JPS63193212A - Flow rate regulating valve - Google Patents

Abstract

PURPOSE:To accurately regulate a mass flow rate without being affected by variation in viscosity by providing a flow rate detection part and a flow rate regulation part in a flow passage for fluid and making a force originating from the motion variation of the fluid operate on the detection body of the detection part, and balancing this force with the force of a mass flow rate setting means and operating a spool coupled with the detection body. CONSTITUTION:A cylindrical chamber is provided to a main body 2 which constitutes the flow rate regulating valve and the detection body 5 is fitted therein slidably. The spool 38 which controls the connection between an input-side port 32 and an output-side port 33 associatively with the detection body 5, an inflow passage 17 which guides the fluid to the detection body 5, and an outflow passage 13 which guides the fluid to the main body 2 are provided to compose the flow rate detection part 1 of them. Further, the detection part 1 is provided with a valve body 75, the flow rate regulation part which has a pilot chamber 79 provided at one end of the valve body 75, and a mass flow rate setting means 61 which regulates the flow rate by operating the spool 38. Further, the pilot chamber 79 is connected to the port 33 through a pilot line 91 which has a throttle 89 and chambers 41a and 41b facing both ends of the detection body are connected to the pilot chamber 79.

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a flow rate regulating valve that detects the mass flow rate of a fluid and adjusts the flow rate.

<Prior Art> Conventionally, there is a flow regulating valve as shown in FIG. 3. This flow rate adjustment valve includes an electromagnetic throttle valve 101 and a pressure compensation valve 102 that controls the differential pressure between the upstream side and the downstream side of the electromagnetic throttle valve to a constant value. I try to control the flow rate.

<Problems to be Solved by the Invention> However, the above-mentioned conventional flow rate regulating valve has a problem in that the pressure compensating valve 102
Since the flow rate is adjusted by the opening degree of the throttle valve 101, which compensates for a constant pressure difference between the upstream and downstream sides, the actual flow rate is not measured and controlled, and the flow rate control becomes uncertain. There is a problem with becoming. In other words, the above-mentioned flow rate regulating valve directly detects the flow rate tN, without controlling the amount, and if the pressure difference before and after the electromagnetic throttle valve lO1 is constant, the flow rate is proportional to the opening degree of the electromagnetic throttle valve lOI. The flow rate is indirectly controlled based on the assumption that the water is flowing. Therefore, there is a problem in that it is not possible to accurately adjust the flow rate of a flow that causes a viscosity change, a flow that causes cavitation, a flow that contains bubbles, etc. due to a temperature change.

Therefore, the purpose of this invention is to adjust the flow rate by detecting the change in the momentum of the fluid that is proportional to the mass flow rate, thereby eliminating the influence of viscosity changes and reducing the mass flow of cavitation-generating flows and flows containing bubbles. An object of the present invention is to provide a flow rate regulating valve that can accurately adjust the flow rate to a set flow rate.

[Means for Solving the Problems] In order to achieve the above object, the flow fJM valve regulator of the present invention has a main body 2 having a cylindrical chamber inside, and a main body 2 having a cylindrical chamber inside, a detection body 5 slidably fitted to the
An inlet port 32 and an outlet port 3 are connected to the detection body 5.
3, an inflow passage 17 provided in the main body 2 to guide the fluid to the detection body 5, and an inflow passage 17 provided in the detection body 5 to direct the fluid guided by the inflow passage 17 to the detection body 5. A flow rate detection unit l having an outflow passage 13 leading to the main body, a valve body 75 that controls the flow rate of the fluid whose flow rate is detected by the flow rate detection unit l, and a pilot chamber 79 formed at one end of the valve body 75. a flow rate adjustment section 71 having;
A mass flow rate setting means 6I is provided which urges the detection body 5 with a predetermined force and operates the spool 38 to adjust the flow rate in balance with the force due to a change in the momentum of the fluid acting on the detection body 5. , the inflow passage 17. The inside of at least one passage 17 or 13 of the outflow passage 13 is connected to the detection body 5.
is formed at a constant inclination angle with respect to the axis of the flow rate adjusting section 7.
The pilot chamber 79 of No. 1 is connected to the outlet port 33 via a pilot line 91 having an aperture 89, and the chamber 41a facing one end surface of the detection body 5 is connected to the aperture 8.
9 and the outlet port 33, and a chamber 41b facing the other end surface of the detection body 5 is connected to the flow rate adjustment section 71.
It is characterized by being connected to the pilot room 79.

