JPS63208286A - Gas laser oscillator - Google Patents

Abstract

PURPOSE:To make the replacement of a reflecting mirror body and an output-light transmitting body very simple and to make it possible to start again in a short time, by fixing a shutter to the end part of a laser tube body so that the shutter is freely turned, turning and retracting the shutter from a discharging path by inserting the main body of a block, turning and restoring the shutter from the disengaged position, and isolating the inside of the laser tube body from atmosphere. CONSTITUTION:A shutter 31 is attached to the inside of a laser tube body 1 so that the shutter is freely turned. The shutter is turned with a holding part 17 of a block main body 15, which is normally protruded into the laser tube 1 and retracted from a discharge path 34. At the time of replacement, the holding part 17 is disengaged from the laser tube body 1, and the shutter 31 is turned and restored so that the inside of the laser tube body 1 is isolated from atmosphere. Therefore, intrusion of air into the tube is prevented by the jetting of laser gas in the laser tube body 1 when the blocking main body 15 is disengaged. After the shutting, the airtightness of the shutter 31 is secured with the internal pressure of the laser gas. Thus a reflecting mirror body 21 and an output-light transmitting body can be replaced without exposing the inside of the laser tube body 1 to the atmosphere, restarting is made easy and the constitution is simplified.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a gas laser oscillation device in which a reflecting mirror body and an output transparent body can be easily replaced.

(Prior Art) A gas laser oscillation device generally includes an optical resonator made up of two reflecting mirrors. These are attached to both ends of the laser tube, which is a pressure vessel, via bellows or the like, but since they are consumables, they need to be replaced after being used for a certain period of time. However, for example, in an excimer laser device that uses a mixed gas containing a highly reactive halogen gas in its laser gas, if the inside of the laser tube is exposed to the atmosphere when replacing the reflector, moisture in the atmosphere may be released. , oxygen, etc. adhere to the inside of the laser tube, and in order to operate the laser again, a long period of gas extraction is required.

In addition, the halogen gas adsorbed inside the laser tube,
There are many disadvantages such as moisture in the atmosphere reacting and damaging the inside of the laser tube.

Also, the need to replace the reflector is not limited to cases of wear and tear or unexpected damage; for example, when using a reflector coated with a dielectric multilayer film, it is necessary to replace the mirror according to the oscillation wavelength. In this case as well, there was the inconvenience that it took a long time to return to the original state.

A gas laser oscillation device that solves these problems is described in Japanese Utility Model Application Publication No. 116261/1983.

This laser device has a shutter and an airtight compartment between the laser tube (optical path cover) and the reflector.
Close the shutter to prevent air from entering the laser tube before replacing the reflector, and after replacing the reflector, create a sufficient vacuum in the compartment before opening the shutter to allow air to enter the laser tube. The reflector body can be replaced.

Although this device certainly solves the inconveniences of the conventional system, it requires a compartment and a shutter that are rarely used to be attached at all times, making maintenance complicated and requiring space to prevent leaks. There is also the disadvantage of increasing the size.

(Problems to be Solved by the Invention) Because of this, it takes a long time to start operation. In addition, a structure in which a shutter and a compartment are provided to avoid this problem has the disadvantage of being complicated and large in size.

The present invention was made in order to eliminate the above-mentioned disadvantages, and it is possible to replace the reflector body and the output transparent body without exposing the inside of the laser tube to the atmosphere, and it is easy to restart and has a simple configuration. The purpose is to provide a gas laser oscillation device.

[Structure of the invention]

(Means and Effects for Solving the Problems) The present invention provides [a holding part that protrudes inward from the end of a laser tube filled with laser gas and holds a reflecting body or an output transparent body; The attachment is airtightly attached to the laser tube, and is rotatably mounted inside the laser tube, and is rotated by the holding portion that protrudes from the discharge path in the laser tube. A gas laser oscillation device characterized by comprising: a shutter that is retracted and rotated back upon detachment of the holding portion to shut off the discharge path from the atmosphere. ”.

A shutter is rotatably mounted inside the laser tube, and is normally rotated by the holding part of the closing body that protrudes into the laser tube to retreat from the discharge path.When replacing the shutter, the holding part is attached to the laser tube. When the blocker is removed from the main body, the shutter is rotated and returned to shut off the inside of the laser tube from the atmosphere. When the blocker is removed, the laser gas inside the laser tube is ejected to prevent air from entering the tube. However, after shutting off, the internal pressure of the laser gas ensures that the shutter remains airtight.

The thorn reflector is a total reflection mirror or an output-side reflector that constitutes the optical resonator, and the output transparent body is the one attached to the output window when the above-mentioned reflector is installed outside the laser tube. It is.

