JPS63193353U - - Google Patents

Info

Publication number

JPS63193353U

JPS63193353U JP8566387U JP8566387U JPS63193353U JP S63193353 U JPS63193353 U JP S63193353U JP 8566387 U JP8566387 U JP 8566387U JP 8566387 U JP8566387 U JP 8566387U JP S63193353 U JPS63193353 U JP S63193353U

Authority

JP

Japan

Prior art keywords

electrodes

gas diffusion

oxygen

changes

concentration sensor

Prior art date

1987-06-01

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000001301 oxygen Substances 0.000 claims description 7
• 229910052760 oxygen Inorganic materials 0.000 claims description 7
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
• 238000009792 diffusion process Methods 0.000 claims 3
• 239000007789 gas Substances 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 1
• 239000007784 solid electrolyte Substances 0.000 claims 1
• GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
• MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
• 238000010586 diagram Methods 0.000 description 3
• 239000000446 fuel Substances 0.000 description 3
• BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
• 239000000919 ceramic Substances 0.000 description 1
• 239000011521 glass Substances 0.000 description 1
• 239000008188 pellet Substances 0.000 description 1
• 229910052697 platinum Inorganic materials 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1