JPS63191317A - Production of magnetic recording medium - Google Patents

Production of magnetic recording medium

Info

Publication number
JPS63191317A
JPS63191317A JP2249987A JP2249987A JPS63191317A JP S63191317 A JPS63191317 A JP S63191317A JP 2249987 A JP2249987 A JP 2249987A JP 2249987 A JP2249987 A JP 2249987A JP S63191317 A JPS63191317 A JP S63191317A
Authority
JP
Japan
Prior art keywords
film
coating
magnetic
magnetic recording
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2249987A
Other languages
Japanese (ja)
Inventor
Yoichi Nanba
洋一 南波
Takashi Hasegawa
隆 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP2249987A priority Critical patent/JPS63191317A/en
Publication of JPS63191317A publication Critical patent/JPS63191317A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To produce a medium having high long-term reliability on a lubricating surface by coating an Si(OH)4 soln. on a thin magnetic film and subjecting the coating to a primary heat treatment, then coating a lubricating agent of perfluoropolyethers having at least one polar group and subjecting the coating to a heat treatment. CONSTITUTION:An alumite film is formed by an anodic oxidation treatment on an aluminum substrate and the surface is finished smooth by surface polishing. A thin magnetic oxide film essentially consisting of Fe is formed to 0.13mum thereon by a reactive sputtering method and is further converted to a magnetic gamma-Fe2O3 film by an oxidation treatment in the atm. The Si(OH)4 soln. is then coated on said film by a spin coating method and thereafter, the coating is baked for 3hr at 150 deg.C in an electric furnace to form an SiO2 film in which many silanol groups (Si-OH) remain to about 200Angstrom film thickness. The perfluoropolyether having carboxylic -COOH at the terminal polar group and having about 4,000mol.wt. is diluted by a fluorine solvent to 0.005wt.% and the soln. is coated on the film by a spin coating method. The coating is dried for 10min at 80 deg.C and is baked for 10min at 260 deg.C.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は磁気記録媒体にかかわり、より詳細には大容量
、高密度記録用磁気ディスクに間するもので、表面に潤
滑性の優れた保護層を具備した磁気記録媒体の製造方法
に関する。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to magnetic recording media, and more specifically to magnetic disks for large capacity, high density recording, which have a surface with excellent lubricity and protection. The present invention relates to a method of manufacturing a magnetic recording medium provided with a layer.

〔従来の技術及びその欠点〕[Conventional technology and its drawbacks]

一般に磁気記録装置では、記録再生用磁気ヘッドと磁気
記録媒体(ディスク)とから構成される。該、磁気記録
装置ではコンタクトφスタート・ストップ(CS S)
方式により記録再生が行なわれている。このため記録再
生用磁気ヘッドと磁気記録媒体(ディスク)は互いに静
―或いは動的接触乃至押圧下で作動するため、接触摩擦
状態が現出する。即ち磁気記録媒体では磁性薄膜層を保
護するべく、表面に保護皮膜を被覆し、保護層を形成す
ることが望ましい、この保護層はその目的とするところ
からいわゆる耐ヘッドクラツシユ性、耐摩耗性、潤滑性
、耐環境性、及び下地磁性体に対する磁気特性に影響を
与えない等々の特性を具備していなければならない、さ
らに保護層の重要な機能には磁気記録媒体と記録再生用
ヘッド間に生じる接触摩擦力を極力小さくする、即ち摩
擦係数を小さくすることが要求される。これらの要求を
満たすために、比較的硬質ですぐれた耐摩耗性を有する
5i021iをスパッタ法或いはスピンニート法で形成
し、この上に液体タイプの潤滑剤(例えばパーフルオロ
ポリエーテル類)を塗布する方法が提案されている(特
開昭58−185029 ) 。
Generally, a magnetic recording device is composed of a magnetic head for recording/reproducing and a magnetic recording medium (disk). In the magnetic recording device, contact φ start/stop (CSS)
Recording and reproduction are performed using this method. For this reason, the recording/reproducing magnetic head and the magnetic recording medium (disk) operate in static or dynamic contact with each other or under pressure, resulting in a contact friction state. In other words, in order to protect the magnetic thin film layer of a magnetic recording medium, it is desirable to coat the surface with a protective film and form a protective layer.The purpose of this protective layer is to improve so-called head crash resistance and wear resistance. The protective layer must have properties such as lubricity, environmental resistance, and not affecting the magnetic properties of the underlying magnetic material.Furthermore, the protective layer must have properties such as lubricity, environmental resistance, and no influence on the magnetic properties of the underlying magnetic material. It is required to reduce the contact friction force generated as much as possible, that is, to reduce the friction coefficient. In order to meet these requirements, 5i021i, which is relatively hard and has excellent wear resistance, is formed by a sputtering method or a spin-neat method, and a liquid type lubricant (for example, perfluoropolyethers) is applied thereon. A method has been proposed (Japanese Unexamined Patent Publication No. 58-185029).

