JPS6320437U - - Google Patents
Info
- Publication number
- JPS6320437U JPS6320437U JP11364186U JP11364186U JPS6320437U JP S6320437 U JPS6320437 U JP S6320437U JP 11364186 U JP11364186 U JP 11364186U JP 11364186 U JP11364186 U JP 11364186U JP S6320437 U JPS6320437 U JP S6320437U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- weight
- wafer processing
- measuring
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000013500 data storage Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 7
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 230000005856 abnormality Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11364186U JPS6320437U (es) | 1986-07-24 | 1986-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11364186U JPS6320437U (es) | 1986-07-24 | 1986-07-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6320437U true JPS6320437U (es) | 1988-02-10 |
Family
ID=30995638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11364186U Pending JPS6320437U (es) | 1986-07-24 | 1986-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6320437U (es) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05152423A (ja) * | 1991-08-30 | 1993-06-18 | Dainippon Screen Mfg Co Ltd | 表面処理装置 |
| US10603708B2 (en) | 2014-08-26 | 2020-03-31 | Honda Motor Co., Ltd. | Cushion pin |
-
1986
- 1986-07-24 JP JP11364186U patent/JPS6320437U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05152423A (ja) * | 1991-08-30 | 1993-06-18 | Dainippon Screen Mfg Co Ltd | 表面処理装置 |
| US10603708B2 (en) | 2014-08-26 | 2020-03-31 | Honda Motor Co., Ltd. | Cushion pin |
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