JPH05121795A - External mirror type gas laser oscillator - Google Patents

Abstract

PURPOSE:To prevent a gas laser oscillator from deteriorating in output due to contaminants by a method wherein dust covers which keep the Brewster window and the mirrors of an external mirror type gas laser free from contaminants are improved in quality. CONSTITUTION:A Brewster bulb 6 and a dust protective cover 8 are linked together through the intermediary of bias cut backup rings 9 of Teflon or bias cut O-rings of Teflon to be enhanced in airtightness. By this setup, the bias cut backup ring 9 or the bias cut O-ring is restrained from deteriorating due to ultraviolet rays emitted from a gas laser tube 1 by forming it with Teflon material, and a laser oscillator of this design can be prevented from deteriorating in output due to the contamination of optical components.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to a gas laser oscillator.

[0002]

2. Description of the Related Art As shown in FIG. 5, a conventional gas laser oscillator includes an external mirror type laser tube 1, a support 2 for holding and fixing the gas laser tube 1, and a mirror holder 3 at both ends of the gas laser tube 1. A pair of mirrors 5 for the optical resonator, which are fixed and attached to the angle adjusting gimbal 4 of the mirror holder 3, and a Brewster valve 6 at both ends of the gas laser tube 1.
The Brewster window 7 attached to the, and the Brewster window and the mirror 5 are covered with a dustproof cover 8 for preventing dirt, and the dustproof cover 8 and the Brewster valve 6 are sealed with silicone 0.
It is hermetically sealed by a ring or a rubber O-ring 11 such as a nitrile O-ring to prevent inflow of dust adhering to the surfaces of the Brewster window 7 and the mirror 5 and dust that blocks the optical path. ..

[0003]

In this conventional dustproof structure of Brewster window and mirror, in order to obtain a large output laser beam, a large current discharge causes discharge light of 200 to 400 n.
Ultraviolet rays of about m are emitted, transmitted through the Brewster bulb, and irradiated on the rubber O-ring. When the rubber O-ring is irradiated with ultraviolet light, it deteriorates and becomes a gas source.
The release of gas is accelerated because pressure is applied to the rubber O-ring in order to release the gas and improve the hermeticity. For this reason, there is a problem that the gas emitted from the rubber O-ring adheres to the Brewster window, the mirror, etc., and the laser output is reduced in several hundred hours.

[0004]

A gas laser oscillator according to the present invention comprises a dust-proof cover and a Brewster valve sealed by a plurality of bias-cut backup rings made of Teflon or a Teflon O-ring bias-cut product. Is equipped with.

[0005]

The present invention will be described below with reference to the drawings. 1 is a gas laser oscillator according to an embodiment of the present invention, and FIG. 2 is an enlarged view of a dustproof cover portion of the present invention.

An external mirror type gas laser tube 1, a support 2 for holding and fixing the gas laser tube 1, and a light attached to both ends of the gas laser tube 1 to a mirror holder 3 and attached to an angle adjusting gimbal 4 of the mirror holder 3. A pair of mirrors 5 for the resonator, and a Brewster valve 6 at both ends of the gas laser tube 1.
The Brewster window 7, the Brewster window 7 and the mirror 5 mounted on the are covered with a dustproof cover 8 for preventing dirt, and the dustproof cover 8 and the Brewster valve 6 are sealed by a plurality of Teflon bias cut backup rings 9. Is sealed through.

FIG. 3 shows a Teflon bias cut backup ring used in the present invention.

Further, it may be considered to use the Teflon O-ring 10 shown in FIG. 4 as a sealing material by bias cutting the dustproof cover 8 and the Brewster valve 6 as seals, and to use the Teflon backup ring and the Teflon O-ring. It is considered to seal in combination.

[0009]

As described above, according to the present invention, since the dustproof cover and Brewster valve are sealed via the Teflon bias cut backup ring or the like, the gas emitted due to deterioration due to ultraviolet light and deterioration due to pressure is discharged. However, compared to the rubber O-ring, it is much less and has a bias cut, so it is easy to install, and by using more than one, it is configured to prevent external dirt from entering. , The effect of preventing the reduction of the laser output due to the dirt of the Brewster window and the mirror for 2000 hours or more.

[Brief description of drawings]

FIG. 1 is a schematic diagram of an embodiment of the present invention.

FIG. 2 is an enlarged view of the dustproof cover portion shown in FIG.

FIG. 3 is a backup ring diagram of a Teflon bias cut used in the present invention.

FIG. 4 is a diagram in which a Teflon-made O-ring used in an example of the present invention is bias-cut.

FIG. 5 is a schematic diagram of a conventional gas laser oscillator.

[Explanation of symbols]

 1 External Mirror Type Gas Laser Tube 2 Support 3 Mirror Holder 4 Gimbal 5 Optical Cavity Mirror 6 Brewster Valve 7 Brewster Window 8 Dust Cover 9 Teflon Bias Cut Backup Ring 10 Bias Cut Teflon O Ring 11 Rubber 0 ring

Claims (3)

[Claims] 1. A gas laser tube enclosing a laser gas,
A support for holding and fixing the gas laser tube, a pair of mirrors for the optical resonator fixed to the mirror holder on the extension line of the gas laser tube and attached to the angle adjusting gimbal of the mirror holder, and brewers at both ends of the gas laser tube. In a gas laser oscillator in which the Brewster window attached to the valve and the Brewster window and the mirror are covered with a dustproof cover to prevent contamination, the dustproof cover and Brewster window were sealed via multiple backup rings made of Teflon bias cut. An external mirror type gas laser oscillator characterized by the above. 2. The external mirror type gas laser oscillator according to claim 1, wherein the dustproof cover and Brewster window are sealed by bias cutting a Teflon O-ring. 3. The external mirror type gas laser oscillator according to claim 1, wherein the dustproof cover and the Brewster window are sealed by combining a Teflon bias cut backup ring and a Teflon O ring bias cut product. Characteristic external mirror type gas laser oscillator.