JPS63180112A - Flow rate control valve - Google Patents

Abstract

PURPOSE:To accurately control a mass flow rate to a set flow rate with no influence of the change of viscosity for a flow where a cavitation is produced or a flow containing air bubbles, etc., by detecting the momentum change of a fluid proportional to the mass flow rate and controlling the flow rates. CONSTITUTION:The fluid supplied to the main body of a flow rate detecting part 1 is led into a detector 5 at a fixed flow-in angle via a flow path 17 as well as into the main body of the part 1 at a fixed flow-out angle via a flow path 13. In this case, the detector 5 receives the force proportional to a mass flow rate by the momentum change of the fluid. Thus, a spool 38 fixed to the detector 5 is moved up to the balanced position between the force proportional to said mass flow rate and the energizing force of a flow rate setting means 61. As a result, the switching connection is secured among plural ports and the supply path of the fluid is opened and closed by a valve body 75 of a flow rate control part 71 owing to the fluid pressure of a chamber 79 formed at an end of the body 75. Then, the mass flow rate of a fluid is controlled. Thus, it is possible to accurately control the mass flow rate to a set rate even with a flow where the cavitation is produced or a flow containing air bubbles.

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a flow rate regulating valve that detects the mass flow rate of a fluid and adjusts the flow rate.

<Prior Art> Conventionally, there is a flow regulating valve as shown in FIG. 3. This flow rate adjustment valve includes an electromagnetic throttle valve 101 and a pressure compensation valve 102 that controls the differential pressure between the upstream side and the downstream side of the electromagnetic throttle valve to a constant value. The flow rate is controlled accordingly.

<Problems to be Solved by the Invention> However, the above-mentioned conventional flow rate regulating valve has a problem in that the pressure compensating valve 102
Since the flow rate is adjusted by the opening degree of the throttle valve 101, which compensates for a constant pressure difference between the upstream and downstream sides, the actual flow rate is not measured and controlled, and the flow rate control becomes uncertain. There is a problem with becoming. In other words, the flow rate regulating valve does not directly detect the flow rate to control the flow rate, and if the pressure difference across the electromagnetic throttle valve 101 is constant, the electromagnetic throttle valve 1
The flow rate is indirectly controlled by assuming that the flow rate is proportional to the opening degree of 01. Therefore, there is a problem in that it is not possible to accurately adjust the flow rate of a flow that causes a viscosity change, a flow that causes cavitation, a flow that contains bubbles, etc. due to a temperature change.

Therefore, the purpose of this invention is to adjust the flow rate by detecting the change in the momentum of the fluid that is proportional to the mass flow rate, thereby eliminating the influence of viscosity changes and reducing the mass flow of cavitation-generating flows and flows containing bubbles. An object of the present invention is to provide a flow rate regulating valve that can accurately adjust the flow rate to a set flow rate.

Means for Solving the Problems> In order to achieve the above object, the flow rate regulating valve of the present invention has a main body 2 having a cylindrical chamber inside, and a slider inside the chamber, as illustrated in FIG. A detecting body 5 that is movably fitted, a spool 38 that interlocks with the detecting body 5 and mutually switches and connects a plurality of ports, and an inflow passage provided in the main body that guides fluid to the detecting body 5. 17, a flow rate detection section l having an outflow passage I3 provided in the detection body 5 and guiding the fluid led by the inflow passage 17 to the main body, and a valve that opens and closes a supply passage communicating with the inflow passage 17. a chamber 7 formed at one end of the valve body 75 and connected to one pressure-controlled port of the plurality of ports.
9; and a flow rate setting that urges the detection body 5 with a predetermined force and operates the spool 38 in balance with the force due to a change in the momentum of the fluid acting on the detection body 5. means 61, said inflow passage 17. The present invention is characterized in that at least one of the outflow passages 13, I7 or 13, is formed at a constant inclination angle with respect to the axis of the detection body 5.

Here, the principle of this invention will be explained with reference to FIG.
It will look like this:

The force F acting on the inspection surface S can be expressed as: F=[momentum of the fluid flowing into the inspection surface S]−[momentum of the fluid flowing out from the inspection surface S].

That is, the inflow angle of the fluid flowing into the inspection surface S with respect to a certain direction is θ1, the outflow angle of the fluid flowing out from the inspection surface S with respect to the above fixed direction is θ3, the inflow velocity of the fluid into the inspection surface S is 1, the inspection surface Assuming that the outflow velocity of the fluid from S is V9, and the flow rate of the fluid flowing into and out of the inspection surface S is Q, the equation for the momentum of the inspection surface S in a certain direction can be expressed as follows.

