JPS63202707A - Precision lens mounting assembly and method and device for manufacturing precision lens cell assembly - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an apparatus for assembling optical elements, in other words an apparatus for assembling the elements together into a unit assembly.

Prior Art Optical designers are constantly challenged to develop more precise and powerful lens systems for applications such as photolithography equipment for semiconductor product fabrication. It is desired that these lens systems maintain extremely high levels of performance under numerous environmental conditions during use, storage, and transportation. Furthermore,
These must be assembled easily, quickly and accurately. The problem therefore lies not only in developing continuous optical designs, but also in assembling the lenses into final assemblies that maintain accuracy relative to the initial design and are inexpensively completed.

The lens is generally secured within a lens cell that serves as an annular support for the lens. Typically, most lenses are retained within the lens cell with mechanical devices such as clips, flanges, threaded retaining rings, adhesives, knurled lips, or screws. When such a device is exposed to ambient temperature, the effects of thermal expansion and contraction inevitably result in stress changes in the lens, e.g., possibly movement of the element in its mount inside the cell. , the tightening of the element induces stress changes that manifest as asymmetrical changes in the load or undesired distortions within the lens glass that cause distortions of the transmitted wavefront.

The lenses must also be combined to form an optical assembly unit. Such an assembly is
The lenses should be held within narrow tolerances to ensure proper axial and radial alignment, and should be assembled easily and accurately to minimize manufacturing costs.

Lens assemblies may also be assembled into a lens barrel, which is a mechanical unitary structure that holds a series of lenses. The lens barrel is used to axially and radially position the lenses relative to each other and to confront the lens assembly with the system of which it is a part. The lens element is radially positioned by the ID on the barrel wall. The OD of the lens element is the basis for fitting the ID of the barrel wall. The axial position of the lens element is obtained by cutting the lens seat during assembly. after that,
The lens element can be fixed to the seat with adhesive, a retaining ring, or the like.

Such barrel-mounted lens assemblies have the disadvantage of being exposed to thermally generated stresses on the barrel and/or lens, and to minimize the effects of such stresses, particular Multilenses require special materials, are difficult to fabricate, and once fabricated there is no flexibility in adjusting the relative positions of the lens elements during assembly.

SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a lens cell with a lens cell made of a small amount of external material that is not susceptible to large temperature excursions when returned to its nominal operating temperature range. The object of the present invention is to eliminate or ameliorate the above-mentioned drawbacks of the prior art by providing a lens cell as described above that can be used to quickly, easily and accurately assemble an optical system that satisfies the original optical design requirements. Ta.

Means for Solving the Problems To achieve the desired results, the present invention provides a new and improved device consisting of a lens coupled within a novel lens cell.

In accordance with the present invention, the lens cell with attached lens cell is placed on a vacuum chuck mounted on a precision air bearing lathe spindle. The chuck seat is suitably machined so that it has the same radius of curvature as the lens to be seated on it. This operation serves two purposes: to ensure the coordinate position of the grinding tool relative to the apex of the lens and to provide a preferred metal on the glass seating surface to maintain a vacuum seal between the lens and the chuck. Helpful.

High precision total indicator reading (TIR) set on the lens surface opposite the vacuum chuck
The mold guno can be set to a minimum TIR by appropriately manipulating the lens on the chuck seat with a minimum chuck vacuum force applied, assuming a curved surface. This operation places the outer lens radius of curvature, and thus the optical axis of the lens, on the rotational axis of the vacuum chuck. The cell surface, ie the cell surface perpendicular to the axis of rotation, and the outer diameter of the lens cell can be machined precisely perpendicularly and co-linearly, respectively, to the axis of rotation of the spindle. This position is the relative position from the lens apex to the surface of the cell perpendicular to the axis of rotation, which determines the distance between the lenses when the lens cell assemblies are stacked and secured together. Accurate alignment of the optical axes of the lenses is achieved by making all lenses have equal outer diameters and concentric about the optical axis of the lenses.

Next, the processed cells, with lenses attached, are stacked and held in a precision ■-shaped block while conducting an evaluation test for the evacuation wavefront. Once the desired transmitted wavefront is achieved by axial, radial or rotational movement of the selected cells, the cells are lowered and then sequentially joined to form a fixed assembly as described below. .

The first cell is positioned with 29 or more dowels projecting from its seating surface. The next cell is then positioned in the interstitial holes around the bottle.

■The shaped block defines the center of the cell and thus the lens. The interface between the dowel and the cells is filled with a glass adhesive cement and a seal is provided between the cells to prevent the cement from leaking and adhering to the cells below. This operation is performed one time at a time until the entire assembly is glued/bottled together. A fixed, precisely positioned final lens assembly is thus formed.

The foregoing has set forth rather the more important features of the invention in order to facilitate an understanding of the detailed description of the invention that follows, and in order to better appreciate the contribution of the invention to the art. I have given a general overview. However, there are of course additional features of the invention which form the subject matter of the following description and claims.

For those skilled in the art, the technical idea on which the above disclosure is based,
It is self-evident that it can be used as a basis for the design of further assemblies to carry out some of the objects of the invention. It is important, therefore, that the claims be considered to cover equivalent assemblies that do not depart from the spirit and scope of the invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Several embodiments of the invention have been selected for purposes of illustration and description. The present invention will be described in detail with reference to this embodiment.

FIG. 1 shows a lens cell 85 constructed according to the present invention,
Figure 8 shows an exploded view of one group of 86 and 87; Each lens cell, e.g. 85, is generally an annular ring within which an optical element, e.g. lens 36, is arranged.

It is a property of any solid material that its dimensions change in response to changes in ambient temperature. Some materials undergo dimensional changes in response to temperature changes more strongly than others, ie, they have different coefficients of thermal expansion. Any material bonded to materials with different coefficients of expansion is
The temperature excursion process generates stress at the bonding point. Such stresses can cause permanent deformation or dimensional changes in the materials and can change the orientation of one material relative to the other. Such dimensional or orientation changes may be due to optical distance,
This can be a problem in optical systems where alignment and wedges are to be maintained within narrow tolerances.

In the embodiment of the invention shown in FIG. 1, three cantilevered deflection mechanisms are provided to which lenses are coupled. The structure and operation of the deflection mechanisms 22, 23 and 24 will be explained below with reference to FIGS. 2-5.

Further, the lens cell 85 has precision-machined surfaces 13 to 13 on its upper part.
It has 18. These machined surfaces are positioned to match the precision machined surfaces on the bottom of lens cell 86.

