JPS6320490Y2 - - Google Patents

Info

Publication number
JPS6320490Y2
JPS6320490Y2 JP1979124343U JP12434379U JPS6320490Y2 JP S6320490 Y2 JPS6320490 Y2 JP S6320490Y2 JP 1979124343 U JP1979124343 U JP 1979124343U JP 12434379 U JP12434379 U JP 12434379U JP S6320490 Y2 JPS6320490 Y2 JP S6320490Y2
Authority
JP
Japan
Prior art keywords
main shaft
shaft
pinion
intermediate shaft
screwed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1979124343U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5642815U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979124343U priority Critical patent/JPS6320490Y2/ja
Publication of JPS5642815U publication Critical patent/JPS5642815U/ja
Application granted granted Critical
Publication of JPS6320490Y2 publication Critical patent/JPS6320490Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drilling And Boring (AREA)
JP1979124343U 1979-09-08 1979-09-08 Expired JPS6320490Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979124343U JPS6320490Y2 (enrdf_load_stackoverflow) 1979-09-08 1979-09-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979124343U JPS6320490Y2 (enrdf_load_stackoverflow) 1979-09-08 1979-09-08

Publications (2)

Publication Number Publication Date
JPS5642815U JPS5642815U (enrdf_load_stackoverflow) 1981-04-18
JPS6320490Y2 true JPS6320490Y2 (enrdf_load_stackoverflow) 1988-06-07

Family

ID=29356243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979124343U Expired JPS6320490Y2 (enrdf_load_stackoverflow) 1979-09-08 1979-09-08

Country Status (1)

Country Link
JP (1) JPS6320490Y2 (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7258892B2 (en) 2003-12-10 2007-08-21 Micron Technology, Inc. Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition
US7422635B2 (en) 2003-08-28 2008-09-09 Micron Technology, Inc. Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces
US7427425B2 (en) 2003-02-11 2008-09-23 Micron Technology, Inc. Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces
US7481887B2 (en) 2002-05-24 2009-01-27 Micron Technology, Inc. Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces
US7581511B2 (en) 2003-10-10 2009-09-01 Micron Technology, Inc. Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes
US7584942B2 (en) 2004-03-31 2009-09-08 Micron Technology, Inc. Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers
US7588804B2 (en) 2002-08-15 2009-09-15 Micron Technology, Inc. Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5841052Y2 (ja) * 1975-06-21 1983-09-16 カブシキガイシヤ ナカニシテツコウシヨ フダンスイジドウセンコウキ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7481887B2 (en) 2002-05-24 2009-01-27 Micron Technology, Inc. Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces
US7588804B2 (en) 2002-08-15 2009-09-15 Micron Technology, Inc. Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces
US7427425B2 (en) 2003-02-11 2008-09-23 Micron Technology, Inc. Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces
US7422635B2 (en) 2003-08-28 2008-09-09 Micron Technology, Inc. Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces
US7581511B2 (en) 2003-10-10 2009-09-01 Micron Technology, Inc. Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes
US7258892B2 (en) 2003-12-10 2007-08-21 Micron Technology, Inc. Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition
US7584942B2 (en) 2004-03-31 2009-09-08 Micron Technology, Inc. Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers

Also Published As

Publication number Publication date
JPS5642815U (enrdf_load_stackoverflow) 1981-04-18

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