F = p −Q(V, cos θ, −V, cos
θ - (1) Here, if the cross-sectional area of the inlet for guiding the fluid to the inspection surface S is A1, and the cross-sectional area of the outlet for flowing the fluid from the inspection surface S is A, then the formula ( 1)%
The formula is %. Therefore, the mass flow rate (ρ・Q) is θ,A.

It can be expressed as a force function in a fixed direction with ρ as a constant, and by controlling the opening degree of the valve based on the force F representing this flow rate, the mass flow rate can be directly controlled.

The present invention is constructed with attention paid to this point.

Effect> The fluid supplied to the main body of the flow rate detecting section 1 is guided into the detecting body 5 at a constant inflow angle by the inflow passage 17 provided in the main body. Further, the fluid changes its direction within the detection body 5 and is guided into the main body at a constant outflow angle by an outflow passage I3 provided within the detection body 5. At that time, the detection body 5 receives a force proportional to the mass flow rate due to a change in the momentum of the fluid. Therefore, the spool 38 fixed to the detection body 5 moves to a position where the force proportional to the mass flow rate and the urging force of the flow rate setting means 61 are balanced, and a plurality of ports are switched and connected to adjust the flow rate. The fluid pressure in a chamber 79 formed at one end of the valve body 75 of the section 7I is controlled. Then, the fluid supply flow path for the fluid is opened and closed by the valve body 75 by the fluid pressure in the chamber 79, and the mass flow rate of the fluid is adjusted. Therefore, even in a flow that causes cavitation or a flow that contains bubbles, the mass flow rate can be accurately adjusted to the set protozoa.

<Example> Hereinafter, the present invention will be explained in detail with reference to illustrated embodiments.

FIG. 1 shows a flow rate regulating valve that is schematically constituted by a flow rate detection section 1, a flow rate adjustment section 71, and a proportional solenoid 61 which is a flow rate setting means.

The flow rate detection unit l includes a main body 2 having a cylindrical shaft hole 2a in the axial direction, a sleeve 3 fitted in the shaft hole 2a,
It includes a cylindrical detection body 5 slidably fitted into the hole 3a of the sleeve 3 and a spool 38 fixed to the detection body 5.

The detection body 5 has a hole 5a extending along the axis from the left end surface 5b in the figure.
, and screw the plug 14 into this hole 5a to close the hole 5a.
is sealed to form a chamber I5 within the detection body 5. Further, an annular groove 11a is provided on the outer circumferential surface 5e of the detection body 5, and four holes 1 are provided to communicate the annular groove 11a and the chamber 15.
1,11. ... are provided at equal intervals on the circumference. Furthermore, eight outflow passages communicating from the outer circumferential surface 5e of the detection body 5 to the chamber 15+3.13. ... are provided at equal intervals on the circumference at an angle θ with respect to the axis of the detection body 5.

Four inflow passages 17, 17. which penetrate from the outer peripheral surface 3b of the sleeve 3 to the hole 3a thereof. ... are provided at equal intervals on the circumference. Above inflow passage +7.17. ... is the detection object 5
The inflow angle with respect to the axis of the outflow passage 13°13,...
・Make the same angle θ. In addition, the above inflow passage + 7.1
7. The cross-sectional area of... is the outflow passage above! 3゜13,...
・Make it the same as the cross-sectional area of . Furthermore, an annular groove 18a is provided on the inner circumferential surface 3a of the sleeve 3, and eight holes 18°+8. ... are provided at equal intervals on the circumference.

The main body 2 is provided with an inlet 19 communicating with the annular groove 11a, and the main body 2 is provided with an outlet 21. Furthermore, the four inflow passages 17. +7
．． An annular groove 20 is provided to communicate the inflow port 1'9 with the inflow port 1'9, so that the fluid flowing in from the inflow port 19 flows through the inflow passage 17.1.
7. I try to make it flow into... Similarly, the holes 18, 18, . . . of the sleeve 3 are connected to the outlet 2.
An annular groove 24 is provided to communicate with the outflow passages 13 and 1.
3. The fluid flowing out from... is discharged to the outside from the outlet 2I.