Although six precision machined surfaces 13-18 are shown in FIG. 1, there may be any number greater than three. According to this format, the cells are arranged at relatively small angles, e.g.
A 60' rotation is possible if two precision machined surfaces are provided. By rotating any given cell relative to another, the wavefront emanating from a series of lenses housed within the cell can be selectively changed. The method of adjusting the wavefront will be more fully described and explained with reference to FIGS. 10 and 11.

As described above with reference to FIGS. 8 and 9, precision machined surfaces 13-18 lie in a plane perpendicular to the optical axis of lens 36 housed within cell 85. Furthermore, the distance from the surface to the apex of lens 36 is known. In this manner, the vertices of lenses in adjacent cells can be determined during precision machining of the lens cells.

Further, the outer diameter 35 of the lens cell 85 is precisely machined relative to the lens 36 housed within the cell. Outer diameter 35
are symmetrical about the optical axis of the lens 36. Furthermore, if the outer diameters of all lens cells in an assembly are concentric cylindrical, then the optical axes of all lenses contained within the lens cells in such an assembly are concentric. Apparatus and methods for achieving such symmetry are described in detail below with reference to FIGS. 8 and 9. Circumferential passages 95 include the first
6 is useful in conjunction with the device shown in FIG.

Holes 30-34 and 10-12 serve to bond cells 85, 86 and 87 together with adhesive pin bonding techniques, ie to form a fixed assembly unit of cells. As shown in FIG. 1, holes 31, 33 and 35 are aligned with dowel pins 10-12. This adaptation can be achieved, for example, by dowel pins 1 screwed into threaded holes 31, 33 and 35.
This can be done by providing a male thread at 0-12. Holes passing through cells 86 and 87
When the cell 85 is stacked on the cell 85, it is arranged so as to receive the mating bins ○ to 12 that protrude from the top surface of the cell.

Adhesive (not shown) is then filled between the dowel pins 10, 2 and the corresponding holes in the cells 86 and 87 to effect the adhesive bonding of the cells 85, 86 and 87. This technique is described more fully below with reference to FIG.

FIG. 2A shows one embodiment of a bending forest structure according to the present invention.

The deflection mechanism 22 is integral with the inner wall of the lens cell 85. A lens seat 29 extends radially inwardly from the flexure mechanism 22 and is attached thereto. Lens seat 29 has a trough 38 formed therein, which serves as an adhesive receptacle and defines a particular adhesive layer thickness as described below with reference to FIG.

The deflection mechanism 22 is formed, for example, by wire emission machining or milling a slot 42 in the wall of the lens 85. Such slot 42 is located radially at a depth "d" within the inner wall of lens cell 85. Slot 42 begins at one end of lens seat 29 and traces an arc of length "a" around the center of lens cell 85.

The width of the single-piece deflection mechanism 22 is indicated by "W".

FIG. 2B shows the manner in which lens 36 is coupled to deflection mechanism 22. FIG. Adhesive, such as EC183 commercially available from 3M Company.
8 is filled into the trough to bond the lens 36 to the lens seat 29.

The trough has dimensions that define an adhesive layer of cement that withstands the stresses created during temperature excursions as described below.

These adhesives are filled into the trough so that when the lens 36 is glued to the seat 29, excess adhesive does not spill out of the seat 29 and form a fillet. Care should therefore be taken that the radius of curvature of the seat surface 39 can be matched to the radius of curvature of the lens 36 to be glued. For large radius lenses, the match between the radius of curvature of the lens 36 and the seat surface 39 is less critical and is machined to have a constant angle with the center of the adhesive layer forming a tangent to the lens curvature. can do.

Lens 36 is bonded to lens cell 85 in the following manner. Adhesive 40 is placed in trough 38 of seat 29. This operation is performed for each of the deflection mechanisms 22 of FIG.

Lens 36 is then placed within the cell and pressed against lens seat 29 such that excess adhesive 40 is forced radially outwardly between lens 36 and seat surface 39 from trough 38 . Lens 36 is aligned by any conventional method so that the outer circumference of lens 36 is substantially concentric with the inner circumference of lens cell 85. This assembly is carried out at ambient reference temperature, preferably at the temperature at which the assembly is operated.

Next, with reference to FIGS. 2A and 2B, the deflection mechanism 22
Explain the operation. As the ambient temperature cycle increases and decreases, the relative diameter of lens cell 85 and the diameter of lens 36 change. As an example, if the expansion coefficient of lens cell 85 is
Consider the case where the value is significantly larger than that of . When the temperature rises from the reference temperature, the lens cell 85 expands and the inner diameter of the lens cell 85 increases. At the same time, the lens 36 and thus its outer diameter increases, but not to the same extent as the lens cell 85. In prior art configurations where there is no deflection mechanism, the lens undergoes relative movement with respect to the lens seat, which in turn creates stresses that can cause the adhesive bond to shift or break. In the embodiment of the invention shown in FIGS. 2A and 2B, lens seat 29 remains in a substantially fixed position relative to lens 36. As the inner diameter of the lens cell 85 expands away from the lens 36, the arm 25 of the deflection mechanism 22 is bent. That is, the arm 25 moves such that the slot width f of the deflection mechanism increases. Once the temperature has decreased and stabilized at the reference temperature, the deflection mechanism 22 returns to its initial configuration and the lens 36 remains in its initial position, centered within the lens cell 22. At any time, the deflection arm 25
, lens 26 or adhesive layer 40 do not reach the allowable stress limits of their respective materials.

Conversely, when the ambient temperature falls below the reference temperature, the diameter of the lens cell 85 contracts, and the lens 36 also contracts;
However, the degree of shrinkage is smaller than that of the lens cell 85. Accordingly, the flexure mechanism arm 25 bends such that the flexure mechanism slot width f is reduced. As with increasing temperature, lens seat 29 maintains its three-dimensional orientation with respect to lens 36 and the integrity of adhesive layer 40 is maintained.

When the temperature thus returns to the reference temperature, lens 36 assumes the same orientation relative to lens cell 85 as it was fabricated.

When the deflection mechanism moves, a small screw stress is generated in the adhesive layer 4o, as shown by arrow 43. The adhesive layer 4o has a sufficiently large area that it cannot be deformed or destroyed by this stress. Furthermore, the shape and position of the adhesive layer 4o should not cause distortion of the transmitted wavefront near the 471 section.

