JPS6320428U - - Google Patents

Info

Publication number
JPS6320428U
JPS6320428U JP11338386U JP11338386U JPS6320428U JP S6320428 U JPS6320428 U JP S6320428U JP 11338386 U JP11338386 U JP 11338386U JP 11338386 U JP11338386 U JP 11338386U JP S6320428 U JPS6320428 U JP S6320428U
Authority
JP
Japan
Prior art keywords
wafer
vertical storage
wafers
rows
support plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11338386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249709Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11338386U priority Critical patent/JPH0249709Y2/ja
Publication of JPS6320428U publication Critical patent/JPS6320428U/ja
Application granted granted Critical
Publication of JPH0249709Y2 publication Critical patent/JPH0249709Y2/ja
Expired legal-status Critical Current

Links

JP11338386U 1986-07-25 1986-07-25 Expired JPH0249709Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11338386U JPH0249709Y2 (cg-RX-API-DMAC7.html) 1986-07-25 1986-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11338386U JPH0249709Y2 (cg-RX-API-DMAC7.html) 1986-07-25 1986-07-25

Publications (2)

Publication Number Publication Date
JPS6320428U true JPS6320428U (cg-RX-API-DMAC7.html) 1988-02-10
JPH0249709Y2 JPH0249709Y2 (cg-RX-API-DMAC7.html) 1990-12-27

Family

ID=30995137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11338386U Expired JPH0249709Y2 (cg-RX-API-DMAC7.html) 1986-07-25 1986-07-25

Country Status (1)

Country Link
JP (1) JPH0249709Y2 (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114938U (cg-RX-API-DMAC7.html) * 1989-03-03 1990-09-14
JP2014060403A (ja) * 2013-09-24 2014-04-03 Kokusai Electric Semiconductor Service Inc 基板保持具及びウェーハ支持方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114938U (cg-RX-API-DMAC7.html) * 1989-03-03 1990-09-14
JP2014060403A (ja) * 2013-09-24 2014-04-03 Kokusai Electric Semiconductor Service Inc 基板保持具及びウェーハ支持方法

Also Published As

Publication number Publication date
JPH0249709Y2 (cg-RX-API-DMAC7.html) 1990-12-27

Similar Documents

Publication Publication Date Title
JPH0417703B2 (cg-RX-API-DMAC7.html)
JPS6320428U (cg-RX-API-DMAC7.html)
JPS6120553U (ja) 熱処理治具
JPS6018309Y2 (ja) 保管治具
JPS6289143U (cg-RX-API-DMAC7.html)
JP3984837B2 (ja) ダネッジシステム
JPH044696B2 (cg-RX-API-DMAC7.html)
JPH0430780Y2 (cg-RX-API-DMAC7.html)
JPS629264Y2 (cg-RX-API-DMAC7.html)
JPS6184594U (cg-RX-API-DMAC7.html)
JPS6190785U (cg-RX-API-DMAC7.html)
JPH0254068U (cg-RX-API-DMAC7.html)
JPS6255043U (cg-RX-API-DMAC7.html)
JPS61107490U (cg-RX-API-DMAC7.html)
JPS59132635U (ja) ウエハ処理装置
JP2514283Y2 (ja) タイル整列用枠体
JPH01121935U (cg-RX-API-DMAC7.html)
JPH0286059U (cg-RX-API-DMAC7.html)
JPS6411543U (cg-RX-API-DMAC7.html)
JPS61117182U (cg-RX-API-DMAC7.html)
JPH0225416U (cg-RX-API-DMAC7.html)
JPS6428258U (cg-RX-API-DMAC7.html)
JPS6258363U (cg-RX-API-DMAC7.html)
JPS61149689U (cg-RX-API-DMAC7.html)
JPS58103398U (ja) 核燃料集合体貯蔵プ−ル