JPS63194835U - - Google Patents
Info
- Publication number
- JPS63194835U JPS63194835U JP8762387U JP8762387U JPS63194835U JP S63194835 U JPS63194835 U JP S63194835U JP 8762387 U JP8762387 U JP 8762387U JP 8762387 U JP8762387 U JP 8762387U JP S63194835 U JPS63194835 U JP S63194835U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- boat
- cassette
- rolling
- wafer transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000005096 rolling process Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Special Conveying (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8762387U JPS63194835U ( ) | 1987-06-05 | 1987-06-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8762387U JPS63194835U ( ) | 1987-06-05 | 1987-06-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63194835U true JPS63194835U ( ) | 1988-12-15 |
Family
ID=30945001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8762387U Pending JPS63194835U ( ) | 1987-06-05 | 1987-06-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63194835U ( ) |
-
1987
- 1987-06-05 JP JP8762387U patent/JPS63194835U/ja active Pending
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