JPH0230490A - Wire saw machine - Google Patents

Abstract

PURPOSE:To constantly maintain the tension of a wire by providing a pair of roller units for giving a reciprocating movement to the wire by moving at right angles for the respective wire traveling passage of forward passage and backward passage and varying the loops of the forward and backward passages. CONSTITUTION:When a slide block 30 is reciprocated, the slider rollers 320a, 320b of a pair of roller units 32a, 32b forming loops La, Lb on forward passage X1 and backward passage X2 repeat a reciprocating movement in the loop forming direction. When these slider rollers 320a, 320b repeat the reciprocation, the loops La, Lb of the forward and backward passages vary with reverse tendency each other like one part being increased and the other part being decreased. In this case, the slider roller 320a for forward passage X1 and that 320b for backward passage X2 are fixed at their intersupportaxial distance and moved orthogonally with the wire traveling passage of the forward and backward passages. Consequently the difference in the varying amt. of the loops La, Lb is eliminated between both passages X1, X2 and no tension of a wire W is varied.

Description

[Detailed Description of the Invention] C. Industrial Application Field] The present invention relates to a wire saw machine used, for example, to cut wafers from a silicon ingot, and more specifically, the present invention relates to a wire saw machine that is capable of high efficiency cutting and prevents wire breakage. Regarding less wire saw machines.

[Conventional technology]

An example of the structure of a wire saw machine is shown in FIG.

The wire W fed out from the wire unwinding pobbin 60a via the looper 61a (input side looper) passes through the reciprocating line applying means 63, is supplied to the cutting head 64, passes through the reciprocating line applying means 63 again, and passes through the looper 61b (outlet side looper). looper) and returns to the wire winding bobbin 60b. During this process, the wire W makes a reciprocating motion.The period from when it exits the forward side of the giving means 63 to when it reaches the backward side, the wire W makes a movement in which the reciprocating movement is superimposed on the constant speed movement, and the cutting head 63
4, the workpiece C is cut.

It is the reciprocating motion providing means 6 that generates the reciprocating motion in the wire W.
3, and its structure is explained as follows.

The means 63 includes a swinging arm 6 whose intermediate point is pivotally supported on the base body A.
30, movable roller groups 631a and 631b that are supported by shafts on both left and right ends of swing arm 630, and fixed roller groups 632a and 632b that are supported by shafts on substrate A corresponding to both roller groups, respectively. And the movable roller group 631
A wire W on the outbound side is wound between the roller a and the fixed roller group 632a, and a wire W on the return side is wound similarly between 631b and 632b.

When the swinging arm 630 is operated at a constant cycle, the distance between the two roller groups 631a and 632a on the forward side and the distance between the two roller groups 631b and 632b on the backward side alternately decrease and expand. As a result, a reciprocating motion is given to the wire W between when it exits the outward path side of the reciprocating path applying means 63 and returns to the same backward path side (hereinafter referred to as a seesaw type) 6 By the way, in this type of wire saw machine, cutting The speed depends on the speed of the wire W at the cutting head 64 (reciprocating speed, hereinafter referred to as "linear speed"), and in order to perform highly efficient cutting, it is necessary to ensure a high linear speed.

(Problems to be Solved by the Invention) However, with the above-mentioned seesaw type, there is a limit to increasing the linear velocity, and it is not possible to achieve a linear velocity in practical terms.

In the seesaw type, the movement of the movable roller groups 631a and 631b is an arc movement, and the movable roller group and the fixed roller group 631
Looking at the amount of displacement in the distance between a and 632a or 631b and 632b, strictly speaking, there is a difference between the shrinking side and the enlarged side.

Although this difference in displacement is very small, when the wire W is wound many times between the movable roller group and the fixed roller group, the difference is amplified and has a large effect on the wire tension. will be given. In fact, excessive tension was often generated in the wire, leading to wire breakage.

In the seesaw type, in order to avoid wire breakage, it is necessary to limit the number of times the wire wraps between the movable roller group and the fixed roller, but there is a proportional relationship between the number of wraps and the linear speed.
High linear speed cannot be expected unless the number of windings is increased.

For this reason, it was not possible to achieve a satisfactory linear velocity with the seesaw type.

An object of the present invention is to provide a wire saw machine that can achieve high linear speed operation that cannot be achieved with the scene type, and can effectively avoid wire breakage accidents caused by reciprocating operations.

[Means to solve the problem]

As shown in FIG. 1, in the present invention, the wire W sent out from the wire sending means 1a is supplied to the cutting head 4 through the reciprocating row applying means 3, and then passed through the reciprocating row applying means 3 again to the wire winding means 1b. In the wire saw machine that returns, the reciprocating motion providing means 3 includes a slider block 30 capable of reciprocating in a direction perpendicular to the wire running path, a drive mechanism 31 for generating the reciprocating motion, and a drive mechanism 31 provided on the slider block to move the slider together with the block. Consists of a slider roller 320 and fixed rollers 321 located on both sides of the slider roller,
and a roller unit 32a that provides loops La+Lb in mutually opposite directions to the wire W on the wire outgoing path X1 and incoming path X2;
32b, each roller unit has a fixed roller 321
A suitable number of rollers and slider rollers 320 are laid out and arranged in a plane, and a required number of rollers are coaxially arranged for each roller to form a required number of roller rows that overlap in the roller axial direction, and the wire W is applied to all the rows. The gist is a wire saw machine that is characterized by being rotated.

(Function) Reciprocating line providing means 3 (hereinafter referred to as slider block type)
When the slider block 30 is reciprocated, the slider roller 320a creates loops I, a, l, and b on the outward path X1 and the backward path X2.

320b repeats reciprocating motion in the loop forming direction.

When the slider roller 320 repeats reciprocating motion, the loops La and Lb on the outward and return trips vary with opposite tendencies, such as one increasing and the other decreasing. As a result, a reciprocating motion is applied to the wire W during the period from the reciprocating motion applying means 3 to the cutting end 4 and returning to the reciprocating motion applying means again.

In this case, the slider roller 320a for the outward path X1 and the slider roller 320b for the backward path x2 have fixed distances between their spindles and move at right angles to the wire feeding paths of the outgoing path and the backward path, so both paths X, There is no difference in the increase or decrease of loops La and Lb between X2, and the difference in increase or decrease between the two paths as a whole is not amplified.

Therefore, unlike the conventional seesaw type, a high wire speed can be achieved by ensuring a sufficient number of wire windings, that is, a sufficient number of loops.

Furthermore, even in this case, there is very little variation in the wire tension due to the reciprocating operation, and the occurrence of wire breakage accidents can be avoided as much as possible.

In addition, in the conventional seesaw type, the rollers that function as line storage overlap only in the axial direction, so there is actually a limit to increasing the number of rollers, whereas the slider type of the present invention Since the rollers are arranged not only in the axial direction but also in the direction perpendicular to the axial direction, the number of rollers can be increased as necessary, and the device can be designed compactly.

〔Example〕

FIG. 1 is a perspective view showing the basic configuration of a wire saw machine according to an embodiment of the present invention.

This device consists of a wire running system I, in which the wire W circulates, and its drive system (2).

The wire running system (■) includes a wire sending means 1a and a winding means 1b, loopers 2a and 2b (2a: entry side, 2b: exit side) provided corresponding to both the wire sending means 1a, winding means 1b, wire W, and reciprocating wire W. It consists of a reciprocating row applying means 3 for applying rows and a cutting head 4.

The route of the wire W is as follows: wire sending means 1a→input side looper 2a→reciprocating line applying means 3→outgoing path to cutting end 4, and cutting head 4→reciprocating line applying means 3→output side louver 2b→
A return path of the winding means 1b is set.

The wire feeding means 1a and the winding means 1b are both bobbins, and the former winds out new wire at a predetermined speed, and the latter winds up used wire at a predetermined speed.

The loopers 2a and 2b each have three rollers 201.
~ 203 or 204 ~ 206, 20-ra 20. ．． 20□ or 20. ．． 20.
A slider roller 20 with a movable spindle (up and down movement in the figure) between
3 or 206 are arranged, and the slider roller 203 or 206 is moved by its own weight, the weight of an appropriate weight attached to it, or a spring.
0,. 20□ or 20. ．． It is urged in the direction away from 205. This creates a movable loop 1a or ρb in the wire W as shown in the figure, and serves to maintain the wire tension at a required constant level on the outward and return trips.

The reciprocating row applying means 3 is composed of a slider block 30 that can reciprocate in a direction perpendicular to the wire running path, a slider roller 320 that reciprocates together with the block 30, and fixed rollers 321 located on both sides of the slider roller. It includes roller units 32a and 32b.

The roller units 32a and 32b each correspond to the outgoing path X++ and the incoming path X2 of the wire, and the arrangement of the rollers is symmetrical to each other. In each unit, the rollers are
They are arranged in an expanded form on a plane, and are also arranged one on top of the other in the axial direction. In the planar arrangement, the slider rollers 320 and the fixed rollers 321 are arranged in a staggered manner, and each slider roller 320 forms a loop La on the wire path.

It is designed to create Lb. Both units 32a,
The loops La and Lb formed by 32b are in opposite directions.

In the axial direction of the rollers, three rollers are provided one on top of the other in the figure, and the wire W is wound around the three roller rows RR2 and R3 along a route as shown in FIG. In addition, between R1 and R2 and between R2 and R3, each roller unit l-32
The wires W are transferred between rows via direction changing rollers 322a and 322b arranged immediately near the starting and ending points of wires a and 32b.

The cutting head consists of three rollers 40 to 403 arranged in a triangular arrangement.
The wire W has a small pitch P of 30
-Le 40. ~ 403 is wound multiple times on the outside to create a processing wire row between the two lower rolls 40□ and 403.

The workpiece G is brought into contact with this processing wire array from below.

Next, the drive system (2) of the wire running system I will be described.

This drive system (■) includes a wire sending means 1a and a winding means 1b.
The first power transmission system (■2) serves to drive each other, and the first power transmission system (2) serves as a power source for the first power transmission system (2). The second power transmission system (2) has a rotation drive @M for wire feeding, and in addition to this drive machine M+, it is equipped with a second rotation drive machine M2 for reciprocation and generation.

The first power transmission system (1) consists of two boots IJ52. ．． 52°, and two pulleys 50 attached to the rotating shaft 10 of the wire sending means 1a.
．． ．． 50° and two pulleys 51 attached to the rotating shaft 11 of the wire winding means 1b, . 51□, pulley 50
．． ．． A timing held 531 is installed between 51521, and a timing held 53 is installed between pulleys 50□ and 512.52□.
゜ is wrapped around each.

The power transmission system by the timing heald 53 controls the wire feeding speed of the wire feeding means 1a by the wire winding means i.
The winding speed of b is higher than that of timing heald 532.
On the other hand, the power transmission system according to the invention is designed so that the wire delivery speed is smaller than the wire winding speed.

The reason for providing two systems of the first power transmission system ■1 in this way is that
This is to suppress slack in the running wire W. Switching between both systems is performed by clutches 5C to 544, and the switching timing is determined by the loops f1a, f! in the loopers 2a, 2b. ,b
is determined based on the amount of displacement.

The second power transmission system (2) consists of a combination of sprocket wheels and a chain. The chain is divided into three parts, and the first chain CI has a sprocket wheel for power intake (hereinafter simply referred to as the wheel 6), and a reciprocating motion providing means 3 in the main body of the device.
The roller units 32a and 32b are mounted between the wheel units Ta and Tb provided corresponding to the roller units 32a and 32b, and the wheel 7c for extracting the power of 01. Second Cheno C
2 is a large wheel 81 supported coaxially with the wheel 7C, and a wheel 9 that transmits power to the third chain C3.
．． and a small wheel 8° which is coaxially supported. The portion M of the chain C2 serves as a speed increaser that increases the speed of the chain (hereinafter, the M portion will be referred to as a speed increaser). The third chain C3 extracts power 9
and 30-40 of the cutting head 4. 403 and the turning roller 41 nearest thereto. The third chain C3 runs at a speed increased by the speed increaser M.

The rate of speed increase of the third chain with respect to the first chain is determined by the wire wrapping state of the thick means 3 in the reciprocating movement.
The speed of the chain C3 is determined to match the running speed of the wire W at the cutting head 4.

The wheels of this power transmission system (2) are connected by rollers and shafts S1, Sz, . . . , and the power intake wheel 6 is connected to the first drive machine M.

Further, the wheel units Ta and Tb are attached to the slider block 30 in the same manner as the roller units described above, and the slider block 30 is connected to a second drive machine M2 via a crank mechanism 33. The crank mechanism 33 is configured such that a crank arm 330 attached to the rotating shaft of the drive machine M2 engages with a groove block 331 installed in the slider block 30, and this structure allows the rotation of the drive machine M2 to reciprocate. The motion is converted into a motion, and the motion is transmitted to the slider block 30.

The reciprocating row imparting means 3 connects the slider block 30, the pair of roller units 32a, 32b, the pair of wheel units 7a, 7b, the shafts 81 to S without any space between these units, and the slider block 30. It is composed of a drive machine M2 connected via a crank mechanism 33.

In the wire saw machine configured as above, when the first drive @Ml is rotated, the rotation is transmitted from the power intake wheel 6 to the second transmission system 2, and all the parts in the transmission system The wheels will be rotated all at once.

In this case, a predetermined speed difference due to the speed increaser M is limited between the drive chains C1 and C03.

On the other hand, at the same time, the rotation of the first driving machine M is also transmitted to the first transmission system Lg, and the wire sending means 1a and the wire winding means 1b are transmitted through any one of the systems.
is activated to rotate, thereby causing the wire W stretched around the wire running system I to run at a constant speed. At this time, the rotation of each wheel in the second transmission system (2) is transmitted to each cola in the wire running system (I).

Here, when the second drive machine M2 is operated, its rotation is converted into reciprocating motion by the crank mechanism 33 and transmitted to the slider block 30, thereby causing the slider block 3
Each time a periodic reciprocating motion is given to the entire 0. This reciprocating motion is made into a precise sinusoidal motion by the groove block 331.

When the slider block 30 is subjected to such periodic movement, both wheel units Ta and T attached to it
The loops La, t, and b caused by b change in parallel, but in this case, the side loops La and Lb change with opposite trends, such that when one increases, the other decreases by a corresponding amount. As a result, while the chain C3 returns from the wheel unit 7a to the other wheel unit t4b in the second transmission system (2), a reciprocating movement is superimposed on the constant movement by the first driving machine M.

This movement is then increased in speed by a speed increaser at a predetermined rate and transmitted to the wheels 91 to 95 by the chain C3.
Cutting head 14030-le 40. ~403.

With such movement of the cutting head 4, the wire W between the exit side and the input side of the reciprocating motion applying means 3 tends to slacken on one of the outgoing and incoming passes, and to tighten on the other. However, as the slider block 3o reciprocates, both roller units 32
Is the wheel unit in a and 32b? The same motion as in a, 71) is given. The wire W thereby reciprocates on the cutting bend 4 side of the reciprocating motion providing means 3 with the same tendency as the chain C1. However, in this case, the wire W is wound in a plurality of rows in the reciprocating row applying means 3 as shown in FIG. 2, so that the speed is higher than that of the chain C1.

The chain c4 that drives the cutting head 4 increases the speed due to the difference in speed with the wire W relative to the Cheno CI, and the chain c4 drives the cutting head 4.
In this case, there is no difference in running speed between the drive chain c4 and the wire W.

Then, the wire W, which has such a constant tension, travels from the wire feeding means 10 to the cutting end 4, cuts the wire G, and returns to the wire winding means 11, during which smooth feeding is guaranteed.

〔Effect of the invention〕

The wire saw machine of the present invention uses a pair of roller units whose distance between spindles is fixed and which moves perpendicularly to each of the outgoing and incoming wire travel paths to increase and decrease the loops in the outgoing and incoming paths to impart reciprocation to the wire. Since there is no difference in the increase or decrease of the loop between the outward and return trips, the wire W
It does not cause any fluctuation in the tension. Furthermore, even in a structure in which a plurality of loops are formed, the difference in increase and decrease of the loops is not amplified. Therefore, without increasing the fear of wire breakage, the number of loops is sufficient to increase the wire speed at the cutting hand, and high efficiency cutting can be achieved. In addition, the configuration in which the rollers forming the loop are continuous both in the axial direction and in the direction perpendicular to the axial direction is suitable for forming many loops.
The number of loops can be increased as necessary, and the device does not become large in size even if the number of loops is increased.

Therefore, the present invention greatly contributes to preventing economic losses such as wire breakage and scrapping of workpieces due to wire breakage, and to improving workpiece cutting efficiency.

[Brief explanation of the drawing]

Fig. 1 is a perspective view showing the basic structure of a wire saw machine according to an embodiment of the present invention, Fig. 2 is an explanatory view showing the wire winding state in the same device, and Fig. 3 is an example of a conventional wire saw machine. FIG. In the figure, ■: wire running system, ■: drive system, 1a: wire sending means, 1b = wire winding means, 2: looper, 3:
Reciprocating row providing means, 4; cutting head.

Claims (1)

[Claims] 1. Wire (W) sent out from wire sending means (1a)
) is supplied to the cutting head (4) via the reciprocating line applying means (3) and returns to the wire winding means (1b) via the reciprocating line applying means (4) again, the reciprocating line applying means ( 3) includes a slider block (30) that can reciprocate in a direction perpendicular to the wire running path, a drive mechanism (31) for generating the reciprocating motion, and a slider roller (32) that is provided on the slider block and slides together with the block.
0) and fixed rollers (3) located on both sides of the slider roller.
roller units (32a) (
32b), and each roller unit consists of a fixed roller (3
21) and slider rollers (320) are arranged in a plane, and a required number of rollers are coaxially arranged for each roller, so that a required number of roller rows (R_1) (R_2) are arranged in parallel in the roller axis direction. A wire saw machine characterized in that a wire (W) is wound around all rows of the wire saw machine.