JPS63200960A - Wire-saw machine - Google Patents

Abstract

PURPOSE:To standardize the tension of a ire as well as to prevent wire breaking or the like from occurring, by increasing or decreasing each loop in reciprocating passages and giving reciprocating motion to the wire by paired roller units moving at a right angle to respective wire travel lines at each reciprocation. CONSTITUTION:When a first driving machine M1 is driven, each roller of a wire delivery device 10, a wire winding device 11, each guide roller and roller units 130a and 130b and each roller of cutting heads 14 is driven for rotation via timing belts 231, 232 and a chain 29, cutting a work G of a silicon ingot or the like with a travel wire W wrapped at the specified pitch P. Here, when a second driving machine M2 is operated, wheel units 26a, 26b and roller units 130a and 130b are periodically reciprocated via a crank chain 130 and a slider block 131, while loops La and Lb are increased or decreased in the reverse direction to each other and they are overlapped with constant speed of the wire W, giving constant tension to the wire W. Thus, occurrence of any inconvenience such as wire breaking or the like is restrainable.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application] The present invention relates to a wire saw machine used for cutting wafers from silicon ingots, for example.

[Conventional technology]

As this type of wire saw machine, a device as shown in Fig. 2 is conventionally known (for example,
98), which consists of a wire sending means (reel) 10, a reciprocating motion giving means (part of a seesaw roller) 4 that gives small reciprocating motions to the wire W, a cutting head 14, a wire winding means (reel) 11, are the basic components.

The wire route includes an outgoing route from the wire sending means 10 to the cutting rad 14 via the reciprocating row applying means 4, and a wire winding means 11 from the cutting head 14 through the reciprocating row applying means 4.
It consists of a return trip to .

Wire sending means! O feeds the wire W to the reciprocating row applying means 4 at a constant speed, and the wire winding means 11 winds up the wire W sent out from the reciprocating row applying means 4 at a constant speed.

The wire reciprocating motion providing means 4 includes a swinging arm 52 whose intermediate point is pivotally supported on a base body 51, and a group of movable rollers 53 uniaxially supported at both left and right ends of the swinging arm 52. and 53. and fixed roller groups 541 and 542 uniaxially supported by the substrate 51 in correspondence with both roller groups, and the wire W on the outward path is connected to the movable roller group 531 and the fixed roller group 54 . The wire W on the return path is wound between the movable roller group 53. and the fixed roller group 54□.

Then, while feeding the wire at a constant speed, the swinging arm 52
By operating the movable roller group 53 at a constant cycle, the movable roller group 53
．． When the distance between the movable roller group 532 and the fixed roller group 541 repeatedly decreases and expands, the distance between the movable roller group 532 and the fixed roller group 54. The distance between the wire W and the
After leaving the wire reciprocating motion providing means 4 until returning to the wire reciprocating motion providing means 4, the motion is such that reciprocating motion is superimposed on constant speed motion.

The cutting head 14 includes three rollers 140 arranged in a triangular manner.
1-140. The wire W is wound around each roller a required number of times at a small pitch, and the workpiece G is pressed from below against the lower side of the wire W wound in a triangular shape.

This cutting head 14 is located between the exit side and the inlet side of the wire reciprocating motion providing means 4 when viewed from the wire path, and the wire W travels between these sides in a manner that the reciprocating motion is superimposed on the constant speed motion, and the workpiece G can be cut efficiently with less wire transfer.

[Problem that the invention seeks to solve]

By the way, in the above-mentioned apparatus, there is the following problem with the reciprocating line providing means 4.

That is, in the conventional round trip providing means 4, the outbound trip,
Movable roller groups 531 and 53 that engage with each wire W on the return path
t is structured to reciprocate by the swinging movement of a swinging arm 52 supported at its intermediate point.

In such a structure, the movable roller group 53. , 538 move in an arc, and therefore the movable roller groups 53+,
53 and fixed roller group 54. , 54, strictly speaking, there is a difference between the shrinking side and the enlarged side.

Although this difference in displacement is very small, since the wire W is wound many times between the movable roller group and the fixed roller group, this difference is amplified and the wire W is In terms of tension, this has a considerable effect, and in conventional devices, this causes large fluctuations in wire tension and there is a risk of wire breakage. When a wire breakage occurs, the workpiece G being cut becomes scrap, resulting in a large economic loss.