しかるに5i02保護膜上に液体潤滑剤を塗布しただけ
では、磁気記録装置(HDA)内の昇温により、液体潤
滑剤分子が蒸発したり、磁気記録媒体(ディスク)の高
速回転により分子がスピンオフし、ヘッドクラッシュに
いたるなど潤滑表面の長期信頼性に欠ける。
However, if a liquid lubricant is simply applied on the 5i02 protective film, the liquid lubricant molecules may evaporate due to the temperature rise inside the magnetic recording device (HDA), or the molecules may spin off due to the high speed rotation of the magnetic recording medium (disk). The lubricated surface lacks long-term reliability, resulting in head crashes.

かかる欠点を除くため、アミノシランを介して5102
保護膜と液体タイプの潤滑剤を化学的に結合させ、固定
する方法も提案されている(昭和81年度電子通信学会
総会予稿集P、1−18? ) 、この場合、5i02
保護膜上に数〜50人程度の膜厚にてアミメジラン層を
形成する方法としてはスピンニート法或いは浸漬法など
が用いられる。しかるにこれらを実施する場合において
、溶剤中に溶解されたアミノシランの反応活性の制御は
極めて難かしく、量産工程での生産性の点から実用性に
問題があった。
In order to eliminate such drawbacks, 5102
A method of chemically bonding and fixing a protective film and a liquid type lubricant has also been proposed (Proceedings of the 1981 IEICE General Meeting P, 1-18?), in this case, 5i02
A spin-neat method, a dipping method, or the like is used to form an amimedilan layer on the protective film to a thickness of several to 50 layers. However, when carrying out these methods, it is extremely difficult to control the reaction activity of the aminosilane dissolved in the solvent, which poses a problem in terms of productivity in the mass production process.

〔問題点を解決するための手段〕[Means for solving problems]

前述の問題点を解消し、保護層として良好な諸特性、特
に保護層表面の潤滑性の長期信頼性に富んだ保護層及び
潤滑層を有する磁気記録媒体を、量産工程にても実現可
能な方法により製造するため研究を重ねた結果、酸化物
磁性薄膜上にスピンコード法により5i(OH)n溶液
を塗布し、100〜180℃程度の低温で一次熱処理を
施して5i02となした後、少なくとも一つの極性基を
有するパーフルオロポリエーテルを塗布する方法の適用
が実用上有効であることを見い出した。
By solving the above-mentioned problems, it is possible to realize a magnetic recording medium having a protective layer and a lubricating layer that have good properties as a protective layer, especially the long-term reliability of the lubricity on the surface of the protective layer, even in a mass production process. As a result of repeated research on manufacturing by this method, after applying a 5i(OH)n solution on an oxide magnetic thin film by a spin code method and performing a primary heat treatment at a low temperature of about 100 to 180°C to form 5i02, It has been found that it is practically effective to apply a method of coating a perfluoropolyether having at least one polar group.

