JPS63193845U - - Google Patents
Info
- Publication number
- JPS63193845U JPS63193845U JP8513587U JP8513587U JPS63193845U JP S63193845 U JPS63193845 U JP S63193845U JP 8513587 U JP8513587 U JP 8513587U JP 8513587 U JP8513587 U JP 8513587U JP S63193845 U JPS63193845 U JP S63193845U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- side plates
- substantially horizontally
- dummy plate
- wafer support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8513587U JPS63193845U (cs) | 1987-05-30 | 1987-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8513587U JPS63193845U (cs) | 1987-05-30 | 1987-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63193845U true JPS63193845U (cs) | 1988-12-14 |
Family
ID=30940265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8513587U Pending JPS63193845U (cs) | 1987-05-30 | 1987-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63193845U (cs) |
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1987
- 1987-05-30 JP JP8513587U patent/JPS63193845U/ja active Pending