JPS63200333U - - Google Patents

Info

Publication number
JPS63200333U
JPS63200333U JP9068887U JP9068887U JPS63200333U JP S63200333 U JPS63200333 U JP S63200333U JP 9068887 U JP9068887 U JP 9068887U JP 9068887 U JP9068887 U JP 9068887U JP S63200333 U JPS63200333 U JP S63200333U
Authority
JP
Japan
Prior art keywords
liquid reservoir
wafer
reservoir ring
developer
pure water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9068887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9068887U priority Critical patent/JPS63200333U/ja
Publication of JPS63200333U publication Critical patent/JPS63200333U/ja
Pending legal-status Critical Current

Links

JP9068887U 1987-06-15 1987-06-15 Pending JPS63200333U (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9068887U JPS63200333U (https=) 1987-06-15 1987-06-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9068887U JPS63200333U (https=) 1987-06-15 1987-06-15

Publications (1)

Publication Number Publication Date
JPS63200333U true JPS63200333U (https=) 1988-12-23

Family

ID=30950783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9068887U Pending JPS63200333U (https=) 1987-06-15 1987-06-15

Country Status (1)

Country Link
JP (1) JPS63200333U (https=)

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