JPS63192861U - - Google Patents
Info
- Publication number
- JPS63192861U JPS63192861U JP8152987U JP8152987U JPS63192861U JP S63192861 U JPS63192861 U JP S63192861U JP 8152987 U JP8152987 U JP 8152987U JP 8152987 U JP8152987 U JP 8152987U JP S63192861 U JPS63192861 U JP S63192861U
- Authority
- JP
- Japan
- Prior art keywords
- casing
- loading section
- product
- main body
- device main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000007689 inspection Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8152987U JPS63192861U (enExample) | 1987-05-28 | 1987-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8152987U JPS63192861U (enExample) | 1987-05-28 | 1987-05-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63192861U true JPS63192861U (enExample) | 1988-12-12 |
Family
ID=30933351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8152987U Pending JPS63192861U (enExample) | 1987-05-28 | 1987-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63192861U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60224240A (ja) * | 1984-04-20 | 1985-11-08 | Sanko Kuki Sochi Kk | 超清浄対象物の搬送方法と装置 |
| JPS6271835A (ja) * | 1985-09-26 | 1987-04-02 | Hitachi Electronics Eng Co Ltd | 異物検査装置 |
-
1987
- 1987-05-28 JP JP8152987U patent/JPS63192861U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60224240A (ja) * | 1984-04-20 | 1985-11-08 | Sanko Kuki Sochi Kk | 超清浄対象物の搬送方法と装置 |
| JPS6271835A (ja) * | 1985-09-26 | 1987-04-02 | Hitachi Electronics Eng Co Ltd | 異物検査装置 |