolted Langevin transducer, in which the main components are metal, so the external electrodes of the piezoelectric element are short-circuited. In order to prevent this, it is usually made into a set of two, with the outer side being the ground electrode and the inner side being the high potential electrode, so that it can be insulated and protected from the ground side by itself.
本発明でもこれと同じ方式とし、外側を全面接地電極と
する。これ゛を実現するため、円板素子の分極の向きを
厚さ方向に取り半円は正分極、残る半円は負分極になる
よう逆向きに分極し、正・負分域にはそれぞれ四半円状
の直角に開いた扇の形の電極を付ける。全く同様に作っ
た別の一枚の素子を用意し、これら二枚の素子の同極性
電極同志が対向するように重ね、かつ中心対称に配置さ
れた四枚づつの電極同志を短絡し、二対とする。In the present invention, the same method is used, and the entire outer surface is a ground electrode. In order to achieve this, the direction of polarization of the disk element is taken in the thickness direction, and the semicircle is polarized in the opposite direction so that it is positively polarized and the remaining semicircle is negatively polarized. Attach a circular fan-shaped electrode that opens at a right angle. Prepare another element made in exactly the same way, stack these two elements so that the electrodes of the same polarity face each other, and short-circuit the electrodes of each four elements arranged symmetrically with the center. A pair.
リード線は各対一本づつと接地極用とで合計三本で良く
、配線は而単になり、しがも二枚重ねるから機械的にも
強くなり、入出力ともに倍化できる。Only three lead wires are required, one for each pair and one for the ground electrode, which simplifies the wiring, and since two leads are stacked, it is also mechanically strong, and both input and output can be doubled.
第1図ならびに第2図は本発明による四極対超音波振動
子の圧電素子の分極と電極の配置を示す平面図ならびに
底面図、第3図ならびに第4図はその振動子を用いたモ
ータの平面図ならびに縦断面図である。1 and 2 are a plan view and a bottom view showing the polarization of a piezoelectric element and the arrangement of electrodes of a quadrupole ultrasonic transducer according to the present invention, and FIGS. 3 and 4 are a diagram of a motor using the transducer. FIG. 2 is a plan view and a vertical cross-sectional view.
Pb (Zr Ti )Os系圧電セラミックからな
る中あき円板1の片面には接地電極2が施され、他面に
は第2図に示すように四半円の直角に開いた扇形をした
電極3.4,5.6が施されている。A ground electrode 2 is provided on one side of a hollow circular plate 1 made of Pb (Zr Ti )Os based piezoelectric ceramic, and a sector-shaped electrode 3 opened at a right angle to a quarter circle is provided on the other side as shown in FIG. .4, 5.6 are applied.
これらの電極のうち電極2を接地し、電極3及び4に正
の直流高電圧を、電極5及び6に負の直流高電圧を24
時間印加する分極処理を終えると、残留分極の極性を明
示する(+)及び(−)記号がマーキングされる。Of these electrodes, electrode 2 is grounded, positive DC high voltage is applied to electrodes 3 and 4, and negative DC high voltage is applied to electrodes 5 and 6.
When the time-applied polarization process is completed, (+) and (-) symbols are marked to clearly indicate the polarity of residual polarization.
同じ処理をした電極二枚、例えば外40a+n+、内径
15mm、厚さ2ramの(+)及び(−)記号の電極
が正確に対向するように重ね、間に第3図に示すように
扇形端子板4枚21.22.23.24を挿入し、これ
らをアルミニウムリング17に嵌合し一体化する。Two electrodes with the same treatment, for example, electrodes with (+) and (-) symbols, with an outer diameter of 40a+n+, an inner diameter of 15mm, and a thickness of 2ram, are stacked so that they are exactly facing each other, and a sector-shaped terminal plate is placed between them as shown in Figure 3. Four sheets 21, 22, 23, and 24 are inserted, and these are fitted into the aluminum ring 17 and integrated.