FIG. 3 shows an alternative embodiment of the deflection mechanism of FIGS. 2A and 2B. In the embodiment of FIG. 3, the flexible arms 25 have widths W1 and W2 of 29. Wl is a flexible arm 25 formed in the manner described with reference to FIG. 2A;
The width is

However, W2 has a narrower width than Wl and is formed, for example, by cutting the narrow section 41 of the flexible arm 25. The narrow section 41 of the flexible arm 25 extends from the edge of the lens seat 29 by a distance "a#" of the flexible arm 25.
extends along the longitudinal direction. The purpose of this narrow section 41 is to further reduce the stresses experienced by the adhesive layer 40 shown in Figure 2B. / Mesel 22 is lens 36
When expanded relative to the flexible arm 25, the flexible arm 25 bends and a slight torsional stress is generated in the adhesive layer 4o of the seat 39.

This stress is the same as that shown by arrow 43 in Figure 2B.゛Narrow section 41 of the flexible arm 25 in Fig. 3
The method reduces the shear stress by rotating the section of the flexible arm 25 that has the lens seat 29 relative to the portion of the flexible arm 25 excluding the section, and thus reduces the bending stress of the flexible arm 25 in the axial direction. Rigidity is maintained and substantially the orientation of lens 36 relative to seating surface 39 is maintained.

In FIG. 4, another embodiment of the deflection mechanism is shown in cross section. This deflection mechanism 52 is manufactured, for example, as follows. First, on either side of the lens seat 29, a radial slot with a distance t1 is machined in the wall of the lens cell 85. Such radial slots are shown in illustration. Then 29 axial slots 4
8 and 50 are provided. One axial slot 50 is provided centrally between the inner diameter of the lens cell 85 and the end face of the radial slot 44 .

This axial slot starts from the bottom of the lens cell 85 and
It runs parallel to the inner diameter of the lens cell 85 and extends within a distance t2 from the top surface of the lens cell. Second
The axial slot is parallel to the first slot and starts from the end of the radial slot 44 and the top surface of the lens cell and extends to within a distance t3 from the bottom of the lens cell.

The operation of the deflection mechanism 52 in FIG. 4 is similar to that shown in FIGS. 2A and 2B.
The operation is the same as that described with respect to the deflection mechanism 22 in the figure. When the ambient temperature changes, the deflection mechanism 52 causes the lens 36 to
and move inwardly or outwardly with respect to lens cell 2Q to compensate for the different coefficients of thermal expansion of lens cell 20. In this manner, when the lens cell/lens assembly returns to the predetermined reference temperature following a temperature excursion, no change occurs in the orientation of the lens 36 relative to the lens seat surface 39.

5A-5C, another embodiment of the deflection mechanism 22 according to the present invention is shown. In this embodiment, a circumferential bulge 45 is formed between the flexible arm 25 and the outer periphery of the lens 36.

A protruding run P37 may be provided to maintain a gap between the lens 36 and the inner circumference of the lens cell 85. Fifth
Figure B shows a cross-sectional view of the flexible arm 25 without the protruding run r shown in Figure 5A. To adhere the lens 36 to the flexible arm 25, the lens is held adjacent the hole 35 in the flexible arm in any conventional manner. Next, the socket 43
Insert an injector (not shown) into the lens and place thixotropic or viscous cement between the lens 36 and the flexible arm 25. Inject through the hole 35 so that a hollow part is formed.

A similar procedure is followed when a protruding run P37 is provided, as shown in FIG. 5C. The thixotropic cement injected through the hole 35 forms a bond 45 between the protruding land 37 and the lens 36. 271 part 4
It will be obvious to those skilled in the art that the thickness shown as "b" in FIG. 5B is defined by the gap between the lens 36 and the flexure arm 25 in FIG. That's true.

The operation of the deflection mechanism 22 in FIGS. 5B and 5C is similar to that in the second
The operation described with respect to the deflection mechanism 22 of Figures A and 2B is the same.

It should be noted that the bond portion 45 in the flexure mechanism 22 of FIGS. 5B and 5C is subjected to tensile and compressive forces, respectively, during temperature excursions above and below the reference temperature. This is based on the fact that as the temperature rises above the reference point, lens cell 85 expands to a greater distance than lens 36. As described above with reference to FIGS. 2A and 2B, the flexible arm 25 is connected to the lens 36.
Bend to maintain 271 part 45 against. However, this bending is incomplete and a small amount of tensile force is 27
1 section 45. Conversely, when the ambient temperature falls below the reference temperature, the diameter of lens cell 85 contracts, and at the same time lens 36 also contracts relatively slightly. Therefore, the degree of shrinkage is introduced into the cement send section 45. If the temperature either increases or decreases, the stiffness of the lens 36 relative to the lens cell 85 in the axial direction is maintained.

Next, an apparatus and method for machining the precision surface and outer peripheral surface of a lens cell will be described with reference to FIGS. 6 to 9.

FIG. 6 shows the lens 36 and lens cell 2 during processing.
A vacuum chuck 54 useful in the present invention for holding zero is shown. The processing is performed by attaching the lens 36 to the lens cell 20 in the above format.
It will be implemented after being incorporated into.

Vacuum chuck 54 has a bottom 60 that is attached to the spindle of a lathe, not shown.

Advantageously, the lathe spindle is supported by an air pair 1J7. The cylindrical riser tube 58 is the vacuum chuck 5
4 and arranged about a rotational axis 64. The chuck seat 56 is located at the top of the riser pipe 58.

FIG. 7 shows the interaction between retained lens 36 and vacuum chuck 54. FIG. For clarity, FIG. 7 shows only the lens 36 and omits the lens cell in which the lens is mounted.

Lens 36 has 29 surfaces 55 and 57, each having a radius of curvature R1 and R2, respectively. In order to facilitate seating and positioning of the lens 36 on the vacuum chuck 54, the chuck seat 56 is machined to have the same radius of curvature R1 as the lens surface 55. In this way, the lens surface 55 of the lens 36 and the chuck seat 56 are aligned with each other. This configuration minimizes the Hertzian seating stress of the lens 36 while ensuring coordinate locations for processing the lens cells as described below with reference to FIG. 9.

As shown in Figure 7, Ren! 36 is not a plane. Therefore, the center of curvature of the chuck seat 56 should be machined so that it is on the rotational axis of the vacuum chuck 54.

By forming the lens surface 55 aligned with the chuck seat 56, the center of the radius of curvature 61 of the lens surface 55 is always located on the rotation axis 64 of the vacuum chuck 54. The alignment of the center of the radius of curvature 63 of the lens surface 57 with respect to the axis of rotation 64 is described below with reference to FIG. If the lens 36 is a flat surface, the chuck seat 56 should be machined to be perpendicular to the rotation axis 64 of the vacuum chamber 54.

