JPS6320916U - - Google Patents

Info

Publication number
JPS6320916U
JPS6320916U JP11508486U JP11508486U JPS6320916U JP S6320916 U JPS6320916 U JP S6320916U JP 11508486 U JP11508486 U JP 11508486U JP 11508486 U JP11508486 U JP 11508486U JP S6320916 U JPS6320916 U JP S6320916U
Authority
JP
Japan
Prior art keywords
filter
outside
installation board
board
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11508486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0141462Y2 (it
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11508486U priority Critical patent/JPH0141462Y2/ja
Publication of JPS6320916U publication Critical patent/JPS6320916U/ja
Application granted granted Critical
Publication of JPH0141462Y2 publication Critical patent/JPH0141462Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP11508486U 1986-07-25 1986-07-25 Expired JPH0141462Y2 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11508486U JPH0141462Y2 (it) 1986-07-25 1986-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11508486U JPH0141462Y2 (it) 1986-07-25 1986-07-25

Publications (2)

Publication Number Publication Date
JPS6320916U true JPS6320916U (it) 1988-02-12
JPH0141462Y2 JPH0141462Y2 (it) 1989-12-07

Family

ID=30998415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11508486U Expired JPH0141462Y2 (it) 1986-07-25 1986-07-25

Country Status (1)

Country Link
JP (1) JPH0141462Y2 (it)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02223661A (ja) * 1989-02-27 1990-09-06 Masanori Okamoto エアーフィルター清浄装置
JPH034914A (ja) * 1989-05-22 1991-01-10 Kinzo Kanda エアクリーナのクリーニング装置
JPH11319453A (ja) * 1998-05-08 1999-11-24 Shigenori Yamazaki エアフィルタ用エレメントの清掃装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02223661A (ja) * 1989-02-27 1990-09-06 Masanori Okamoto エアーフィルター清浄装置
JPH034914A (ja) * 1989-05-22 1991-01-10 Kinzo Kanda エアクリーナのクリーニング装置
JPH11319453A (ja) * 1998-05-08 1999-11-24 Shigenori Yamazaki エアフィルタ用エレメントの清掃装置

Also Published As

Publication number Publication date
JPH0141462Y2 (it) 1989-12-07

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