The first port 32. is located on the right side in FIG.
A housing 37 having a sliding valve chamber 36 communicating with the second port 33 and the discharge port 35 is disposed. The housing 37 is fixed to the main body 2 with a bolt or the like (not shown) by fitting a protrusion 37b provided on an end surface 37a on the left side in the figure into the inner hole 3a of the sleeve 3. The above valve chamber 36
The spool 38 is slidably fitted into the spool 3.
The land 39 provided at 8 connects the second port 33 and the first port.
It is configured to open and close between the port 32 and the second port 33 and the discharge port 35. Land 3 above
9 is set to zero wrap with respect to the annular groove 34 communicating with the second port 33. Further, a land 40b is formed at one end of the spool 38, and a land 40a is formed at the other end of the spool 38. Then, the land 40a of the spool 38 is fixed to the right end surface 5C of the detection body 5 in the figure via the coupling part 43, and the detection body 5 and the spool 3
8 move together as one.

The proportional solenoid 61 has an electromagnetic coil 62 and a movable iron core 6.
3, and the end face of the shaft 64 of the movable iron core 63 is in contact with the end face of the land 40b of the spool 38.

Therefore, when the electromagnetic coil 62 is excited, the movable iron core 63 urges the spool 38 to the left in the figure with a force proportional to the voltage applied to the electromagnetic coil.

On the other hand, a cover 51 is fixed to the end surface of the main body 2 with bolts (not shown). One end surface 51 of the cover 51
A service hole 56 is provided in the center of the stepped hole 56, and a protrusion 58a that protrudes into the left chamber 42 facing the plug 14 is provided in the stepped hole 56.
Fit the cover plug 58 with the lock nut 59
It is fixed at

A first spring 54 is compressed between the cover plug 58 and the plug 14, and a second spring 55 is compressed between the right end surface 5c of the detection body 5 and the end surface of the protrusion 37b of the housing 37. do. Therefore, when the flow rate detection section l is not operating, the detection body 5 is located at the neutral position due to the biasing force of the first spring 54 and the second spring 55, and even if the detection body 5 moves within a predetermined range. The openings of the inflow passages 17, 17, . . . and the annular groove 11 of the detection body 5
I am trying to communicate with a. Note that the stepped hole 56
The space between the cover plug 8 and the cover plug 8 is sealed with an O-ring 57.

A hole 44 is provided in the sleeve 3 through which the right ventricle 4I facing the right end surface 5c of the detection body 5 is constantly communicated with the outside of the sleeve 3.
．． 45, and an annular groove 44 communicating with the hole 44.45.
a is provided on the outer peripheral surface 3b of the sleeve 3. Similarly, the sleeve 3 is provided with holes 46 and 47 that are always in communication with the left chamber 42 facing the end surface of the plug 14, and an annular groove 46a that communicates with the holes 46 and 47 is provided in the outer peripheral surface 3b of the sleeve 3.

Further, the main body 2 is provided with a communication hole 49 communicating with the annular groove 44a and a communication hole 50 communicating with the annular groove 46a, so that the right chamber 41 and the left chamber 42 are opened to the outside of the main body 2. There is.

On the other hand, the flow rate adjustment section 71 includes a housing 72 having a cylindrical valve chamber 73 therein communicating with an inlet port 76 and an outlet port 77, and a valve seat that is slidably fitted into the valve chamber 73. The valve body 75 is configured to move toward and away from the valve body 78. The end 75 of the valve body 75 that comes into contact with the valve seat 78
a has a conical shape, and when moving inside the valve chamber 73 to the pressure shown in the figure, it comes into close contact with the valve seat 78 and blocks the flow of fluid from the inlet port 76 to the outlet port 77. Further, a spring 80 is compressed in a chamber 79 formed by the end surface 75b of the valve body 75 and the valve chamber 73 and communicating with the pilot port 81,
The valve body 75 is biased to the left in the figure.

The inlet port 76 of the flow rate adjusting section 71 is connected to the pressure source 83 via a main line 84, the outlet port 77 and the inlet port 19 of the flow rate detecting section I are connected via a main line 85, and the outlet port 21 is connected to the main line 84. Connect line 87. Also, the first port 32 is connected to the pilot line 88.
It is connected to the main line 84 via. Further, the second port 33 is connected to a pilot line 9 having a throttle 89.
Pilot port 81 of the flow rate adjustment section 71 via I
The discharge port 35 is connected to the tank 92.

Furthermore, the communication hole 49 provided in the main body 2 is connected to the main line 87 via a line 94 having an aperture 93, and the communication hole 50 is connected to the main line 87 via a line 95. Therefore, the chamber 4 of the flow rate detection section l
1. Drain generated in 42 is drained through holes 44, 45, 46,
47, annular groove 44a.

46a, communication holes 49 and 50, and lines 94 and 95 to be discharged to the main line 87. Above proportional solenoid 6
The movable iron chamber 66 of 1 is connected to the line 9 via the line 96.
4, the proportional solenoid 61 is of an oil-immersed type.