本発明の特徴及び技術的手段、方法などについて以下詳
細に記述する0本発明における非磁性基板は陽極酸化に
より形成されたアルマイト膜を表面に有するアルミニウ
ム及びアルミニウム合金基板などの他、ガラス、セラミ
ックス及び樹脂基板であっても良い、いずれの場合にも
磁気ディスク用基板としての機械的、材質的な面等の諸
特性を具備し、基板表面は鏡面仕上げ又はそれに準する
仕上げ処理によりRmaxが0.02 p層以下の平滑
性を有し、洗浄性にも優れたものであることが必要であ
る。磁性媒体はスパッタ及び熱処理等により鉄を主成分
とした酸化物磁性薄膜であり、成膜方法としては、酸素
雰囲気中での反応性スパッタリング等により鉄(Fe)
を主成分とする非磁性へマグイト(α−Fe20s)膜
を形成した後1選元によりFe3 04とした後酸化し
てγ−Fe2 03とする等の工程を経て強磁性酸化物
を得る方法、及び、スパッタリング雰囲気の制御による
反応スパッタリングにより、直接強磁性酸化物マグネタ
イト(Fe3 04)を形成した後、酸化処理等の工程
を経てマグヘマタイト(γ−Fe203)を得る方法な
どいずれであっても良い、この酸化物磁性薄膜上にスピ
ンコード法により5i(0)1)4溶液を塗布し、10
0〜180℃の低温での熱処理を行ない5i02皮膜と
する。  5i02膜の厚さは、情報の記録、読出し等
を行なう上でのヘッドと媒体間のギャップを少なくする
上から薄い方が好ましいが、保M!膜としての機能の面
からは若干の厚みを持つことが必要であり、より具体的
には10()〜800人程度が望ましい、スピンコード
法によりSi(OH)4溶液を塗布して低温処理のみを
施した状態での5i02膜は膜中にシラノール基(Si
−OH)を多く残存する。
The features, technical means, methods, etc. of the present invention will be described in detail below. Non-magnetic substrates in the present invention include aluminum and aluminum alloy substrates having an alumite film formed by anodic oxidation on the surface, glass, ceramics, etc. It may be a resin substrate. In either case, it has various mechanical and material characteristics suitable for a magnetic disk substrate, and the surface of the substrate has a mirror finish or a similar finishing treatment so that Rmax is 0. It is necessary to have smoothness equal to or lower than that of the 02 p layer and to have excellent washability. The magnetic medium is an oxide magnetic thin film mainly composed of iron by sputtering, heat treatment, etc., and the film forming method is to form an iron (Fe) film by reactive sputtering in an oxygen atmosphere.
A method of obtaining a ferromagnetic oxide through steps such as forming a non-magnetic hemagite (α-Fe20s) film containing as the main component, converting it into Fe304 by selecting one element, and then oxidizing it to γ-Fe203, Alternatively, any method may be used, such as directly forming ferromagnetic oxide magnetite (Fe304) by reactive sputtering by controlling the sputtering atmosphere, and then obtaining maghematite (γ-Fe203) through a process such as oxidation treatment. , 5i(0)1)4 solution was applied on this oxide magnetic thin film by spin code method, and 10
A 5i02 film is obtained by heat treatment at a low temperature of 0 to 180°C. The thickness of the 5i02 film is preferably thinner in order to reduce the gap between the head and the medium when recording and reading information, etc. It is necessary to have a certain thickness in terms of its function as a film, and more specifically, it is desirable to have a thickness of about 10 to 800.A Si(OH)4 solution is applied using a spin code method and treated at a low temperature. The 5i02 film with only silanol groups (Si
-OH) remains in large amounts.