To hold the lens 36 and cell 20 unit in the vacuum chuck 54, the passageway 62 is opened by a vacuum device (not shown).
The vacuum value in the riser pipe 53 is increased through the riser pipe 53. Once a low vacuum is achieved, the lens 36 and cell 20 assembly is held against the vacuum chuck 54, but can be rotated axially relative to the vacuum chuck 54. This is explained below with reference to FIG.
Facilitates alignment of the optical axis of the lens 36 with respect to the axis of rotation 64 of the vacuum chuck. - Following alignment, achieve a high vacuum within the vacuum chuck 54 to hold the lens 36 and lens cell 2o assembly during processing of the lens cell 2°, in the manner described below with reference to FIG.

FIG. 8 shows a method of performing alignment of the optical axis of lens 36 with respect to axis of rotation 64 of vacuum chuck 54. FIG.

Chuck 54 is shown attached to lathe spindle 70 by chuck bottom 60. As explained with reference to FIG. 7, the chuck bottom surface 60
8, the riser pipe terminates in a chuck seat 56;
A lens 36 is seated on the chuck seat. A TIR gate 8 is disposed on the surface of the lens 36 on the opposite side of the vacuum chuck 54. As shown in Figure 8,
The optical axis 66 of the lens 36 is the rotation axis 64 of the vacuum chuck 54.
If not, the runout meter detected by gauge 68 will indicate a non-zero value. Lens 36 can then be moved relative to chuck seat 56 until gauge reader 69 indicates a minimum acceptable runout. In this state, the optical axis of the lens 36 is the spin pull rotation axis 64, as shown in FIG.
In turn, it is located on the vacuum chuck 54.

FIG. 9 also shows a node 74, e.g. - a diamond r point node and a node controller 76. If the axis of rotation of the chuck 54 coincides with the optical axis 66 of the lens 36, the apex 79 of the lens 36 is located on the axis of rotation 64 of the vacuum chuck 54, as can be easily understood by those skilled in the art. Lens 360 curvature radius is chuck seat 56
Since the apex 79 of the blade/i36 is aligned with the radius of curvature of and is located on the rotation axis 64 of the vacuum chuck 54, the position of the apex 79 with respect to the vacuum chuck 54 can be accurately recognized.

At that time, the vertex 79 is (0, 0, 0
) position.

In this way, all surfaces on the cell 20 are covered by the lens 3.
6 and the optical axis 66 can be precisely processed.

1 and 9, it is obvious that the outer periphery 33 of the lens cell 20 can be processed concentrically around the optical axis 66 of the lens 36. Additionally, precision machined surfaces 13-18 can be machined perpendicular to the optical axis of lens 36 and precisely positioned relative to apex 79 of lens 36. All of the lens cells in the lens cell assembly have outer diameters machined to their common dimensions. Thus, when the lens cells are stacked in the manner described with reference to Figure 1Q, the circumferences of all lens cells are concentric to ensure a common optical axis for the lenses in the assembly. The distance from the lens vertex to the cell surface perpendicular to the optical axis of the lens ensures the optical distance when the lens cells are stacked and fixed to each other.

FIG. 10 shows lens assembly 94. FIG. lens cell 8
The wavefronts 0-92 stacked on top of each other and oriented to be transmitted therethrough can be adjusted in the manner described below with reference to FIG. In summary, the optical properties of the wavefront can be changed by rotating, translating, or axially moving any one of the lens cells in lens assembly 94 relative to the other cells. Any one of the Lenz cells can be moved axially relative to other lens cells in the lens assembly to correct spherical aberration. This correction can be accomplished by changing the thickness of shim 104 or by using the apparatus shown in FIGS. 18 and 19.

Comatic aberration can be corrected by translating any one of the lens cells relative to other lens cells in the lens assembly as described below with reference to FIG. 16. Additionally, astigmatism can be corrected by rotating any one of the lens cells relative to the other cells.

As one example, FIG. 1O shows thirteen cells connected together. However, it is obvious that the cell-to-cell alignment and merging methods described herein are applicable to any number of cells. Cells 80-92 are then bonded together using, for example, dowel pins 102, plastic adhesive 100, and internal cell seals. Figures 14 and 15 illustrate an apparatus useful for holding lens cells in their desired relative positions during the bonding process.

As can be seen from FIG. 10, the lens assembly 94 is divided into individual groups, e.g.
5.85-87.87-89 and 89-91 assemblies. Lens assembly 94 is connected to bottom lens cell 8o.
and a cap lens cell 92, between which a group of lens cells is arranged. It should be understood that a group of lens cells can be comprised of any desired number of lens cells that is a multiple of two.

Each group of lens cells has an anchor lens cell, e.g. 85, individual lens cells or cells, e.g. 86, and a top lens cell, e.g. 87. The top lens cell in one group is stacked with another group on top of it.
Serves as an anchor lens cell. For example, lens cell 87 serves as the top lens cell of groups 85-87 and
Serves as an anchor lens cell for 7 to 89 cells. As described above with reference to FIG. 1, 29 or more dowel pins 1
02 is fixed within each anchor cell, eg 85, and extends through any number of cells and the top cell in the group.

Pins 96 and 106 are shown to be conical. The conical shape of the pins 96 and 106 corresponds to the cells 81 to 9.
1 to allow them to be removed from their respective adhesive layers while maintaining a unique alignment with respect to the remainder. This allows the bottom lens cell 92 and cap lens cell 80 to be easily removed so that they are not damaged during assembly, shipping, or use.

FIG. 11 illustrates an apparatus useful in performing optical alignment of lens assembly 9 of FIG. 10. In this case, the lens assembly 94 is placed in a precision square block 108, which will be described in more detail with reference to FIG. 12 below.

The precision square block is made of a dimensionally stable material, such as granite, and has 29 faces 120 and 122 forming an angle θ that is maintained over its entire length. V-shaped block 10
The surfaces 120 and 122 of 8.29 are formed such that the tangent between the outer periphery of each cell in the assembly 94 and the surfaces 120 and 122 is a single line.

Returning now to FIG. 11, the assembly 94 is placed in contact with the 29 faces 120 and 122 of the V-block 108 and is then placed in the assembled position 114, as indicated by dotted lines 110 and 111, as shown. Transported by equipment that does not. ■Shape block 108 is flange 1
12 and 113 in the assembled position 114.