(Example) The details of the present invention will be explained below with reference to an example shown in FIGS. 1 and 2. FIG. 2 is a diagram showing the overall configuration of the gas laser oscillation device of the present invention, in which (1) is a laser tube which is a pressure vessel. This includes the main electrode (2), <21
, other generally known discharge members such as laser gas and auxiliary electrodes are sealed, and both ends (3) and (4) have a first
The closure body (5), the details of which are shown in the figure.

(6) etc. are installed. Although other explanations are omitted, a generally known high voltage power supply (9), a capacitor (101,
(11).

A switching element 02 and the like are connected. Then, due to the operation of the switching element α, the main capacitor (10
is discharged through the main electrodes (2) and (2), and laser light α4 is oscillated.

Next, the end portion (3) will be explained with reference to FIG.

In the main body of the housing blockage, the brim-like attachment consists of a part α and a cylindrical holding part αη protruding from the part α. This holding portion (I7) is open at both ends, and has a female thread formed in the outer opening l181, and the inner opening has a smaller diameter than this and is provided with a stepped portion. Then, from the inner opening σ wing toward the outside in order, a reflecting mirror body c+ consisting of a total reflecting mirror (21a)
N, O-ring [23, A pressing screw body (goods) of a pressing piece is inserted, and the space between the reflecting mirror bodies is fixed airtight. Further, the end (3) of the laser tube body (1) is provided with an insertion hole (c) into which the holding part Q7) can be inserted and removed, and the holding part (171) is inserted therein. )..., the part αO is tightened around its circumference MK, and the tube end of the laser tube body (1) is hermetically closed by the O ring (to). Furthermore, the inner circumference of the insertion hole (c) is is pushed by the holding part αe by inserting the disc-shaped shaft and rotated to the position shown by the two-dot chain line, that is, it is in a state of being evacuated from the discharge path (goods), and returns to the original position K by detachment of the blockage body αω. It is designed to return to rotation, and in this state it comes into pressure contact with an O-ring (2) provided on the outer periphery of the insertion hole (3).

Although FIG. 1 describes the end (3) on the total reflection mirror (21a) side, the end (4) on the output side has almost the same configuration, and although not shown, A partially transparent reflecting mirror body (211) is attached in place of the reflecting mirror (21a), and the pressing piece (c) and the pressing screw body Q→ have two transparent forks for output. - In the state before replacement, as described above, the blocking body α4 is installed airtight, the shutter 01) is in the position shown by the two-point chain, and the total reflection mirror 01) is in the discharge path (b). They face each other directly, and laser oscillation is performed as appropriate. Now, when replacing it, first remove the small screws to attach the closure body u9, and then gently pull out the closure body (151) little by little.

That is, it separates from the laser tube (1). As a result, as the holding part αη is retracted from the laser tube body (1),
The shutter 01) rotates and returns to the position shown by the solid line.

At this time, since the laser gas is ejected from the gap between the holding part αη and the insertion hole (to), the atmosphere is prevented from entering the laser tube (1). The shutter (31) has an O-ring (
), the internal pressure of the laser gas causes the shutter Cυ
is pressed outwards to ensure a tight seal and block out the atmosphere.

After removing the reflecting mirror body and replacing it with a new one as described above, the closing body a9 is again inserted into the insertion hole and fixed, thereby completing the replacement work. At this time, the intrusion of the atmosphere is also prevented by the ejection and leakage of the laser gas.

Although this embodiment has been explained using an internal mirror resonator, it is not limited to this, and an external mirror resonator may also be used. be done.

[Effects of the Invention] As detailed above, the gas laser oscillation device of the present invention has the following effects:
A shutter is rotatably attached to the end of the laser tube body, and the shutter is rotated away from the discharge path by inserting the closing body.
Since the shutter rotates back when the laser is detached and isolates the inside of the laser tube from the atmosphere, it is extremely easy to replace the reflector and output transparent body, and restarting is also possible in a short time, reducing maintenance costs. It has the advantage of being easy to use.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of a main part of an embodiment of the present invention, and FIG. 2 is a configuration diagram of the above embodiment. (1)... Laser tube body. (3), <4)... end. α9... Obstruction body. (IQ...Installation part. In a...Holding part. CI!υ...Reflector body. 6υ...Sha, Ri. (Foundation)...Discharge path. Agent Patent attorney Nori Chika Ken Udo Kikuo Takehana

Claims (3)

[Claims] (1) A closing body consisting of a holding part that protrudes inward from the end of a laser tube filled with laser gas and holds a reflecting body or an output transparent body, and a mounting part that airtightly attaches this to the end; It is rotatably mounted inside the laser tube and is rotated by the holding section which inserts and protrudes into the laser tube and retreats from the discharge path in the laser tube, and when the holding section is detached, the rotation returns and the above discharge occurs. A gas laser oscillation device characterized by comprising: a shutter that blocks a path from the atmosphere. (2) The gas laser oscillation device according to claim 1, wherein the reflecting mirror is a total reflecting mirror. (3) The gas laser oscillation device according to claim 1, wherein the reflecting mirror is an output side reflecting mirror.