JPS63197026U - - Google Patents
Info
- Publication number
- JPS63197026U JPS63197026U JP8945487U JP8945487U JPS63197026U JP S63197026 U JPS63197026 U JP S63197026U JP 8945487 U JP8945487 U JP 8945487U JP 8945487 U JP8945487 U JP 8945487U JP S63197026 U JPS63197026 U JP S63197026U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- air
- passage
- supply passage
- air supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 claims 2
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
- Automatic Assembly (AREA)
- Feeding Of Workpieces (AREA)
Description
第１図は本考案の実施例を示す図、第２図は従
来の装置を示す図である。
２０……検出装置、２１……真空発生源、２２
……吸着盤、２３……真空通路、２４……圧搾空
気源、２６……空気放出通路、２７……空気供給
通路、２８……可変式絞りオリフイス、２９……
絞りオリフイス、３０……ダイヤフラムケース、
３１……ダイヤフラム、３２，３３……圧力室、
３６……スイツチ。
FIG. 1 is a diagram showing an embodiment of the present invention, and FIG. 2 is a diagram showing a conventional device. 20...Detection device, 21...Vacuum generation source, 22
... Suction cup, 23 ... Vacuum passage, 24 ... Compressed air source, 26 ... Air discharge passage, 27 ... Air supply passage, 28 ... Variable throttle orifice, 29 ...
Squeezing orifice, 30...Diaphragm case,
31... diaphragm, 32, 33... pressure chamber,
36...Switch.
Claims (1)
続され、一端を大気に開放した空気放出通路と、
一端を吸着盤から真空発生源に至る真空通路に接
続した空気供給通路とを有し、前記空気放出通路
と空気供給通路との間に、圧力差検出手段を設け
たことを特徴とする真空式吸着装置における吸着
検出装置。 an air discharge passageway each connected to a compressed air source via a flow rate regulating means and having one end open to the atmosphere;
A vacuum type, characterized in that it has an air supply passage whose one end is connected to a vacuum passage leading from a suction cup to a vacuum generation source, and a pressure difference detection means is provided between the air release passage and the air supply passage. Adsorption detection device in adsorption equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987089454U JPH0618748Y2 (en) | 1987-06-09 | 1987-06-09 | Adsorption detection device in vacuum adsorption device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987089454U JPH0618748Y2 (en) | 1987-06-09 | 1987-06-09 | Adsorption detection device in vacuum adsorption device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63197026U true JPS63197026U (en) | 1988-12-19 |
| JPH0618748Y2 JPH0618748Y2 (en) | 1994-05-18 |
Family
ID=30948452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987089454U Expired - Lifetime JPH0618748Y2 (en) | 1987-06-09 | 1987-06-09 | Adsorption detection device in vacuum adsorption device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0618748Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02185387A (en) * | 1989-01-11 | 1990-07-19 | Aloka Co Ltd | Transfer device for bead |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4812684U (en) * | 1971-06-19 | 1973-02-12 |
-
1987
- 1987-06-09 JP JP1987089454U patent/JPH0618748Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4812684U (en) * | 1971-06-19 | 1973-02-12 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02185387A (en) * | 1989-01-11 | 1990-07-19 | Aloka Co Ltd | Transfer device for bead |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0618748Y2 (en) | 1994-05-18 |
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