The lens assembly 94 rests on a floating mount 118 spaced apart from the square block 1.8. The floating mount 118 has a V-shaped block surface 120
and 122 such that the outer periphery of the lens cells within the lens assembly 94 aligns exactly with the surfaces 12o and 122.
can be brought into contact with. In this way, the v-shaped block 108 due to the stress on the lens assembly 94
distortion does not occur, and thus the optical axis of lens assembly 94 is held parallel to the longitudinal axis of V-shaped block 108.

FIG. 13 shows the floating mount 118 of FIG. 11 in cross-section. Float 130 is supported by base 132. Support surface 148 via machined passageway 140
Pressurized air is introduced into a passageway 142 communicating with. Support surface 148 supports journal surface 146 on float 130
It is machined to have the same radius of curvature.

Air inlet passageway 140 thus forms a layer between journal surface 148 and support surface 146.

A plurality of passageways 144 are provided that extend through the float to openings in a similar plurality of passageways 136 formed in the top surface of the float 130. Some of the air entering passageway 140 passes through passageway 144 and opening 134 to passageway 136 . In this way, the float 130
A layer of air is formed between the top surface of the lens assembly and the bottom cell of a lens assembly (not shown) that locks onto the float. Accordingly, the lens assembly floats on the floating mount 118 and can be moved laterally and tilted without friction.

A lens assembly held within a V-shaped block 108, such as that shown in FIG. 11, may be used to inspect the nine-wave darkness oriented therethrough. A passageway is provided through the center of the floating mount that is concentric with a passageway 124 provided through the bottom surface 116. In this manner, light beams may be transmitted through lens assembly 94, floating mount 118, and bottom surface 116 to provide a path for light beams used to inspect lens assembly 94 during assembly. Although not shown, the inspection device may e.g.
It may also be an interferometer placed directly below. In this way, compliance with the anti-optical design of the lens assembly can be tested in the wavefront. Corrections may be made by changing the thickness of the shims 104 between any of the cells in the assembly 94, rotating any one of the cells relative to the other, and rotating any one of the cells in FIGS. 16 and 17, respectively, as necessary. By using the apparatus and method described below with reference to
This can be done by axial, rotational or translational movement of any lens cell.

As explained with reference to FIG. 9, all of the cells in the assembly have the same outer diameter and the outer circumference of each cell is concentric about the optical axis of the lens housed in it. It is processed into.

Therefore, in order to align all the optical axes of the lenses, it is important to apply sufficient force to each lens cell to bring it into just contact with both sides 120 and 122 of the block. be.

FIG. 16 illustrates an apparatus useful for holding lens cells in a lens assembly in their proper relative positions during initial alignment and testing. As shown in FIG. 1o, lens cells 80-92 have circumferential passages 95 within their outer peripheries. The lens assembly 94 is moved to the assembly position 114.
After installation, it may be necessary to translate the optical axis of one lens relative to the other to achieve anti-optical design requirements.

Rails 159 and 160 extend from the base 116 of the assembly station to the top surface of the square block 108. Clamp support mechanisms 157 and 158 are provided for each rail 159 and 160, respectively. These clamps support rails 159 and 160 in a vertically slidable manner and are positioned by knurled screws, respectively. The ends of each clamp support mechanism 157 and 158 are provided with mini-translation stages 163 and 164, respectively, each translation stage being movable in translation by the use of screws 165 and 166, respectively. Each mini-translation stage 163 and 164 is provided with a bayonet 161 and 162, respectively, which extends through the circumferential passage 95 of the individual cell.
is engaged with. Node yonet 161 between lens assembly 94 and ■-shaped block surfaces 118 and 120, respectively.
Tips 172 and 173 are tapered to facilitate sliding of tips 172 and 162.

The cell translation device of FIG. 16 operates as follows. Any lens cell is brought into contact with the 29 faces 118 and 120 of the ■-shaped block 108 by a rubber barb acting within the circumferential passage 95 of the Lenz cell. screws 165 and 166
cradle 1 by selectively screwing or loosening the
63 and 164 and Nonoyonet 161 and 162
moves between the cell and the square block faces 118 and 120. With this operation, the cell becomes block plane 118 and 1
It will keep you away from 20.

Since the other cells are still held in contact with the square block faces 118 and 120, the optical axis of the cell being moved is translated relative to the optical axis of the other cells.

Each individual cell has screws 169 and 17, respectively, at the husband's ends.
It is held in a desired relative position with respect to another cell by an elastic ζ node 1 held fixedly in blocks 167 and 168 by 0. Blocks 167 and 168 are installed at assembly station 114.

In FIG. 17, a selective lens translation technique is shown,
In this case, a lens cell insertion member 175 having a tapered outer periphery 179 fits within the lens cell 180 . The lens cell insert 175 has three lenses 185 mounted therein by flexure mechanisms 176, 177 and 178 in the manner described above. Translation is achieved by a screw 184 acting through three holes 181, 182 and 183 to move the lens cell insert 175 and thus the lens 185 in the desired direction. In this manner, the optical axis of lens 185 can be moved relative to the optical axis of other lenses within the lens assembly of which it forms a part. Lens cell insertion member 175
The tapered outer periphery 179 of the lens 1 during translation
Lens cell insertion member 1 that prevents inclination from occurring in 85
Ensures downward force to 75. A lip 179 extends radially inward from lens cell 180 .

The top surface of lip 179 has a precision machined surface 195 that matches a machined surface 196 on the bottom of lens cell insert 175 . Precision machined surfaces 195 and 196 form lens cells 180 and 1 within the lens assembly.
The axial spacing of the lens cell insertion member 175 and thus the lens 185 is determined for the lens cell above or below 80.

An alternative technique for moving individual cells axially relative to each other is illustrated in FIGS. 18 and 19.

FIG. 18 shows a ball 186 placed within a hole 187 on the top surface of the lens cell 2o. The ball 186 has a screw 18
When 8 is pressed, it is lifted. As the ball moves, a second lens cell (not shown) directly above lens cell 20 is pushed upward. /Top surface of Mesel 20 (10
Circumference [3 balls 186 as above, with a spacing of K1200
and a screw 188 device are arranged.

FIG. 19 shows a halving method 190 placed on a tenorized cantilevered arm 192. FIG. As the screw 194 moves into the lens cell 20, it pushes up the chiseled cantilevered arm 192 and the ball 190. A second lens cell (not shown) directly above lens cell 2o has sphere 1
When 90 is moved as described above, it is pushed up. Three such balls 190, arm 192 and screw 1
94 devices are arranged at 1200 spacing around the top surface of the lens cell 20.