In view of this situation, it is an object of the present invention to provide a wire saw machine in which there is no fluctuation in wire tension during reciprocating operations and wire breakage can be avoided as much as possible.

[Means to solve the problem]

As shown in FIG. 1, in the present invention, the wire W sent out from the wire sending means 10 is supplied to the cutting head 14 through the reciprocating row applying means 13, and then is sent to the wire winding means 11 through the reciprocating row applying means 13 again. In the returning wire saw machine, the forward path from the wire sending means 10 to the cutting 7 do 14 and the wire return path from the cutting head 14 to the wire winding means 11 are arranged in parallel at least in the reciprocating motion providing means 13, and the reciprocating motion The applying means 13 includes a slider block 131 that can reciprocate in a direction perpendicular to the wire running path;
A roller unit 130a is provided on the slider block 131 and provides loops 1, a, 1, and b in mutually opposite directions to the outgoing and returning wires W.

130b, and a drive machine iM and 30 for generating reciprocating motion of the slider block 131.

[Function] In the reciprocating row providing means 13, the slider block 131
When the is reciprocated, loops l and a are formed on the outbound and return trips.
, l, b roller units 13Qa, 130b
roller 130. repeats reciprocating motion.

When the roller units 130a and 130b move in this way, the loop La of the outgoing and returning paths.

Lb fluctuates with opposite trends, with one increasing and the other decreasing. As a result, the reciprocating row applying means 1 passes from the reciprocating row applying means 13 to the cutting head 14 and returns to the reciprocating row applying means 1.
A reciprocating line is given to the wire W on the route up to the point 3.

In this case, the roller units 1301 and 130b have a fixed distance between their support shafts and move at right angles to each of the wire travel paths on the outbound and return trips, so there is a difference in the increase and decrease of the loops La and Lb between the outbound and return trips. There is no change in the tension of the wire W.

Further, even if a plurality of loops [, a, Lb are formed, there is no difference in increase or decrease between the individual loops, so the difference in increase Xt will not be compounded.

〔Example〕

FIG. 1 is a perspective view showing the basic configuration of a wire saw machine according to an embodiment of the present invention.

This device consists of a wire running system I, in which the wire W circulates, and its drive system (2).

The wire running system (■) includes a wire sending means 10 and a winding means 11 (both reels), dancer roll mechanisms 12a and 12b provided corresponding to both means, and wire W.
It consists of a reciprocating row applying means 13 for applying reciprocating rows to the cutting head 14, and a cutting head 14.

The route of the wire W is as follows: wire feeding means 10 - dancer roller i 123 - reciprocating row applying means 13 - cutting blade 1
4, and a return path of the cutting head 14 - reciprocation applying means 13 - Dan roll mechanism 12b - winding means 11 are set.

The dancer roller mechanisms 12a and 12b each have three rollers 1201 to 120.1 or 1204 to 120.
20-ra 120. ．．
1202 or 120. ．． Between 120 and 120, there is a dancer roller mechanism 120 with a movable support shaft (up and down movement in the figure). or 120
．． are arranged, and the dancer roller mechanism 12
0. or 120. is the weight of the above 20-la 12 due to its own weight, the weight of an appropriate weight attached to it, or a spring.
01.120. or 120. ．． It is urged in the direction away from 1205. This is a movable loop on the wire W as shown in the diagram! , or 11, and plays the role of maintaining the wire tension at a required constant level on the outbound and return passes.

The reciprocating line providing means 13 includes a pair of roller units 130a, one for each of the outward and return trips.

130b are provided, each roller unit 130 having three rollers 130. ~130. These have the same arrangement as the 30-ra of the dancer roller mechanism 12 just described above, and provide a loop L to the wire W. However, both cola units 130a.

In 130b, the roller arrangement is symmetrical with respect to each other, and loops l, a, [, b are formed in mutually opposite directions.

Both roller units 130a and 130b are a slider block 1 that can reciprocate in a direction (loop formation direction) perpendicular to the wire running path (the running path in the surrounding area excluding the loop).
31, and by reciprocating the slider block 131, its position with respect to the wire running path is changed while the distance between both support shafts remains unchanged, and the amounts of the loops La and Lb are changed, respectively.

