JPS63196370A - 研磨材 - Google Patents
研磨材Info
- Publication number
- JPS63196370A JPS63196370A JP62025087A JP2508787A JPS63196370A JP S63196370 A JPS63196370 A JP S63196370A JP 62025087 A JP62025087 A JP 62025087A JP 2508787 A JP2508787 A JP 2508787A JP S63196370 A JPS63196370 A JP S63196370A
- Authority
- JP
- Japan
- Prior art keywords
- active agent
- surface active
- zirconia
- dissolving
- niobium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 10
- 239000010955 niobium Substances 0.000 claims abstract description 10
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000004094 surface-active agent Substances 0.000 claims abstract description 10
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910001928 zirconium oxide Inorganic materials 0.000 claims abstract description 6
- 239000003082 abrasive agent Substances 0.000 claims description 10
- 239000000110 cooling liquid Substances 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 3
- 238000005498 polishing Methods 0.000 abstract description 8
- 239000000463 material Substances 0.000 abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 4
- 239000007788 liquid Substances 0.000 abstract description 3
- 239000004033 plastic Substances 0.000 abstract description 3
- 229920003023 plastic Polymers 0.000 abstract description 3
- 230000003746 surface roughness Effects 0.000 abstract description 2
- 125000002091 cationic group Chemical group 0.000 abstract 2
- 239000002826 coolant Substances 0.000 abstract 2
- 101100166829 Mus musculus Cenpk gene Proteins 0.000 abstract 1
- 150000001412 amines Chemical class 0.000 abstract 1
- 238000004904 shortening Methods 0.000 abstract 1
- -1 amine salt Chemical class 0.000 description 2
- SYFOAKAXGNMQAX-UHFFFAOYSA-N bis(prop-2-enyl) carbonate;2-(2-hydroxyethoxy)ethanol Chemical compound OCCOCCO.C=CCOC(=O)OCC=C SYFOAKAXGNMQAX-UHFFFAOYSA-N 0.000 description 2
- 239000003093 cationic surfactant Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000113 methacrylic resin Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 229910003327 LiNbO3 Inorganic materials 0.000 description 1
- 229910012463 LiTaO3 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920005990 polystyrene resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62025087A JPS63196370A (ja) | 1987-02-05 | 1987-02-05 | 研磨材 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62025087A JPS63196370A (ja) | 1987-02-05 | 1987-02-05 | 研磨材 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63196370A true JPS63196370A (ja) | 1988-08-15 |
| JPH05180B2 JPH05180B2 (enExample) | 1993-01-05 |
Family
ID=12156141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62025087A Granted JPS63196370A (ja) | 1987-02-05 | 1987-02-05 | 研磨材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63196370A (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63166703A (ja) * | 1986-04-26 | 1988-07-09 | Fuji Kagaku Kogyo Kk | 高分散金属含有無機粉体の製法 |
-
1987
- 1987-02-05 JP JP62025087A patent/JPS63196370A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63166703A (ja) * | 1986-04-26 | 1988-07-09 | Fuji Kagaku Kogyo Kk | 高分散金属含有無機粉体の製法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05180B2 (enExample) | 1993-01-05 |
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