The apparatus shown in FIGS. 18 and 19 for axially moving a lens cell can be used to tilt one lens cell and thus one lens relative to another. This objective can be accomplished by moving ball 186 of FIG. 18 or ball 190 of FIG. 19 more or less than the other 29 balls in the device.

After suitably adjusting the lens assembly 94 to obtain the desired wavefront, the unit structure is formed.
Glue the lens cells within lens assembly 94. It should be noted that to facilitate the gluing process, the lens assembly 94 can be placed at this point and then reassembled cell by cell. This removal and assembly is
This can be done while maintaining the adjusted wavefront.

Referring to FIG.
Plastic p-ring cement (dowl
It is obvious that this can be carried out by injecting cement 100 into the interface between the combining bottle 102 and the cell.

Seals 98 between the cells prevent cement 1oo from leaking and bonding the cells below. For example, the dowel pin 102 is placed in one cell, for example, cell 85, and the dowel pin 102 is placed in one cell, for example, cell 85.
Inside the chimney hole in 5 [Fixed by screwing. The dowel pins then extend through holes in one or more cells 86 and 87 on anchor cell 85. cells 86 and 8
It should be noted that the holes in 7 are coarsely aligned to the dowel 102 prior to fine alignment of the assembly 94 as described with reference to FIG.

By centering three to five cells together in the manner described above, lens assembly 94 can be assembled in groups, such as the group exemplified by cells 85-87. It will be obvious to those skilled in the art that as an option to the above method, 29 or more consecutive mating bins extending through all of the cells 80-92 may be used.

FIG. 14 illustrates an apparatus that is effective for holding cells in a lens assembly in a fixed steric relative position during filling with plastic p-ring cement. Lens assembly 94 is shown in contact with 29 faces 118 and 120 of V-shaped block 108. Spring loaded screws 150 contact individual cells within multi-lens assembly 94 by being moved relative to a screw block 152 secured to assembly station 114 in FIG. This type eliminates asymmetrical forces that occur during cement hardening that tend to decenter the lens axis from the ■-shaped block axis.

FIG. 15 shows one improved embodiment of the apparatus of FIG.
54 is installed.

Described herein is a mounting apparatus for an optical element that mounts the optical element to a unit assembly. Such an assembly is not susceptible to large temperature excursions and can be assembled quickly, easily and precisely.

Although the invention has been illustrated and described with reference to preferred embodiments thereof, it will be readily apparent to those skilled in the art that changes may be made in form and detail without departing from the scope and spirit of the invention. It is to be done. It is therefore to be understood that the invention may be varied widely within the spirit and scope of the appended claims.

[Brief explanation of the drawing]

FIG. 1 is an exploded perspective view of one group of lens cells constructed in accordance with the present invention, FIG. 2A is a schematic perspective view of one embodiment of a deflection mechanism constructed in accordance with the present invention, and FIG. 2B is a 2A
FIG. 3 is a perspective view of another embodiment of the deflection mechanism of FIG. 2, and FIG. 4 is a partially cutaway view of another embodiment of the deflection mechanism constructed according to the present invention. 5A is a perspective view of another embodiment of a deflection mechanism constructed according to the invention; FIG. 5B is a cross-sectional view of the deflection mechanism of FIG. 5A without the projecting run P; FIG. 5C is a perspective view Outstanding run P
FIG. 6 is a perspective view of a vacuum chuck that is effective in manufacturing a lens cell constructed according to the present invention, and FIG. 7 is a cross-sectional view of the deflection mechanism shown in FIG. 5A. FIG. 8 is a cross-sectional view showing the lens mounted on the chuck; FIG. 8 is a schematic representation of the apparatus useful in aligning the lens cell surface to the lens; FIG. 9 is a cross-sectional view showing the lens mounted on the chuck; Schematic diagram of the apparatus of Figure 8, 1st
0 is a partially sectioned side view of the lens assembly; FIG. 11 is a perspective view of an apparatus useful in aligning the lens assembly of FIG. 10; and FIG. 12 is a V-shape useful with the apparatus of FIG. 11. 13 is a schematic cross-sectional view of the floating mount used in the apparatus of FIG. 11; FIG. 14 is a top view of the block; FIG. 14 is a schematic cross-sectional view of the floating mount used in the apparatus of FIG. 11; FIG. Plan view showing the device used, No. 15
The figures are a plan view showing another embodiment of the apparatus of FIG. 14;
10 is a schematic diagram showing the method of performing the translation of the individual cells in the assembly of FIG. 10; FIG. 17 is a schematic diagram showing the method of performing the translation of the individual cells in the assembly of FIG. 1Q. FIG. 18 is a schematic diagram showing an operating method for performing an axial movement between cells, and FIG. 19 is a schematic diagram showing an operating method for implementing an axial movement between cells. . 10... Combined bottle, 13-18... Precision machined surface,
2Q... Lens cell, 22-24... Deflection mechanism,
25... Deflection arm, 29... Lens seat, 35...
...Outer circumference of lens cell, 36...Lens, 37...
Protruding run rX3a...trough, 4Q...adhesive layer,
41... Narrow width section, 52... Deflection mechanism, 54...
・Vacuum chuck, 81-91...Lens cell, 94・
...Lens assembly. FIG, / FIG, 2A FIG,?

Claims (1)