The cutting blade 14 is basically the same as that shown in FIG. That is, this head 14 has three rollers 140 . -140. The wire W has a small pitch P of 30-140. ~140. The two lower rolls 140. ．． 140
．． Create a row of processing wires in between. The workpiece G is brought into contact with this processing wire array from below.

Next, the drive system (2) of the wire running system (2) will be described.

This drive system (■) includes a wire sending means 10 and a winding means 11.
The first power transmission system (■1) is composed of a first power transmission system (2) that serves to drive the equipment, and a second power transmission system (2) that serves to drive each of the other devices. It has a rotary drive machine M for feeding, and the second power transmission system (■) includes, in addition to this drive machine M, a second rotary drive machine M for generating reciprocating motion.
2.

The first power transmission system consists of two pulleys 22.2 attached to the rotating shaft of the first rotary drive machine M+. ．． 228 and two pulleys 2 attached to the rotating wheel 100 of the wire delivery means 10.
0. ．． 20. and two pulleys 21 attached to the rotating shaft 110 of the wire winding means 11. ．． 21□, and a pulley 20. ．． 21,. 22. Between the timing belt 231 and the pulley 20. ．． A timing belt 23□ is wound between the belts 21□ and 22, respectively.
And timing belt 23. The power transmission system changes the wire feeding speed of the wire feeding means 10 to the wire winding means 1.
Increase the winding speed of 1 to 23 tons of timing belt.
On the other hand, the power transmission system according to the invention is designed so that the wire delivery speed is smaller than the wire winding speed.

The reason for providing two systems of the first power transmission system ■1 in this way is that
This is to suppress slack in the running wire W, and switching between both systems is done by the clutch 24. ~244, and the switching timing is determined by loop 1.244 in the dancer roller mechanism 123.12b. , I! , is determined based on the displacement amount of , .

The second power transmission system (2) has three sprocket wheels 26, -26. The sprocket wheel units 26a, 26b also include the 30-ra 140. of the cutting head 14. -140. and the nearest turning roller 141, sprocket wheels (hereinafter simply referred to as wheels) 27, to 27. and 28
are arranged symmetrically, a power intake wheel 25 is added to these wheel groups, and a chain 29 is wound around the wheels following the wire route of the wire running system I. In this case, the power intake wheel 25 is preferably provided on the side of the wheel unit 26 opposite to the cutting head 14.

In this way, the rotary drive machine M1 can be operated at a constant speed, and there is no need for a complicated operation pattern that involves overlapping wire reciprocations.

Each wheel in this power transmission system has a corresponding roller and shaft 3. ．． 3. connected by...
Its power intake wheel is connected to said first drive M+.

Further, regarding the wheel units 26a and 26b, the slider block 131 is similar to the roller unit described above.
A second driving machine M2 is connected to the slider block 131 via a crank mechanism 30. The crank mechanism 30 is configured by a crank arm 300 attached to the rotating shaft of the drive machine Mt engaging with a groove block 301 attached to the slider block 131, and this structure allows the rotation of the drive machine Mt to be reciprocated. The movement will be transmitted to the slider block 131.

The reciprocating row providing means 13 includes a slider block 131, a pair of roller units 130a and 130b, a pair of wheel units 26a and 26b, shafts 3 to 36 connecting these units, and a crank mechanism to the slider block 131. Drive machine M connected via 30
Consists of heavy weight.

In the wire saw machine configured as described above, when the first driving machine M is rotated, the rotation is transmitted from the power intake wheel 25 to the second transmission system 2, and the rotation in the transmission system is transmitted from the power intake wheel 25 to the second transmission system All wheels will be rotated at the same time.

On the other hand, at the same time, the rotation of the first driving machine M is also transmitted to the first transmission system 1, and the wire sending means 10 and the wire winding means 11 are transmitted through any one of the systems.
is rotated, whereby the wire W stretched around the wire running system I runs at a constant speed. At this time, the rotation of each wheel in the second transmission system (2) is transmitted to each roller in the wire running system (2) via each shaft 3I, 3t, . . . .

Here, when the second drive Rrvtz is operated, its rotation is converted into a reciprocating motion by the crank mechanism 30 and transmitted to the slider block 131, thereby giving periodic reciprocating motion to the entire slider block 131. become. This reciprocation is made into a precise sinusoidal motion by the groove block 301.