The flow rate regulating valve configured as described above operates as follows.

The fluid supplied from the pressure source 83 is supplied to the main line 8
4.85 and flows into the flow rate detection section l. The fluid that has flowed into the flow rate detection section l is transferred to the annular groove 20 of the main body 2. The four inflow passages 17°17 of the sleeve 3,..., the annular shape 111a of the detection body 5 and the four holes 11.11. ... and flows into the chamber 15 of the detection object 5. Furthermore, the above chamber l
The fluid that has flowed into S flows through the eight outflow passages 1 of the detection body 5.
3.1'3. ..., annular 7i918a of sleeve 3,
Eight holes 18, 18. -... passes through the annular groove 24 of the main body 2 and flows out from the outlet 21.

At this time, the closed curved surface consisting of the outer circumferential surface 5e of the detection body 5 and both end surfaces 5b and 5c of the detection body 5 can be considered as an inspection surface. Therefore, the inflow passages 17, 1
7. . . at a constant angle to the axis of the detection body 5 and provided in the inspection surface. The change in momentum within the inspection plane of the fluid flowing out at a constant angle from ... is equal to the force F acting on the object within the inspection plane (in this case, the detection object 5), and this force F is expressed by the above equation. Obtained from (2). As already mentioned, in this embodiment, the inflow passage 1
Angle θ of 7,17°... and outflow passages 13,13.・
The angle θ! is equal to (-〇), and the cross-sectional area of the inlet is A
1 and the cross-sectional area A of the outlet are set equal. Therefore, as expressed by equation (3), the fluid flowing into the inspection surface including the outer circumferential surface 5e and further flowing out from the inspection surface has a force F proportional to the mass flow rate of the fluid on the detection body 5.
This force F urges the detection body 5 to the right. Here, the outer circumferential surface of the detection body 5 forming a part of the inspection surface is a cylindrical surface including the surfaces 5 e, 5 e, . (corresponding to the inner peripheral surface 3a of the sleeve 3).

On the other hand, the biasing force of the proportional solenoid 61 acts on the detection body 5 in a direction opposing the force F.

Therefore, when the flow rate flowing through the main line 85, 87 exceeds the set value, the force F acting on the detection body 5 increases due to a change in the momentum of the fluid, and the detection body 5 moves from the equilibrium position with the proportional solenoid 61 to the above-described position. proportional solenoid 6
1 biasing force and the 1st biasing force. It is displaced to the right in the figure against the biasing force of the second springs 54 and 55. Then, the above spool 3
The land 39 of No. 8 is connected to the first port 32 and the second port 33.
The fluid supplied through the pilot line 88 is supplied to the pilot port 81 through a pilot line 91 having a throttle 89.

Then, the valve body 75 of the flow ff1l adjusting section 71 moves to the left in FIG. 1 to reduce the opening degree between the inlet port 76 and the outlet port 77. Therefore, the flow rate supplied to the detection body 5 decreases, and the mass flow rate is controlled to a set value corresponding to the current applied to the proportional solenoid 61. Furthermore, due to this decrease in flow rate, the force F acting on the detection body 5 due to the change in momentum decreases, and the detection body 5 returns to the equilibrium position where it balances the biasing force of the proportional solenoid 61 again.

On the other hand, when the flow rate flowing through the main lines 85, 87 becomes less than the set value, the force F acting on the detection body 5 decreases.

Then, the detection body 5 moves from the equilibrium position to the proportional solenoid 6! It is displaced to the left in the figure due to the biasing force of . and,
The land 39 is connected to the second port 33 and the discharge port 35.
The fluid in the chamber 79 is transferred to the pilot line 9 by opening the gap between the
1 into a tank 92. Then, the valve body 75 is moved to the right by the fluid pressure supplied from the inlet port to increase its opening degree. Therefore, the flow rate supplied to the detection body 5 increases, and the mass flow rate reaches the set value. Further, due to the increase in the change in momentum caused by this, the force F acting on the detection body 5 increases, and the detection body 5 returns to the equilibrium position where it balances the biasing force of the proportional solenoid 61 again. That is, this flow FAR regulating valve adjusts the mass flow rate of the main line 87 to a mass flow rate corresponding to the preset biasing force of the proportional solenoid 61 by repeating the above-described operation.