[Claims] 1. A precision lens mounting assembly, comprising a plurality of lens cells, a plurality of lenses corresponding to the plurality of lens cells, and the lens cell having an inner surface, an outer surface, a top surface, and a bottom surface. and a deflection mechanism is disposed within an inner periphery of each of the plurality of lens cells to hold each lens in a predetermined three-dimensional relative position with respect to the inner surface, top surface, and bottom surface at a reference temperature. The deflection mechanism returns each lens to its fixed three-dimensional relative position according to a temperature excursion away from the reference temperature and back to that temperature, and the outer diameters of the plurality of lens cells are aligned with each other. substantially equal to and substantially concentric with respect to the optical axis of their respective individual lenses, and the top and bottom surfaces of each lens cell are substantially perpendicular to the optical axis of said respective lenses; A precision lens mounting assembly having three precision surfaces disposed on a plane, the plurality of lens cells forming a stack of lens cells substantially in contact with the precision surfaces. 2. The stack of lens cells comprises a bottom lens cell, a cap lens cell, and one or more groups of lens cells disposed between the bottom lens cell and the cap lens cell. Precision lens mounting assembly as described in section. 3. The precision lens mounting assembly of claim 2, further comprising a retaining device for holding the stack of lens cells in substantial contact with the precision surface. 4. The retaining device comprises: one or more groups of lens cells consisting of an anchor lens cell, one or more individual lens cells and a top lens cell; and at least two dowel pins fixed to the top surface of the anchor lens cell. said one or more individual lens cells have a through hole for receiving said dowel pin, said top lens cell has a through hole for receiving said dowel pin, said top lens cell has a top surface thereof at least two dowel pins fixed for fixing the next group of individual lens cells, said dowel pins having an outer diameter smaller than the inner diameter of the hole, and said dowel pins and said dowel pins fixed for fixing the next group of individual lens cells; A precision lens according to claim 3, wherein an adhesive is disposed between the cell and the hole passing through the top lens cell, and a seal is provided to prevent the adhesive from spilling out of the hole. mounting assembly. 5. An anchor lens cell in the stack of lens cells has at least two bottom conical dowel pins fixed to its bottom surface, and the bottom lens cell has a through hole for receiving the bottom conical dowel pins. and in a top group of lens cells, an upper lens cell of the top group has at least two upper conical dowel pins fixed to its upper surface, and the cap lens cell has a through-hole for receiving the conical dowel pins. a hole, the top and bottom conical dowel pins having an outer diameter smaller than the inner diameter of the hole, and a hole passing through the cap lens cell and the bottom lens cell, respectively, with the top and bottom conical dowel pins; 5. The precision lens mounting assembly of claim 4, wherein an adhesive is disposed therebetween, and a seal to prevent said adhesive from spilling out of the hole. 6. The precision lens mounting assembly of claim 1, further comprising a distance adjustment device for adjusting the axial distance between any of the lens cells. 7. A lens cell translation device, comprising: a stack of a plurality of lens cells; a precision V-shaped block having two flat surfaces arranged at an angle to each other; and for said stack of lens cells or two flat surfaces; a device for holding the stack of lens cells in contact with said two surfaces without creating any stress; and at least one pair of bayonet, said bayonet pair holding any one of said lens cells,
adjustably inserted between any one of the stack of lens cells and two faces of the V-shaped block for radial movement within the stack of lens cells relative to other lenses; A lens cell translation device characterized by: 8. A precision lens mounting device, comprising a lens insertion member having an inner surface, a tapered outer surface, a top surface, and a precision-processed bottom surface; and a deflection mechanism disposed within the inner diameter of the lens cell insertion member for holding the lens in a predetermined three-dimensional relative position with respect to the bottom surface, and the deflection mechanism moves the lens from a temperature from the reference temperature. a lens cell having an inner surface, an outer surface, a top surface, and a bottom surface, the lens cell having at least three threaded holes extending from the top surface to the bottom surface; , having three threads corresponding to the three threaded holes in the lens cell, having a precision machined surface extending radially inward from an inner surface of the lens cell, and tapering the lens cell insert; A precision lens mounting device characterized in that the outer diameter of the lens cell is smaller than the inner diameter of the lens cell, and the precision-machined bottom surface of the lens cell insertion member is engaged with the precision-machined surface of the lens cell. . 9. The distance adjusting device comprises a shim, the shim having a precision top surface substantially in contact with the bottom surface of the first any of the lens cells and substantially contacting the top surface of the second any of the lens cells. 7. A precision lens mounting assembly as claimed in claim 6, having a contacting precision bottom surface. 10. The distance adjustment device includes: at least three threaded holes extending radially inward from an outer surface of any of the lens cells; and at least three tapered threads extending into the threaded holes; an axial mover disposed on a surface, the tapered screw being radially translatable within a threaded hole for opposing the axial mover, the axial mover comprising: 7. The precision lens mounting assembly of claim 6, wherein movement of the tapered thread radially inward causes axial movement. 11. The axially movable device consists of a ball disposed in a through hole, the through hole intersects a tapered hole, and the ball locks on a tapered screw. Precision lens mounting assembly according to item 10. 12. The movable device has a top surface and a tapered bottom surface;
a tapered cantilever beam having a free end surface and a fixed end surface, the tapered cantilever beam being substantially coplanar with the top surface of the lens cell, and the tapered bottom surface being radially from the screw hole. a fixed end of the tapered cantilever beam is substantially in contact with an inwardly extending tapered thread, the tapered beam being radially outward from the inner surface of the lens cell; 11. The precision lens mounting assembly of claim 10, wherein the precision lens mounting assembly extends in a direction and has a hemisphere disposed on an upper surface of the tapered cantilever beam. 13. said deflection mechanism has at least three arcuate cantilevered arms integrally molded within said lens cell having a free end and a fixed end, the outer wall of said arm being substantially the same as its inner diameter; in a plane, each of said arcuate cantilever arms having a lens seat spaced apart from said fixed end for supporting an individual lens within a respective lens cell. Precision lens mounting assembly as described in section. 14. said lens seat extends radially inwardly from said lens cell inner surface, said lens seat having a trough within said trough, and an adhesive is disposed within said trough for adhesively retaining said individual lenses; 14. A precision lens mounting assembly according to claim 13, wherein the precision lens mounting assembly is arranged. 15. The precision lens mounting assembly of claim 13, wherein the arched cantilever has a narrow section extending a short distance from the lens seat toward the fixed end. 16. The lens seat extends radially inward from the inner surface of the lens cell, the lens seat having a trough within the trough, and an adhesive within the trough for adhesively retaining the individual lenses. 16. A precision lens mounting assembly according to claim 15, wherein the precision lens mounting assembly is arranged. 17. the flexure mechanism having an articulated flexure integrally molded into each of the lens cells, the articulated flexure from an inner surface of the lens cell connected to the bottom surface of the lens cell; a radially inwardly disposed first arm, the first arm extending axially substantially to a seam in the top surface, and extending from the seam axially to substantially the bottom surface; a second arm having an outer wall coplanar with the inner surface and remote from the seam, a lens seat for supporting the individual lenses in their respective lens cells; 2. A precision lens mounting assembly as claimed in claim 1, extending radially inwardly from the arm of the claim 1. 