JPS63199166U - - Google Patents
Info
- Publication number
- JPS63199166U JPS63199166U JP8822587U JP8822587U JPS63199166U JP S63199166 U JPS63199166 U JP S63199166U JP 8822587 U JP8822587 U JP 8822587U JP 8822587 U JP8822587 U JP 8822587U JP S63199166 U JPS63199166 U JP S63199166U
- Authority
- JP
- Japan
- Prior art keywords
- crystal pulling
- upper chamber
- pulling
- crystal
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8822587U JPH0519336Y2 (OSRAM) | 1987-06-08 | 1987-06-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8822587U JPH0519336Y2 (OSRAM) | 1987-06-08 | 1987-06-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63199166U true JPS63199166U (OSRAM) | 1988-12-21 |
| JPH0519336Y2 JPH0519336Y2 (OSRAM) | 1993-05-21 |
Family
ID=30946147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8822587U Expired - Lifetime JPH0519336Y2 (OSRAM) | 1987-06-08 | 1987-06-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519336Y2 (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02252687A (ja) * | 1989-03-24 | 1990-10-11 | Shin Etsu Handotai Co Ltd | 単結晶引上装置におけるアイソレーションバルブ |
-
1987
- 1987-06-08 JP JP8822587U patent/JPH0519336Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02252687A (ja) * | 1989-03-24 | 1990-10-11 | Shin Etsu Handotai Co Ltd | 単結晶引上装置におけるアイソレーションバルブ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519336Y2 (OSRAM) | 1993-05-21 |