JPS63197691U - - Google Patents

Info

Publication number
JPS63197691U
JPS63197691U JP8933987U JP8933987U JPS63197691U JP S63197691 U JPS63197691 U JP S63197691U JP 8933987 U JP8933987 U JP 8933987U JP 8933987 U JP8933987 U JP 8933987U JP S63197691 U JPS63197691 U JP S63197691U
Authority
JP
Japan
Prior art keywords
workpiece
support member
cleaning
horizontal support
cleaning chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8933987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0454871Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8933987U priority Critical patent/JPH0454871Y2/ja
Publication of JPS63197691U publication Critical patent/JPS63197691U/ja
Application granted granted Critical
Publication of JPH0454871Y2 publication Critical patent/JPH0454871Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP8933987U 1987-06-10 1987-06-10 Expired JPH0454871Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8933987U JPH0454871Y2 (enExample) 1987-06-10 1987-06-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8933987U JPH0454871Y2 (enExample) 1987-06-10 1987-06-10

Publications (2)

Publication Number Publication Date
JPS63197691U true JPS63197691U (enExample) 1988-12-20
JPH0454871Y2 JPH0454871Y2 (enExample) 1992-12-22

Family

ID=30948242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8933987U Expired JPH0454871Y2 (enExample) 1987-06-10 1987-06-10

Country Status (1)

Country Link
JP (1) JPH0454871Y2 (enExample)

Also Published As

Publication number Publication date
JPH0454871Y2 (enExample) 1992-12-22

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