JPS63205806A - Production of magnetic head - Google Patents

Abstract

PURPOSE:To suppress distortion due to the difference of thermal expansion between bases and a thin film and to obtain magnetic head with excellent massproductivity by joining a base forming an inclined groove, a distortion dividing groove and a metallic thin film on its joint face with a base forming a winding groove on its joint face. CONSTITUTION:The inclined groove 2 and the distortion dividing groove 3 rectangular to the groove 2 are formed on a ferromagnetic oxide base 1, a ferromagnetic metallic thin film 4 is adhesively formed on the whole surface of the base and the upper face 1a is ground to form a gap forming face 5 on which the thin film 4 stuck to the inclined face is exposed. The other base 1' having the winding groove 7 and a groove 8 in stead of the groove 3 is oppositely abutted upon the base 1, a glass rod 9 is inserted into the groove 8 and heated and joined core block 10 is sliced to obtain a head chip 14. Consequently, distortion to be generated due to the difference of thermal expansion between the bases 1, 1' and the metallic thin film 4 is suppressed and the massproductibity of the magnetic heads can be improved.

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Industrial Application Field The present invention is a so-called composite tape in which a ferromagnetic metal thin film with a high saturation magnetic flux density is disposed near the gap of a magnetic core in order to handle a metal tape with a high coercive force. This invention relates to a type of magnetic head.

(b) Conventional technology In recent years, magnetic tapes used in magnetic recording and reproducing devices such as video tape recorders have become more sophisticated, and ferromagnetic metal powders such as Fe, 00, N1, etc. have been used as magnetic powders. Metal tapes with high coercive force are now being used. On the other hand, as a magnetic head for recording on this metal tape, for example, as disclosed in Japanese Patent Application Laid-Open No. 58-175122 (Engineering PC: G1) B5/22), a part near the working gap is used as a magnetic core. A composite magnetic head made of a magnetic material (e.g., permalloy, sendust, amorphous magnetic material) with a higher saturation magnetization than the ferrite used has been proposed, and this composite magnetic head has excellent reliability, magnetic properties, It has excellent properties such as wear resistance.

As a manufacturing method of this kind of magnetic head, for example, Japanese Patent Application Laid-Open No. 61-1) 0309 (IPO: G1) B
5/127), a ferromagnetic oxide substrate such as Mn-Zn ferrite single crystal was processed with inclined grooves, ferromagnetic metal thin film formation, mirror polishing, track width regulating grooves, etc. There is a method in which a pair of substrates that have been processed are glass-bonded using a predetermined gap spacer, and then sliced at a predetermined angle to form a head chip.

In addition, in the above method, there is also a method in which the inclined grooves are filled with glass before mirror polishing, and a pair of core blocks are bonded to the glass.

However, in the case of the above-mentioned manufacturing method, if a ferromagnetic metal thin film is deposited by sputtering or the like after forming an inclined groove on a ferromagnetic oxide substrate, the temperature change caused by sputtering may cause the substrate and thin film to Distortion occurred due to the difference in thermal expansion coefficient between the two, and many cracks were generated in the substrate due to the subsequent mirror polishing I and track width regulating groove processing, resulting in poor yield.

As the area to which the ferromagnetic metal thin film is deposited increases, the spread due to the difference in thermal expansion coefficients described above also increases. For this reason, the dimensions of the ferromagnetic oxide base were limited, making it unsuitable for mass production.

eC Problems to be Solved by the Invention The non-explosion FJA was developed in view of the drawbacks of the conventional example described above, and suppresses the distortion caused by the difference in thermal expansion coefficient between the ferromagnetic oxide substrate and the ferromagnetic metal thin film. It is an object of the present invention to provide a method for manufacturing a magnetic head that is excellent in mass productivity.

2) Means for Solving the Problems In the method of manufacturing a composite magnetic head, a second groove for strain relief is formed on the bonding surface of the ferromagnetic oxide substrate in a direction perpendicular to the first groove.
Form a groove.

(E) Effect According to the above method, the ferromagnetic metal thin film deposited on the gap forming surface of the ferromagnetic oxide substrate is divided by the second groove, so that the area of the thin film increases in proportion to the increase. Strain caused by the difference in thermal expansion coefficient between the substrate and the thin film is also separated,
Cracks are less likely to occur in the substrate.

(F) Example Hereinafter, a method for manufacturing a magnetic head of the present invention will be explained in detail with reference to the drawings.

First, a ferromagnetic oxide substrate (1) such as 9Mn-Zn ferrite single crystal as shown in FIG. Slope (2a
) is inclined at an angle of θ (#IC first groove) (2
) are formed using a rotating grindstone or the like. At this time, the slope (2a) has an inclination of θ-4? It is set within the range of ±20.

Next, as shown in FIG. 4, a fully divided groove (with a rectangular cross section) (
A plurality of second grooves) (3) are formed. The dividing groove (3) is formed so as to be deeper than the snow slope groove (2). The groove may have various shapes other than a rectangular cross section, such as a V-shaped cross section or a square cross section, as long as the thin film does not adhere to the bottom surface of the groove in the subsequent thin film forming step.

