JPS6319320Y2 - - Google Patents

Info

Publication number
JPS6319320Y2
JPS6319320Y2 JP1982134455U JP13445582U JPS6319320Y2 JP S6319320 Y2 JPS6319320 Y2 JP S6319320Y2 JP 1982134455 U JP1982134455 U JP 1982134455U JP 13445582 U JP13445582 U JP 13445582U JP S6319320 Y2 JPS6319320 Y2 JP S6319320Y2
Authority
JP
Japan
Prior art keywords
temperature
evaporated
substance
evaporation
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982134455U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5940356U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13445582U priority Critical patent/JPS5940356U/ja
Publication of JPS5940356U publication Critical patent/JPS5940356U/ja
Application granted granted Critical
Publication of JPS6319320Y2 publication Critical patent/JPS6319320Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Physical Vapour Deposition (AREA)
  • Feedback Control In General (AREA)
JP13445582U 1982-09-04 1982-09-04 蒸発源 Granted JPS5940356U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13445582U JPS5940356U (ja) 1982-09-04 1982-09-04 蒸発源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13445582U JPS5940356U (ja) 1982-09-04 1982-09-04 蒸発源

Publications (2)

Publication Number Publication Date
JPS5940356U JPS5940356U (ja) 1984-03-15
JPS6319320Y2 true JPS6319320Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-05-30

Family

ID=30302953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13445582U Granted JPS5940356U (ja) 1982-09-04 1982-09-04 蒸発源

Country Status (1)

Country Link
JP (1) JPS5940356U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55164365U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-05-15 1980-11-26
JPS56138877U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-03-19 1981-10-20

Also Published As

Publication number Publication date
JPS5940356U (ja) 1984-03-15

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