電極21と電極23及び電極22と電極24とをそれぞ
れ短絡し、これらにリード線10及びリード線9を接続
し、さらに第4図に示すように外側の短絡電極12及び
短絡電極12°を短絡し、これにリード8を接続接地す
る。リード線9及びリード線10に45KHz付近の正
弦波電圧を印加し、周波数を共振周波数に一致させると
重心が回転する超音波回転振動子として機能する。The electrode 21 and the electrode 23 and the electrode 22 and the electrode 24 are short-circuited, the lead wire 10 and the lead wire 9 are connected to these, and the outer short-circuit electrode 12 and the short-circuit electrode 12° are further short-circuited as shown in FIG. Then, connect the lead 8 to this and ground it. When a sinusoidal voltage around 45 KHz is applied to the lead wires 9 and 10 and the frequency is made to match the resonant frequency, it functions as an ultrasonic rotary vibrator whose center of gravity rotates.
このように構成された超音波回転振動子のアルミニウム
リング17の外周に75°のテーパー加工を施し、これ
と一致するテーパーの付いた同一内径を有するディスク
18を載せるとディスク18は滑らかに回転した。ここ
ではディスク18の材質に真鍮を用いたが、他の金属又
はガラス、セラミックなど固い材質のものであればロー
タの役割を果たし良く回わる。回転数は電圧に比例して
高速回転になり約85ボルトで20Orpmを超えた。When the outer periphery of the aluminum ring 17 of the ultrasonic rotary transducer constructed in this manner was tapered at 75°, and a disk 18 with a matching taper and the same inner diameter was mounted, the disk 18 rotated smoothly. . Brass is used here as the material for the disk 18, but other metals, glass, ceramics, or other hard materials can function as a rotor and rotate well. The rotation speed increased in proportion to the voltage and exceeded 20 Orpm at about 85 volts.
2相電源の位相関係を逆にすると、たとえば電極21.
23に対して電極22.24を進相にするとディスク1
8は時計方向にまわり、遅相にすると反時計方向にまわ
る。If the phase relationship of the two-phase power supply is reversed, for example, the electrodes 21.
When electrodes 22 and 24 are advanced in phase with respect to 23, disk 1
8 rotates clockwise, and when the phase is delayed, it rotates counterclockwise.
前述のように回転振動子[1の外周にリング17を密嵌
して一体化することにより、回転振動子11の機械的強
度が非常に補強される。また、回転振動子11を2枚重
ね合わせることによって出力が増倍するだけでなく機械
的強度も高められ、このようなことから耐衝撃性に優れ
た超音波モータが得られる。As described above, by tightly fitting and integrating the ring 17 around the outer periphery of the rotary vibrator [1], the mechanical strength of the rotary vibrator 11 is greatly reinforced. Further, by stacking two rotary vibrators 11, not only the output is multiplied but also the mechanical strength is increased, and as a result, an ultrasonic motor with excellent impact resistance can be obtained.
以上説明したように、本発明では超音波回転振動子の電
極を四半円すなわち四極とし、片面に全電電極を、他面
に四半円電極を施し、隣接する二電極がそれぞれ正及び
負分極となるよう分極処理を行い、半円ずつ互いに逆向
きに分極した。分極された素子二枚の同極性同志の電極
が正しく対抗するように重ね、中心対称の位置にある四
電極をそれぞれ短絡接続し、外周にアルミニウムリング
を嵌めて一体化する構成をとった。As explained above, in the present invention, the electrodes of the ultrasonic rotary transducer are made into a quarter circle, that is, a quadrupole, with a full electric electrode on one side and a quarter circle electrode on the other side, with two adjacent electrodes having positive and negative polarization, respectively. Polarization was performed so that each semicircle was polarized in opposite directions. The structure was such that the electrodes of two polarized elements with the same polarity were placed one on top of the other so that they faced each other correctly, the four electrodes located at centrally symmetrical positions were short-circuited, and an aluminum ring was fitted around the outer periphery to integrate them.
そのため極数を大極以上にする無駄を省き、二枚重ねた
外側に接地電極を配置し、電極間の短絡事故を防ぐ効果
を持たせ、リード線三本で駆動できるよう配線を簡略す
る効果があり、しかも二枚対にしたので機械的強度を補
強すると同時に、入出力を倍化する効果がある。This eliminates the need to increase the number of poles beyond the maximum pole, places the ground electrode on the outside of the two stacked electrodes, has the effect of preventing short-circuit accidents between the electrodes, and simplifies the wiring so that it can be driven with three lead wires. Moreover, since they are paired, they not only reinforce mechanical strength but also double input and output.