When the slider block 131 is subjected to such periodic movement, both wheel units 26a attached to it
, 26b change in parallel, but in this case both loops La.

[, b fluctuate with opposite trends, such that when one increases, the other decreases by the corresponding amount. As a result, while the chain 29 returns from one wheel unit 26° to the other wheel unit 26b in the second transmission system (8), a reciprocating movement is superimposed on the constant movement by the first drive machine M. It turns out. And this movement is the wheels 27, -27. Cutting through rad 14 of 3
0-le 140. ~140. This will be communicated to.

Along with such movement of the cutting spatula 14, the wire W between the output side and the input side of the reciprocating stroke imparting means 13 tends to slacken on one side of the outward and return passes, and to shrink on the other side. , With the reciprocating movement of the slide duff lock 131, the wheel unit 2 is attached to both roll units 130a and 13Qb.
Since the same motion as 5a and 26b is given,
The above-mentioned tendencies are canceled out and give a constant tension to the wire W.

Then, the wire W goes from the wire sending means 10 to the cutting head 14 under such constant tension, cuts the workpiece G, and returns to the wire winding means 11, and during this time! II? Translated shipping is guaranteed.

In addition, in the above embodiment, for convenience of explanation, the reciprocating line providing means 1
Regarding 3, the case of one roll unit) 131 is shown, but in an actual machine, multiple roll units are connected in parallel in order to shorten the reciprocating stroke of the slider block 131 to roll unit 130 or increase the wire speed. It is preferable to provide the wheel units 26 in an expanded manner, and in this case, the corresponding number of wheel units 26 will naturally be provided.

〔Effect of the invention〕

The wire saw machine of the present invention uses a pair of roller units whose distance between spindles is fixed and which moves perpendicularly to each of the outgoing and incoming wire travel paths to increase and decrease the loops in the outgoing and incoming paths to impart reciprocation to the wire. Since there is no difference in the increase or decrease of the loop between the outward and return trips, the wire W
There is no variation in the tension of the loop, and even when a plurality of loops are formed, the difference in increase or decrease of the loops is not amplified. Therefore, inconvenient situations such as wire breakage are extremely unlikely to occur, and the effects are extremely large, such as stabilizing operation and eliminating scrapping of workpieces due to wire breakage.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing the basic structure of a wire saw machine according to an embodiment of the present invention, and FIG. 2 is a perspective view showing an example of a conventional wire saw machine. In the figure, r: wire running system, ■: drive system, 10: wire sending means, 11: wire winding means, 12: dancer roller mechanism, 13: reciprocating line providing means, 14: cutting head, 2
0-22: Pulley, 23: Timing belt, 24: Clutch, 25: Wheel, 26: Wheel unit, 2
7.28: Wheel, 29: Chain, 30: Crank mechanism, M: Drive machine, 3: Shaft, 130: Roller unit, 131 F slider block. Figure 2 Procedural amendment words and deeds) May 2, 1988 Patent Application No. 32211 2, Name of invention Wire saw machine 3, Relationship with the person making the amendment Case Patent applicant address 1 Higashihama-cho, Amagasaki City, Hyogo Prefecture Address name Osaka Titanium Manufacturing Co., Ltd. Representative Toshio Ikeshima 'and 1 other person) 4, Agent 5, Date of amendment order 6, "Detailed description of the invention" column 7 of the specification subject to amendment, Contents of amendment (1) Insert 13, "Detailed Description of the Invention" between lines 2 and 3 on page 2 of the specification.

Claims (1)

[Claims] (1) Wire (
W) is transferred to the cutting head (14) via the reciprocating row applying means (13).
), and returns to the wire winding means (11) via the reciprocating line applying means (13) again,
The wire outgoing path from the wire sending means (10) to the cutting head (14) and the wire outgoing path from the cutting head (14) to the wire winding means (11) are arranged in parallel at least in the reciprocating line providing means (13). , the reciprocating line providing means (13) includes a slider block (131) that is capable of reciprocating in a direction perpendicular to the wire running path, and a slider block (131) that is provided on the slider block (131) and provides a wire (
A drive mechanism (M_2) for generating reciprocating motion of the roller unit (130a) (130b) that provides loops (La) (Lb) in opposite directions to W) and the slider block (131)
A wire saw machine comprising: and (30).