Here, the principle of this invention will be explained with reference to FIG.
It will look like this:

The force F acting on the inspection surface S can be expressed as: F=[Motion m of the fluid flowing into the inspection surface S]−[Momentum of the fluid flowing out from the inspection surface S].

That is, the inflow angle of the fluid flowing into the inspection surface S with respect to the fixed direction is 01, the outflow angle of the fluid flowing out from the inspection surface S with respect to the fixed direction is θ7, and the inflow velocity of the fluid into the inspection surface S is Vl.

If the outflow velocity of the fluid from the inspection surface S is V2, and the flow rate of the fluid flowing into and out of the inspection surface S is Q, then the above momentum equation in a certain direction of the inspection surface S can be expressed as follows. .

F = p −Q(V +COSθ+ V2C0Sθ
2) -(DHere, if the cross-sectional area of the inlet for guiding the fluid to the inspection surface S is A2, and the cross-sectional area of the outlet for flowing the fluid from the inspection surface S is A2, then the formula (+) is, v
+ = Q / A I, V t-Q / A
t, and further, if θ1-θ, , A, = A, then F = 2 cos θ·t', Qt.

Therefore, the mass flow rate (ρ・Q) is θ,A.

It can be expressed as a function of force in a fixed direction with ρ as a constant, and if the opening degree of the valve is controlled based on the force F representing this 'tN and ffl, the flow rate can be directly controlled based on the mass flow rate. It is. The present invention is constructed with attention paid to this point.

Effect> The fluid supplied to the main body of the flow rate detection section 1 is guided into the detection body 5 at a constant inflow angle by the inflow passage +7 provided in the main body. Further, the fluid changes its direction within the detection body 5 and is guided into the main body at a constant outflow angle by an outflow passage 13 provided within the detection body 5. At that time, the detection body 5 receives a force proportional to the mass flow rate due to a change in the momentum of the fluid. Therefore, the spool 38 interlocked with the detection body 5 moves to a position where the force proportional to the mass flow rate and the urging force of the mass flow rate setting means 61 are balanced, and the spool 38 is moved between the inlet port 32 and the outlet port 33. The fluid pressure in the pilot chamber 79 formed at one end of the valve body 75 of the flow rate adjustment section 71 is controlled. Then, the fluid pressure in the pilot chamber 79 adjusts the opening degree of the valve body 75 in the flow path of the fluid, thereby controlling the mass flow rate of the fluid. Therefore, even if the flow causes cavitation or contains bubbles, the mass flow rate can be accurately adjusted to the set flow rate.

Further, the flow rate in the pilot line caused by the movement of the valve body 75 of the flow rate adjustment section 71 changes the fluid pressure in the chamber 41a facing one end surface of the detection body 5 or the chamber 41b facing the other end surface, thereby causing , since the detection body 5 receives a force in the opposite direction to the direction of movement immediately before, the opening degree of the valve body 75 of the flow ff1g adjusting section 71 is not excessively controlled by the spool 38 that is linked to the detection body 5. , the mass flow rate can be rapidly adjusted to the set value stably with respect to the set value.

<Example> Hereinafter, the present invention will be explained in detail with reference to illustrated embodiments.

FIG. 1 shows a total flow control valve that is schematically constituted by a flow rate detection section 1, a flow rate adjustment section 71, and a proportional solenoid 61 which is a mass flow rate setting means.