第1図ならびに第2図は本発明の実施例に係る四極対超
音波回転振動子の平面図ならびに底面図、第3図ならび
に第4図はその回転振動子用いた超音波モータの平面図
ならびに縦断面図である。
l、11・・・超音波回転振動子、2.12・・・接地
電極、3.4.5.6 ・・・電極、8,9.10・・
・リード線、21,22,23゜24・・・端子板、1
7・・・アルミニウムリング、■8・・・ディスク。
第1図
第2図
第3図
第4図1 and 2 are a plan view and a bottom view of a quadrupole pair ultrasonic rotary vibrator according to an embodiment of the present invention, and FIGS. 3 and 4 are a plan view and a bottom view of an ultrasonic motor using the rotary vibrator. FIG. l, 11... Ultrasonic rotating transducer, 2.12... Ground electrode, 3.4.5.6... Electrode, 8,9.10...
・Lead wire, 21, 22, 23゜24...Terminal board, 1
7... Aluminum ring, ■8... Disc. Figure 1 Figure 2 Figure 3 Figure 4
Claims (2)
極され、片面にはほぼ全面電極、他面には正・負分域に
それぞれ四半円状電極を有する圧電円板二枚の同極性電
極を互いに対向させ、直接もしくは端子板を介して接す
るごとく重ねた状態で弾性体のリングに嵌合したことを
特徴とする四極対超音波回転振動子。(1). Two piezoelectric disks are polarized in the thickness direction so that the semicircles have opposite polarities, and have electrodes of the same polarity on one side, almost the entire surface, and the other side with quarter-circular electrodes in the positive and negative regions. A quadripolar ultrasonic rotary vibrator characterized in that the quadrupolar ultrasonic rotary vibrator is fitted into a ring of an elastic body in a stacked state so that they face each other and are in contact with each other either directly or via a terminal plate.
極され、片面にはほぼ全面電極、他面には正・負分域に
それぞれ四半円状電極を有する圧電円板二枚の同極性電
極を互いに対向させ、直接もしくは端子板を介して接す
るごとく重ねた状態で弾性体のリングに嵌合した四極対
超音波回転振動子をステータとすることを特徴とする超
音波モータ。(2). Two piezoelectric disks are polarized in the thickness direction so that the semicircles have opposite polarities, and have electrodes of the same polarity on one side, almost the entire surface, and the other side with quarter-circular electrodes in the positive and negative regions. An ultrasonic motor characterized in that the stator is a quadrupole pair of ultrasonic rotary vibrators fitted in an elastic ring in a stacked state facing each other and in contact with each other either directly or via a terminal plate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62041521A JPS63209479A (en) | 1987-02-26 | 1987-02-26 | Quadrupole couple ultrasonic rotating vibrator and ultrasonic motor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62041521A JPS63209479A (en) | 1987-02-26 | 1987-02-26 | Quadrupole couple ultrasonic rotating vibrator and ultrasonic motor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63209479A true JPS63209479A (en) | 1988-08-31 |
Family
ID=12610685
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62041521A Pending JPS63209479A (en) | 1987-02-26 | 1987-02-26 | Quadrupole couple ultrasonic rotating vibrator and ultrasonic motor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63209479A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0365231A2 (en) * | 1988-10-15 | 1990-04-25 | Seiko Instruments Inc. | Progressive wave motor |
JPH0332376A (en) * | 1989-06-29 | 1991-02-12 | Piezo Tec Kk | Ultrasonic actuator |
JPH0617392U (en) * | 1992-08-03 | 1994-03-04 | アスモ株式会社 | Ultrasonic motor |
-
1987
- 1987-02-26 JP JP62041521A patent/JPS63209479A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0365231A2 (en) * | 1988-10-15 | 1990-04-25 | Seiko Instruments Inc. | Progressive wave motor |
EP0365231A3 (en) * | 1988-10-15 | 1991-01-02 | Seiko Instruments Inc. | Progressive wave motor |
JPH0332376A (en) * | 1989-06-29 | 1991-02-12 | Piezo Tec Kk | Ultrasonic actuator |
JPH0617392U (en) * | 1992-08-03 | 1994-03-04 | アスモ株式会社 | Ultrasonic motor |
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