この上に少なくとも1つの極性基を有するパーフルオロ
ポリエーテルオリゴマーの液体潤滑剤を数X〜50ス程
度コートし、80℃程度の温度で乾燥すると溶媒が揮散
し、  5i02膜中のシラノール基と潤滑剤の極性基
が化学的又は水素結合により結合し、 5i02保護膜
上に液体潤滑剤が固定される。
On top of this, a liquid lubricant of perfluoropolyether oligomer having at least one polar group is coated for several times to 50 times, and when it is dried at a temperature of about 80°C, the solvent evaporates, and the silanol group in the 5i02 film and the lubricant are dried. The polar groups of the lubricant are bonded chemically or through hydrogen bonds, fixing the liquid lubricant on the 5i02 protective film.

この後、  5i02膜は再び250〜300℃の高温
にて5〜15分間焼成し、膜生成シラノール基は脱水縮
合反応により、シロキサン結合(Si−0−9i)させ
、5i02保護膜の強度を補強する。上記の方法にて形
成した、パーフルオロポリエーテル固定5i02保護膜
(潤滑剤固定保護膜)は、磁気記録装置(HDA)内の
昇温による潤滑剤の蒸発や、磁気ディスクの高速回転に
よる、潤滑剤のスピンオフなどを起こさず、潤滑表面の
長期信頼性において充分効果を発揮する。
After this, the 5i02 film is fired again at a high temperature of 250 to 300°C for 5 to 15 minutes, and the film-forming silanol groups are bonded to siloxane (Si-0-9i) through a dehydration condensation reaction, reinforcing the strength of the 5i02 protective film. do. The perfluoropolyether-fixed 5i02 protective film (lubricant-fixed protective film) formed by the above method is protected against evaporation of the lubricant due to temperature rise inside the magnetic recording device (HDA) and lubrication due to high-speed rotation of the magnetic disk. It does not cause agent spin-off and is fully effective in maintaining the long-term reliability of lubricated surfaces.

本発明で使用するパーフルオロポリエーテル類としては F+CFCF20)−nC2F5      (但しn
 = 10〜90)CF3 F−GCF、、0+r+C2F5(但しn=10〜15
0)CF3(但しm = 10〜50) n = 10〜150) (但しm=10〜70) n=10〜150) なる分子式を有するポリエーテルオリゴマーで、該オリ
ゴマーが少なくとも1つの極性基が末端結合されたもの
である。該ポリエーテルオリゴマーの内で粘度の温度依
存性が少ないこと或いは蒸気圧の低いことという点を考
慮すれば分子量は大きいものが望ましいが、分子量が大
きくなり過ぎると、 5i02保護膜上に潤滑剤を均一
に塗布及び固定することが困難となるので、分子量とし
ては1000〜8000程度のものが適当である0本発
明に使用するための有効な末端極性基としては一〇〇〇
H2−GOORl−ROR、−RO)l 、−Nl2、
−NHROHl−NCO、−C0NH2、−NHR、−
C)to等が挙げられる。
The perfluoropolyethers used in the present invention are F+CFCF20)-nC2F5 (however, n
= 10-90) CF3 F-GCF, 0+r+C2F5 (however, n=10-15
0) CF3 (where m = 10 to 50) n = 10 to 150) (where m = 10 to 70) n = 10 to 150) A polyether oligomer having the following molecular formula, where the oligomer has at least one polar group at its terminal are combined. Among the polyether oligomers, it is desirable to have a large molecular weight in view of low temperature dependence of viscosity or low vapor pressure, but if the molecular weight becomes too large, it is necessary to apply a lubricant on the 5i02 protective film. Since it is difficult to apply and fix uniformly, a molecular weight of about 1,000 to 8,000 is appropriate.An effective terminal polar group for use in the present invention is 1,000H2-GOORl-ROR. , -RO)l , -Nl2,
-NHROHL-NCO, -CONH2, -NHR, -
C) to etc.