The flow rate detection unit l includes a main body 2 having a cylindrical shaft hole 2a in the axial direction, a sleeve 3 fitted in the shaft hole 2a,
It includes a cylindrical detection body 5 slidably fitted into the hole 3a of the sleeve 3 and a spool 38 fixed to the detection body 5.

The detection body 5 has a hole 5a extending along the axis from the left end surface 5b in the figure.
, and screw the plug 14 into this hole 5a to close the hole 5a.
A chamber 15 is formed within the detection body 5 by sealing the chamber 15. Further, an annular groove 11a is provided on the outer circumferential surface 5e of the detection body 5, and four holes t are provided for communicating the annular groove 11a and the chamber 15.
i, tt, . . . are provided at equal intervals on the circumference. Furthermore, eight outflow passages 13.13. ... are provided at equal intervals on the circumference at an angle θ with respect to the axis of the detection body 5.

Four log passages 17, 17. penetrate from the outer peripheral surface 3b of the sleeve 3 to the hole 3a thereof. ... are provided at equal intervals on the circumference. The inflow passages 17, 17. Detection object 5 of...
The inflow angle with respect to the axis of the outflow passage 13°13,...
・Make the same angle θ. In addition, the inflow passages 17, 17
．． The cross-sectional area of... is the outflow passage 13°13,...
be the same as the cross-sectional area of Further, an annular groove 18a is provided on the inner circumferential surface 3a of the sleeve 3, and an annular groove 18a is provided from the outer circumferential surface 3b.
Eight holes 18°1B, . . . communicating with 8a are provided at equal intervals on the circumference.

An inlet 19 communicating with the annular Flllla is opened in the main body 2, and an outlet 2I is opened in the main body 2.

Further, the four inflow passages 17 are provided on the inner peripheral surface 2a of the main body 2.
,17. ... and an annular groove 20 that communicates with the inlet 19
is provided, and the fluid flowing in from the inlet port 19 flows through the inflow passage +
7.17. I try to make it flow into... Similarly, an annular groove 24 is provided to communicate the holes 18, 18, . . . of the sleeve 3 with the outlet 21, and the outlet passage 1
3,13. The fluid flowing out from... is discharged to the outside from the outlet 21.

On the right side of the flow rate detection section I in FIG. 2, there is an inlet port 32.
A housing 37 having a cylindrical valve chamber 36 communicating with the outlet port 33 and the discharge port 35 is arranged. The housing 37 is fixed to the main body 2 with a bolt or the like (not shown) by fitting a protrusion 37b provided on an end surface 37a on the left side in the figure into the inner hole 3a of the sleeve 3. The above valve chamber 36
The spool 38 is slidably fitted into the spool 3.
A land 39 provided at 8 opens and closes between the outlet port 33 and the inlet port 32 and between the outlet port 33 and the discharge port 35. Land 3 above
9 is set to zero wrap with respect to the annular WIF 34 communicating with the output port 33. Further, a land 40b is formed at one end of the spool 38, while a land 40b is formed at one end of the spool 38.
A land 40a is formed at the other end. The land 40a of the spool 38 is fixed to the right end surface 5c of the detection body 5 in the figure through the coupling portion 43, so that the detection body 5 and the spool 38 move together.

The proportional solenoid 61 has an electromagnetic coil 62 and a movable iron core 6.
3, and the end face of the shaft 64 of the movable iron core 63 is in contact with the end face of the land 40b of the spool 38.

Therefore, when the electromagnetic coil 62 is excited, the movable iron core 63 urges the spool 38 to the left in the figure with a force proportional to the voltage applied to the electromagnetic coil.

On the other hand, a cover 51 is attached to the left end surface of the main body 2 in FIG.
A protrusion 51b provided on the end face 51a of the sleeve 3 is fitted into the inner hole 3a of the sleeve 3, and is fixed with a bolt (not shown). Cover 5 above! The first spring 54 is compressed between the end 51a of the detection body 5 and the plug 14, while the detection body 5
A second spring 55 is compressed between the right end surface 5c of the housing 37 and the end surface of the protrusion 37b of the housing 37. therefore,
When the flow rate detection section is not operating, the detection body 5 is located at a neutral position due to the biasing force of the first spring 54 and the second spring 55, and even if the detection body 5 moves within a predetermined range, the inflow Passage + 7.17. ... and the annular groove 11a of the detection body 5 are communicated with each other.

A right ventricle 4. facing the right end 5c of the detection body 5 is attached to the sleeve 3. A hole 44.45 is provided that constantly communicates Ia with the outside of the sleeve 3, and an annular groove 44a that communicates with the hole 44.45 is provided in the outer peripheral portion 3b of the sleeve 3. Further, the main body 2 is provided with a communication hole 49 that communicates with the annular J44a.

On the other hand, the flow rate "AA adjusting section includes a housing 72 having a norinda-shaped valve chamber 73 therein that communicates with an inlet port 76 and an outlet port 77, and a housing 72 that is slidably fitted into the valve chamber 73 to provide a valve. It consists of a valve body 75 that moves toward and away from the seat 78. An end portion 75 of the valve body 75 that comes into contact with the valve seat 78
a has a conical shape, and when moving inside the valve chamber 73 to the left in the figure, it comes into close contact with the valve seat 78 and blocks the flow of fluid from the inlet port 76 to the outlet port 77. Further, a spring 80 is installed in seven pilot chambers formed by the end 75b of the valve body 75 and the valve chamber 73 and communicated with the pilot port 81.
is compressed, and the valve body 75 is biased to the left in the figure.

The inlet port 76 of the flow rate adjusting section 71 is connected to the pressure source 83 by a main line 84, the outlet port 77 and the inlet I9 of the flow rate detecting section I are connected by a main line 85, and the outlet port 2 [ Connect the main line 87. In addition, the input port 32 is connected to the pilot line 88.
It is connected to the main line 84 via. In addition, a pilot line 9 having a throttle 89 is connected to the outlet port 33.
1 to the pilot port 81 of the flow rate adjustment section 71.
The discharge port 35 is connected to the tank 92. Furthermore, the pilot chamber 79 of the flow rate adjustment section 7I
Through the line 98 with throttle 97 the above plug I4
It is connected to the left ventricle 41b facing the end surface of the left ventricle 41b.

Further, the communication hole 49 provided in the main body 2 is connected to the exit port 33 side of the pilot line 91 from the throttle 89 via a line 94 having a throttle 93 . The movable iron chamber 66 of the proportional solenoid 61 is connected to the pilot line 91 via a line 96, and the proportional solenoid 6
1 is made into an ura immersion shape.

The flow regulating valve having the above configuration operates as follows.

The fluid supplied from the pressure source 83 is supplied to the main line 8
4.85 and flows into the flow rate detection section l. The m body that has flowed into the flow rate detection wIl is transferred to the annular groove 20 of the main body 2. Four inflow passages 17° 17° of the sleeve 3, an annular groove 11a and four holes 11j of the detection body 5 1. ... and flows into the chamber 15 of the detection object 5. Furthermore, the above chamber I5
The fluid that has flowed into the detector 5 flows through the eight outflow passages 13 of the detection body 5.
,13. ..., annular groove 18a of sleeve 3, eight holes 18. +8. -=, annular 1 of body 2? i 24 and flows out from the outlet 21.

At this time, the closed curved surface consisting of the outer circumferential surface 5e of the detection body 5 and both end surfaces 5b and 5c of the detection body 5 can be considered as an inspection surface. Therefore, the inflow passage 17. +
7. . . at a constant angle to the axis of the detection body 5 and provided in the inspection surface. The change in momentum within the inspection surface of the fluid flowing out at a constant angle from ... is equal to the force F acting on the object within the inspection surface (in this case, the detection object 5), and this force F is expressed by the above equation ( 2).

As already mentioned, in this embodiment, the inflow passage 17
, 17°... and the outflow passage 13. +3.・・・
The angle θ, is equal to (=O), and the cross-sectional area Δ1 of the inlet
and the cross-sectional area A of the outlet are set equal. Therefore, as expressed by equation (3), the fluid entering the inspection surface including the outer circumferential surface 5e and flowing out from the inspection surface is subjected to a force F proportional to the mass flow rate of the fluid on the detection body 5. This force F urges the detection body 5 to the right. Here, the outer circumferential surface of the detection body 5 forming a part of the inspection surface is a cylindrical surface including the surfaces 5 e, 5 e, . (corresponding to the inner peripheral surface 3a of the sleeve 3).

On the other hand, the biasing force of the proportional solenoid 61 acts on the detection body 5 in a direction opposing the force F.

Therefore, when the flow rate flowing through the main line 85, 87 becomes larger than the set value, the force F acting on the detection body 5 increases due to a change in the momentum of the fluid, and the detection body 5 moves from the equilibrium position with the proportional solenoid 61 to the above-described position. proportional solenoid 6
1 biasing force and the 1st biasing force. It is displaced to the right in the figure against the biasing force of the second springs 54 and 55. Then, the above spool 3
The land 39 of No. 8 is connected to the input port 32 and the output port 33.
The fluid supplied through the pilot line 88 is supplied to the pilot port 81 through the pilot line 91 having a calibration 89.

Then, the valve body 75 of the flow rate adjustment section 71 moves to the left in FIG. 1 and tends to close the space between the artificial port 76 and the outlet port 77. Therefore, the flow rate supplied to the detection body 5 decreases, and the mass flow 9 is controlled to a set value corresponding to the applied current of the proportional solenoid 61.

On the other hand, when the flow rate flowing through the main lines 85, 87 becomes less than the set value, the force F acting on the detection body 5 decreases.

Then, the detection body 5 is displaced from the equilibrium position to the left in the figure by the biasing force of the proportional solenoid 61. and,
The land 39 is connected to the outlet port 33 and the discharge port 35.
The fluid in the pilot chamber 79 is discharged to the tank 92 via the pilot line 91. Then,
The valve body 75 is moved to the right by the fluid pressure supplied from the inlet port to increase its opening degree. Therefore, the flow rate supplied to the detection body 5 increases, and the mass flow rate reaches the set value.

Further, as a result of the flow rate being adjusted by the flow rate adjustment section 71, the flow rate supplied to the detection body 5 changes, and the momentum of the fluid, that is, the force F acting on the detection body 5 changes due to the change in the flow rate, and the force F acting on the detection body 5 changes again. The detection body 5 attempts to return to an equilibrium position that balances the biasing force of the proportional solenoid 61. This change in the force F acting on the detection body 5 based on the change in the momentum of the fluid is caused by the operation of the valve body 75 of the flow rate adjustment section 71, which causes the fluid to flow into the main line 8.
5 and the detection body 5, a time lag occurs between the actuation of the valve body 75 and the change in force F due to the influence of the mass and compressibility of the fluid in the main line 85.
The opening degree of the valve body 75 of the flow rate adjustment section 71 tends to be unstablely controlled to 0 degrees. However, in this flow full valve adjustment, minor feedback is generated as described below, so that the upper δ self time lag works in the direction of eliminating, and the opening degree of the valve body 75 of the flow full valve adjustment section 71 becomes unstable. In other words, for example, if the detected flow rate becomes higher than the set value, the detection body 5 moves to the right, and the valve body 75 of the flow rate adjustment section 71 moves in the direction of decreasing the opening degree. ,
From the outlet port 33, pass through a pilot line 91 having a calibration 89, a pilot chamber 79 of the flow rate adjustment section 71, and a line 98 to the left chamber 41b facing the left end of the detection body 5 in the figure.
The detection body 5
Since the pressure of the fluid supplied to the right chamber 41a facing the right end of the valve and the fluid supplied from the outlet port 33 to the movable core chamber 66 via the line 96 is high, the mass flow rate of the fluid is adjusted. Before and after the detection, a force in the direction opposite to the control direction acts on the detection body 5, that is, the spool 38, in a time-progressive manner. Therefore, the operation of the spool and, by extension, the opening degree of the valve body 75 are not controlled excessively. In other words,
The time lag for the change in the force F caused by the change in the valve body 75 due to the change in the main flow rate is alleviated in a favorable direction, and the flow rate is quickly adjusted to the set value and quickly stabilized.

On the other hand, when the detected flow rate becomes lower than the set value and the detection body 5 moves in the opposite direction to that described above, that is, to the left, and the valve body 75 moves in the direction of increasing the opening degree (to the right in the figure), the fluid A part of the fluid discharged from the pilot chamber 79 of the adjustment section 71 flows into the left chamber 41b facing the left end of the detection body 5 through a line 98 having a throttle 97. The pressure of the fluid flowing into the left ventricle 41b is the same as that in the line 94. a right ventricle 41a that is open to a tank 92 via a pilot line 91;
Detection object 5
That is, minor feedback is applied to the spool 38 toward the right, and the opening degree of the valve body 75 is not excessively controlled, and the flow rate is quickly adjusted to the set value, and the flow rate is quickly stabilized.

That is, by repeating the above-described operation, this flow rate adjustment valve can quickly adjust the mass flow rate of the main line 87 to a mass flow rate corresponding to the preset biasing force of the proportional solenoid 6I.

This flow rate adjustment valve detects the mass flow rate with the detection body 5 and adjusts the flow rate, so the mass flow rate can be adjusted without being affected by changes in viscosity due to changes in fluid temperature. The mass flow rate, such as a flow containing bubbles, can be accurately adjusted to a set flow rate. Therefore, since this flow rate adjustment valve is operated by the mass flow rate of the fluid, it is possible to adjust the flow rate to a constant level regardless of the pressure difference that occurs before and after the flow adjustment section 71 or the fluid force that occurs in the valve body 75. can. Furthermore, as a result of adjusting the flow rate, minor feedback is applied to the detection body 5 in advance of detecting a change in the flow rate of the main line 85, so that the valve body 7
5 is not adjusted excessively, and the mass flow rate can be quickly adjusted to the set value.

In the above embodiment, since the spool 38 is set to zero wrap and the detection body 5 and the spool 38 are linked, the flow rate adjustment section 7I can be operated by a slight movement of the detection body 5.
Extremely responsive.

In the above embodiment, the annular groove 11a, the hole II,
Room 15. Although a flow path consisting of an outflow passage 13 is provided, the present invention allows fluid to flow in at a constant angle to the inspection surface including the outer circumferential surface 5e of the detection body 5, and further to flow out from the inspection surface at a constant angle. Any device that can detect the mass flow rate based on the change in momentum of the detector 5 is sufficient, and it is not necessarily necessary to form a flow path within the detector 5. In other words, the detection body may have any shape as long as it can convert a change in momentum of the fluid into force.

Further, in the above embodiment, the sleeve 3 is interposed between the detection body 5 and the main body 2, and the inflow passages 17, 1 are inserted into the sleeve.
7. . . , an annular groove 18a, a hole 18, etc. for flowing out the fluid, but the present invention is not limited to this, and the main body 2 is provided with an inflow passage and an outflow passage without using the sleeve 3. There is no problem if you set it up directly. Further, in the above embodiment, the inflow angle θ1 to the detection body 5 and the outflow angle θ from the inside of the detection body 5 are set to the same value, and the cross-sectional area of the inflow port is A.
.

and the cross-sectional area A of the outflow port are set to the same value, but in this invention, only one of the inflow and outflow angles may be set at a constant inclination angle, or the inflow angle and the outflow angle may be set to different values. Good too. Further, the cross-sectional areas of the inlet and outlet may be set to different values.