18. A precision lens according to claim 17, wherein the lens seat has a trough within the trough, and an adhesive is disposed within the trough to adhesively hold the individual lenses. mounting assembly. 19. said deflection mechanism has at least three arcuate cantilevered arms integrally molded within said lens cell having a free end and a fixed end, the outer wall of said arm substantially interfacing with said inner surface; in the same plane, each of said arcuate cantilever arms having a through hole at a position remote from its fixed end, said lens cell being in a radial direction corresponding to the hole of each of said arcuate cantilever arms; an adhesive is disposed between the arched cantilever arm and the outer periphery of the individual lens for adhesively retaining the individual lenses, the adhesive substantially retaining the individual lenses; A precision lens mounting assembly according to claim 1, wherein the precision lens mounting assembly is disposed in a hole in an arcuate cantilever arm. 20. The arched cantilever arm has a protruding land integrally molded thereon, the protruding land protruding radially inwardly from the arched cantilever arm to a position away from a fixed end thereof; 20. The precision lens mounting assembly of claim 19, wherein a hole extends through the raised land and an adhesive is disposed between the raised land and the lens. 21. A precision lens mounting device, wherein a lens cell has an inner surface, an outer surface, a top surface, and a bottom surface, and a lens, and the lens is mounted at a predetermined three-dimensional relative position with respect to the inner surface, top surface, and bottom surface at a reference temperature. A deflection mechanism is disposed within an inner surface of the lens cell to hold the lens in position, and as the deflection mechanism moves away from and then returns to the reference temperature, the lens is moved relative to the fixed three-dimensional relative. A precision lens mounting device that is characterized by its ability to return to position. 22, said deflection mechanism having at least three arcuate cantilevered arms integrally molded within said lens cell having a free end and a fixed end, the outer walls of said arms being substantially in contact with said inner surface; Claim 2 Coplanar and wherein each of said arcuate cantilevered arms has a lens seat remote from said fixed end for securing an individual lens to a respective lens cell.
Precision lens mounting device according to item 1. 23. said lens seat extending radially inward from said lens cell inner surface, said lens seat having a trough within said trough, and said lens seat having a trough within said trough for adhesively retaining said individual lenses; 23. A precision lens mounting device as claimed in claim 22, wherein the lens mounting agent is disposed with a lens. 24. The precision lens mounting apparatus of claim 23, wherein said arcuate cantilever arm has a narrow section extending a short distance from said lens seat toward said fixed end. 25. The deflection mechanism has an articulated flexible portion integrally molded within the lens cell, and the articulated flexible portion is connected to the inner diameter of the lens cell at the bottom surface of the lens cell. a first arm disposed radially inwardly from the top surface, the first arm extending axially from the connecting portion substantially to the connecting portion of the upper surface; A second arm extending to a bottom surface has an outer wall coplanar with the inner diameter and is spaced apart from the connection and extends radially from the second arm for securing the lens to the lens cell. Claim 21, wherein the lens seat extends inward.
Precision lens mounting device as described in section. 26. The precision lens of claim 25, wherein the lens seat has a trough within the trough, and an adhesive is disposed within the trough to adhesively hold the individual lenses. Mounting device. 27, said deflection mechanism having at least three arcuate cantilevered arms integrally molded within said lens cell, having a free end and a fixed end, the outer wall of said arm substantially interfacing with said inner surface; coplanar, each of said arcuate cantilever arms having a through hole at a position remote from its fixed end, and said lens cell is in a radial direction corresponding to the hole of each of said arcuate cantilever arms; an adhesive is disposed between the arched cantilever arm and the outer periphery of the individual lens for adhesively retaining the individual lenses, the adhesive substantially retaining the individual lenses; 22. The precision lens mounting device of claim 21, wherein the precision lens mounting device is disposed in a hole in an arcuate cantilever arm. 28. said arched cantilever arm has a protruding land integrally molded therewith, said protruding land projecting radially inwardly from said arched cantilever arm to a position away from a fixed end thereof; 28. The precision lens mounting device of claim 27, wherein a hole extends through the projecting land, and an adhesive is disposed between the projecting land and the lens. 29. A method of manufacturing a precision lens mounting assembly, comprising: providing a lens cell having a substantially annular configuration, a top surface, a bottom surface and an outer surface; mounting a lens on an inner diameter of the lens cell; attached to a vacuum chuck having a seat aligned with the radius of the lens in contact with the cell; a TIR placed above the lens, away from the vacuum chuck and radially outward from the rotation axis of the vacuum chuck; rotate the lens, move the lens relative to the vacuum chuck until the runout gauge becomes substantially zero, and process the outer diameter so that it is substantially concentric with the rotation axis of the vacuum chuck. and three or more surfaces of each of the top and bottom surfaces such that the precision surfaces are in a plane perpendicular to the axis of rotation of the vacuum chuck and at spaced relative positions to the apex of the lens. Processing, stacking a plurality of lens cells thus processed, bringing the plurality of lens cells into contact with two surfaces of a precision V-shaped block, inspecting the wavefront transmitted through the plurality of lenses, and detecting any of the lens cells. A method for making a precision lens cell assembly, characterized in that one is corrected by axial movement, rotation or translation, and the lens cells are fixed together to form a unit assembly. 30, securing the lens cells together into a unit assembly includes: providing a bottom lens cell; providing a top lens cell; providing one or more groups of lens cells;
30. A method of making a precision lens cell assembly as claimed in claim 29, comprising bonding three or more groups between the bottom lens cell and the top lens cell. 31. The process of manufacturing one or more groups of lens cells includes preparing an anchor lens cell, preparing two or more dowel pins, fixing the two or more dowel pins to the top surface of the anchor lens cell, and performing the above alignment. providing one or more individual cells having through-holes of a larger diameter than the dowel pins for receiving pins, the through-holes for receiving said dowel pins for securing the next group of individual lens cells; providing a top lens cell having at least two dowel pins fixed to its upper surface; disposing an adhesive between the dowel pins and the holes passing through the individual lens cells and the top lens cell; 31. The method of claim 30, wherein sealing is provided to prevent the adhesive from spilling out. 32. A method of manufacturing a precision lens cell, comprising providing a lens cell having a substantially annular configuration, a top surface, a bottom surface and an outer surface, mounting a lens on the inner surface of the lens cell, and combining the lens with the lens cell. attached to a vacuum chuck having a seat that is in contact with and aligned with the radius of the lens, a TIR is placed above the lens, away from the vacuum chuck and radially outward from the rotation axis of the vacuum chuck, and the vacuum chuck is rotated. moving the lens relative to the vacuum chuck until the runout gauge becomes substantially zero, and machining the outer surface to be substantially concentric with the rotational axis of the vacuum chuck; Machining three or more surfaces on each of the top and bottom surfaces such that the precision surfaces are in a plane perpendicular to the axis of rotation of the vacuum chuck and spaced relative to the apex of the lens. A manufacturing method for precision lens cells featuring: