JPS63199169U - - Google Patents
Info
- Publication number
- JPS63199169U JPS63199169U JP8822687U JP8822687U JPS63199169U JP S63199169 U JPS63199169 U JP S63199169U JP 8822687 U JP8822687 U JP 8822687U JP 8822687 U JP8822687 U JP 8822687U JP S63199169 U JPS63199169 U JP S63199169U
- Authority
- JP
- Japan
- Prior art keywords
- tape measure
- single crystal
- quartz crucible
- pulling device
- crystal pulling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図ないし第３図は本考案の一実施例を示す
もので、第１図は正面図、第２図は側面図、第３
図は覗窓部の断面図、第４図は従来の単結晶引上
装置を示す概略構成図である。
２……石英ルツボ、４……下軸、５……結合機
構、５ａ……支持板、２４……滑車、２５……巻
尺、２６……取付部材、２９……錘。
Figures 1 to 3 show an embodiment of the present invention, with Figure 1 being a front view, Figure 2 being a side view, and Figure 3 being a side view.
The figure is a cross-sectional view of a viewing window, and FIG. 4 is a schematic diagram showing a conventional single crystal pulling apparatus. 2... Quartz crucible, 4... Lower shaft, 5... Coupling mechanism, 5a... Support plate, 24... Pulley, 25... Tape measure, 26... Mounting member, 29... Weight.
Claims (1)
単結晶を引上げ成長させる単結晶引上装置におい
て、石英ルツボを支持する下軸昇降系に、取付部
材を介して巻尺の一端を連結し、かつこの巻尺を
滑車に巻き掛けると共に、前記巻尺の他端に錘を
連結したことを特徴とする単結晶引上装置。 In a single crystal pulling device for pulling and growing a single crystal from a quartz crucible by the Czyochralski method, one end of a tape measure is connected to a lower axis lifting system that supports the quartz crucible via a mounting member, and this tape measure A single crystal pulling device, characterized in that the tape measure is wound around a pulley, and a weight is connected to the other end of the tape measure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987088226U JPH0543108Y2 (en) | 1987-06-08 | 1987-06-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987088226U JPH0543108Y2 (en) | 1987-06-08 | 1987-06-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63199169U true JPS63199169U (en) | 1988-12-21 |
| JPH0543108Y2 JPH0543108Y2 (en) | 1993-10-29 |
Family
ID=30946149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987088226U Expired - Lifetime JPH0543108Y2 (en) | 1987-06-08 | 1987-06-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543108Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6287481A (en) * | 1985-10-09 | 1987-04-21 | Mitsubishi Metal Corp | Method of setting the initial melting position in single crystal-pulling-up apparatus |
-
1987
- 1987-06-08 JP JP1987088226U patent/JPH0543108Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6287481A (en) * | 1985-10-09 | 1987-04-21 | Mitsubishi Metal Corp | Method of setting the initial melting position in single crystal-pulling-up apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543108Y2 (en) | 1993-10-29 |
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