This flow rate adjustment valve detects the mass flow rate with the detection body 5 and adjusts the flow rate, so the mass flow rate can be adjusted without being affected by changes in viscosity due to temperature changes of the fluid. The mass flow rate, such as a flow containing bubbles, can be accurately adjusted to the set flow m. Moreover, since this flow rate adjustment valve is operated by the mass flow rate of the fluid, even if a pressure difference occurs before and after the flow rate adjustment section 71, the flow rate can be adjusted to a constant value.

In the above embodiment, since the spool 38 is set to zero wrap and the detection body 5 and the spool 38 are directly connected, the flow rate adjustment section 7I can be operated by a slight movement of the detection body 5.
Extremely responsive.

In the above embodiment, the annular groove 11a, the hole 11,
Room 15. Although a flow path consisting of an outflow passage I3 is provided, this invention allows fluid to flow in at a constant angle to the inspection surface including the outer circumferential surface 5e of the detection body 5, and further to flow out from the inspection surface at a constant angle. Any device that can detect the mass flow rate based on the change in momentum of the detector 5 is sufficient, and it is not necessarily necessary to form a flow path within the detector 5. In other words, the detection body may have any shape as long as it can convert a change in fluid momentum into force.

Further, in the above embodiment, the sleeve 3 is interposed between the detection body 5 and the main body 2, and the inflow passage +7.
17. . . , an annular groove 18a, a hole 18, etc. for flowing out the fluid, but the present invention is not limited to this, and the main body 2 is provided with an inflow passage and an outflow passage without using the sleeve 3. There is no problem even if it is directly installed. Further, in the above embodiment, the inflow angle θ1 to the detection body 5 and the detection body 5
The outflow angle θ from the inside is set to the same value, and the cross-sectional area A1 of the inlet and the cross-sectional area A2 of the outlet are set to the same value,
In this invention, only one of the inflow and outflow angles may be set at a constant inclination angle, or the inflow and outflow angles may be set to different values. Further, the cross-sectional areas of the inlet and outlet may be set to different values.

In the above embodiment, the land 38a of the spool 38 is set to zero wrap, but the land 38a is not limited to this, and may be overlapping or ungrabbing. Further, the flow rate setting means is not limited to a proportional solenoid, but may be a hand lever that biases a spring.

<Effects of the Invention> As is clear from the above, the flow rate regulating valve of the present invention includes a flow rate detection section and a flow rate adjustment section in the fluid supply flow path, and the detection body of the flow rate detection section is provided with By applying a force, the spool connected to the detection body is actuated by balancing this force with the force of the flow rate setting means, and the flow rate is adjusted while avoiding actuation of the valve body of the flow rate adjustment section, so that the mass of the fluid can be adjusted. It is possible to detect the flow rate and adjust the flow rate. Therefore, the mass flow rate can be adjusted accurately without being affected by changes in viscosity due to changes in fluid temperature. The mass flow rate can be precisely adjusted to the set flow rate.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of a flow rate regulating valve according to an embodiment of the present invention, FIG. 2 is an explanatory diagram of the principle of mass flow rate detection, and FIG. 3 is a diagram showing a conventional flow rate regulating valve. ■...Flow rate detection section, 2...Main body, 5...Detection object, 13...Outflow passage, I7...Inflow passage, 3
2...First port, 33...Second port, 35.
...Discharge port, 38...Spool, 61...Flow rate setting means, 7I...Flow rate adjustment section, 75...Valve body,
76...Inlet port, 77...Outlet port, 79...Chamber, 8I...Pilot port. Patent applicant Agent: Daikin Industries, Ltd.
Person Patent attorney Aoyama Ao and 2 others Figure 2

Claims (1)

[Claims] (1) A main body (2) having a cylindrical chamber inside, a detection body (5) that is slidably fitted into the chamber, and a detection body (5) that operates in conjunction with the detection body (5) to connect a plurality of ports. A spool (38) which is switchably connected to each other, an inflow passageway (17) provided in the main body that leads fluid to the detection body (5), and an inflow passageway (17) provided in the detection body (5). a flow rate detection unit (1) having an outflow passage (13) that guides the guided fluid to the main body; a valve body (75) that opens and closes a supply passage communicating with the inflow passage (17); and the valve body. (75)
a flow rate adjusting section (71) having a chamber (79) formed at one end and connected to one pressure-controlled port among the plurality of ports; energize the object to be detected (
Flow rate setting means (6) for operating the spool (38) in balance with the force due to the change in momentum of the fluid acting on the flow rate setting means (6).
1), the inflow passage (17) and the outflow passage (13).
), at least one passage (17 or 13),
A flow rate regulating valve characterized in that it is formed at a constant inclination angle with respect to the axis of the detection body (5).