JPS63201327U - - Google Patents
Info
- Publication number
- JPS63201327U JPS63201327U JP9276387U JP9276387U JPS63201327U JP S63201327 U JPS63201327 U JP S63201327U JP 9276387 U JP9276387 U JP 9276387U JP 9276387 U JP9276387 U JP 9276387U JP S63201327 U JPS63201327 U JP S63201327U
- Authority
- JP
- Japan
- Prior art keywords
- developing
- cup
- wafer
- spin chuck
- pure water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9276387U JPH0539623Y2 (https=) | 1987-06-18 | 1987-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9276387U JPH0539623Y2 (https=) | 1987-06-18 | 1987-06-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63201327U true JPS63201327U (https=) | 1988-12-26 |
| JPH0539623Y2 JPH0539623Y2 (https=) | 1993-10-07 |
Family
ID=30954760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9276387U Expired - Lifetime JPH0539623Y2 (https=) | 1987-06-18 | 1987-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0539623Y2 (https=) |
-
1987
- 1987-06-18 JP JP9276387U patent/JPH0539623Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0539623Y2 (https=) | 1993-10-07 |