Next, as shown in FIG. 5, the upper surface of the substrate il+ (1a
) is coated with a thin film of ferromagnetic metal such as sendust alloy or amorphous alloy using vacuum thin film forming techniques such as sputtering, vapor deposition, and ion blating. At this time, if the track width when the bed chip is completed is Tw, the ferromagnetic metal thin film (4) is deposited so that its film thickness is about 1 to 5 μm larger than Twsinθ. Also,
At this time, almost no ferromagnetic metal thin film was deposited on the bottom of the planned section 1) 1) (31).

Next, the upper surface [1a] of the substrate (1) is ground to remove the excess ferromagnetic metal thin film, and then mirror-polished to remove the ferromagnetic metal deposited on the slope (2a) as shown in FIG. metal thin 1
(41r is exposed to form a gap forming surface (5).

Incidentally, after the inclined brocade (2) is filled with glass, the excess ferromagnetic metal thin film may be removed by surface grinding.

Next, as shown in FIG. 7, the upper surface (1a
) is provided with a track width regulating groove (6) parallel to the inclined groove (2).
form.

On the other hand, in the first ferromagnetic oxide substrate (1) shown in FIG. 7, a winding groove (third groove) +71 is provided in the direction orthogonal to the inclined groove (2) in place of the running groove (3). A second ferromagnetic oxide substrate (1) on which a glass rod insertion groove ridge and a glass rod insertion groove ridge are formed is prepared. Then, as shown in FIG. 8, the pair of first and second ferromagnetic oxide substrates il+ (1) are arranged such that their gap forming surfaces (5) face each other via a gap spacer (not shown) such as 8102. collide like this. After that, the glass rod (9) is inserted into the glass rod insertion groove (8), and by heating and increasing the temperature, the glass rod is inserted into the inclined groove (2), the full dividing groove (3), and the track width regulating groove (6). (151 is filled and the pair of substrates mt1 to glass are bonded to form a core block (1).

Finally, connect the core block (1) to the dashed line A
-A' and the two-dot chain i B - Cut the tape along the -B' and apply an R to the sliding surface of the tape. core half a'a
A ferromagnetic metal thin film (4
) A plurality of composite head tips I are formed.

In the method for manufacturing a magnetic head as described above, the ferromagnetic metal thin film (4) is divided into narrow ranges by the full dividing grooves (3), so that the coefficient of thermal expansion between the substrate (1) and the thin film (4) is The distortion caused by the difference is also separated, and no cracks occur even if the mirror polishing shown in fX6 figure or the track width regulating groove (6) shown in Fig. A multi-current head chip can be obtained from a single board.

In addition, in the above-mentioned manufacturing method of the magnetic head, complete separation @ (3
After forming 1, the ferromagnetic metal thin film (4) t- was deposited, but even if the ferromagnetic metal thin film was deposited in the opposite direction and a full dividing groove was formed, the ferromagnetic oxide substrate + t + ttr glass The migration caused by temperature changes at the junction is suppressed.

(G) Effects of the Invention According to the present invention, since the migration caused by the difference in thermal expansion coefficient between the ferromagnetic oxide substrate and the ferromagnetic metal thin film is suppressed, the size of the substrate can be increased and mass production is improved. The present invention provides a method for manufacturing a magnetic head that is completely crushed.

[Brief explanation of the drawing]

The drawings are all related to the present invention; FIG. 1 is a perspective view showing the external appearance of the magnetic head, FIGS. 2, 3, 4, 5, and 6.
FIG. 7, and FIG. m8 are diagrams each showing a method of manufacturing a magnetic head. (II...Ferromagnetic oxide substrate (first ferromagnetic oxide substrate) (1)...Ferromagnetic oxide substrate (second ferromagnetic oxide substrate) (1a)...Top surface (junction surface) (2)・
... Slanted groove (first groove) t3) ... Fully divided groove (second #1
) (4)...Ferromagnetic metal thin film (5)...Gap forming surface (7)...Winding groove [third groove] flO!
...Core block side...Magnetic core half (131
...Gap 041...Head chip

Claims (1)

[Claims] (1) In a method for manufacturing a magnetic head in which a ferromagnetic metal thin film is deposited on the gap forming surfaces of a pair of magnetic core halves made of ferromagnetic oxide, a first groove is formed on the bonding surface of the ferromagnetic oxide substrate. forming a second groove for strain isolation in a direction perpendicular to the first groove on the bonding surface; depositing a ferromagnetic metal thin film on the bonding surface; and completing the steps. forming a core block by bonding a second ferromagnetic oxide substrate in which a third groove for winding is formed to the first ferromagnetic oxide substrate; and cutting the block to form a pair of magnetic cores. A method for manufacturing a magnetic head, comprising the step of forming a head chip consisting of a half body.