In the above embodiment, the land 38a of the spool 38 is set to zero wrap, but the land 38a is not limited to this, and may be overlapping or ungrabbing. Further, the mass flow rate setting means is not limited to a proportional solenoid, but may be a hand lever that biases a spring.

<Effects of the Invention> As is clear from the above, the flow rate regulating valve of the present invention includes a flow rate detection section and a flow rate adjustment section in the flow path of the fluid whose flow rate is to be adjusted, and the fluid is Applying a force due to the change in momentum of , balancing this force with the force of the mass flow rate setting means to operate the spool connected to the detection body,
Since the flow rate is adjusted by operating the valve body of the flow rate adjustment section, the flow rate can be adjusted by detecting the mass flow rate of the fluid.
Therefore, it is possible to accurately adjust the mass flow rate without being affected by changes in viscosity due to changes in fluid temperature, and it is also possible to accurately adjust the mass flow rate of flows that cause cavitation, flows that contain bubbles, etc. to the set flow rate. Can be done. Further, a pilot chamber of the flow rate adjustment section is connected to the outlet port via a pilot line having a throttle, and a chamber facing one end surface of the detection body is connected between the throttle and the outlet port, The chamber facing the other end of the detection body is connected to the pilot chamber of the flow adjustment section, and the detection body is used to detect that the mass flow rate has been adjusted by the flow rate adjustment section, and also to supply fluid to the detection body. Since the pressure is used to apply a force in the opposite direction to the control direction on the detection body, that is, the spool, the valve body of the flow rate adjustment section is not overly controlled, and the mass flow rate can be adjusted to the set value extremely quickly. There are advantages.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of a flow rate regulating valve according to an embodiment of the present invention, FIG. 2 is an explanatory diagram of the principle of mass flow rate detection, and FIG. 3 is a diagram showing a conventional flow rate regulating valve. l...Flow rate detection section, 2...Main body, 5...Detection object, 13...Outflow passage, 17...Inflow passage, 3
2...Inlet port, 33...Outlet port, 35
...Discharge port, 38...Spool, 61...
Mass flow rate setting means, 71...Flow rate adjustment section, 75...
Valve body, 76... Population port, 77... Outlet port, 79... Pilot chamber, 81... Pilot port. Figure 2 F = 9- Q (V+ coset -VzCO5
e2) Figure 3

Claims (1)

[Claims] (1) A main body (2) having a cylindrical chamber inside, a detection body (5) that is slidably fitted into the chamber, and a detection body (5) that is slidably fitted into the chamber.
5), the inlet port (32) and outlet port (33)
); an inflow passageway (17) provided in the main body (2) that guides the fluid to the detection body (5); a flow rate detection unit (1) having an outflow passage (13) that guides the fluid guided by the passage (17) to the main body; and a valve that controls the flow rate of the fluid whose flow rate is detected by the flow rate detection unit (1). a flow rate adjusting section (75) having a pilot chamber (79) formed at one end of the valve body (75);
71) and the detection body (5) is urged with a predetermined force to detect the detection body (5).
A mass flow rate setting means (61) is provided for adjusting the flow rate by operating the spool (38) in balance with the force due to a change in momentum of the fluid acting on the inflow passage (17).
), at least one of the outflow passages (13) (17
Or, the pilot line (13) is formed at a constant inclination angle with respect to the axis of the detection body (5), and the pilot chamber (79) of the flow rate adjustment section (71) is configured to have a throttle (89).
91) to the outlet port (33) and a chamber (41a) facing one end surface of the detection body (5) between the aperture (89) and the outlet port (33). while the chamber (4) faces the other end surface of the detection body (5).
1b) in the pilot chamber (79) of the flow rate adjustment section (71).
) A flow rate regulating valve characterized by being connected to.