5i02膜上のパーフルオロポリエーテル類はヘッドと
磁気記録媒体との間の潤滑性を良好に保つと共に、ヘッ
ドと磁気記録媒体との間の吸着現象を起こさないことが
必要である。従って該パーフルオロポリエーテル類の皮
膜は、膜厚はできるだけ薄く(数〜50大)しかも塗り
むら等の欠陥部分が無(5i02膜上に均一な膜厚で被
覆された後、 5i02膜に固定されなければならない
、この様な状態を実現するためには該パーフルオロポリ
エーテルを熱的及び化学的安定性に優れ、沸点の適当に
高い(100℃以上)フッ素系溶剤にo、ooot〜1
.0%zt%程度に希釈し、スピンコード又は浸漬法に
より 5i02膜上に塗布することにより達成される。
The perfluoropolyethers on the 5i02 film are required to maintain good lubricity between the head and the magnetic recording medium and to prevent adsorption between the head and the magnetic recording medium. Therefore, the perfluoropolyether film should be as thin as possible (several to 50 mm) and free from defects such as uneven coating (after being coated with a uniform thickness on the 5i02 film, it should be fixed on the 5i02 film). In order to achieve such a state, the perfluoropolyether must be soaked in a fluorinated solvent with excellent thermal and chemical stability and a suitably high boiling point (100°C or higher) for 1 o, ooot to 100°C.
.. This is achieved by diluting it to about 0%zt% and coating it on the 5i02 film using a spin code or dipping method.

かかる塗布方法においては、該溶液の温度、粘度、或い
は塗布時の回転速度又は引き上げ速度、又は塗布後の余
剰分や溶剤を除去する等の後処理により、条件が決定さ
れ、適宜選択して使用する。
In such a coating method, the conditions are determined by the temperature and viscosity of the solution, the rotation speed or pulling speed during coating, and post-processing such as removing excess and solvent after coating, and are selected and used as appropriate. do.

〔作用〕[Effect]

酸化物磁性膜上に5i02保護膜を形成した後、潤滑剤
の揮散を防止するためアミノシランを介して5i02保
護膜と液体タイプの潤滑剤を固定する方法ではアミノシ
ランの活性を制御してアミノシラン層を薄く均一に再現
性良く、形成することは量産性の点から問題があった。
After forming a 5i02 protective film on an oxide magnetic film, the method involves fixing the 5i02 protective film and a liquid type lubricant via aminosilane to prevent the lubricant from volatilizing, which involves controlling the activity of the aminosilane to form the aminosilane layer. Forming a thin and uniform film with good reproducibility has been problematic from the standpoint of mass production.

しかるに本発明の方法によれば、アミノシランを介する
ことなく。
However, according to the method of the present invention, there is no need to use aminosilane.

5i02保護膜上に液体タイプの潤滑剤が固定され、量
産時にも実用可能な方法にて、潤滑表面の長期信頼性の
優れた磁気記録媒体が製造できる。
A liquid type lubricant is fixed on the 5i02 protective film, and a magnetic recording medium with excellent long-term reliability of the lubricated surface can be manufactured by a method that is practical even during mass production.

以下実施例により、本発明の特徴を詳細に説明する。Hereinafter, the features of the present invention will be explained in detail with reference to Examples.

〔実施例〕〔Example〕

ディスク用アルミニウム基板上に陽極酸化処理にてアル
マイト膜を形成し、表面研磨加工により、表面を(Rm
ax≧0.02xm )平滑に仕上げ、その上に、反応
スパッタリング法にてFeを主成分とする酸化物磁性薄
膜(Fe304H桑)を0.13μmを形成し、さらに
大気中酸化処理(300℃、3時間焼成)によりγ−F
e2 03磁性膜に変換した。
An alumite film is formed on the aluminum substrate for the disk by anodizing treatment, and the surface is polished to (Rm
ax≧0.02xm), a 0.13 μm thick oxide magnetic thin film (Fe304H mulberry) containing Fe as a main component was formed thereon by a reactive sputtering method, and further oxidized in the air (300°C, γ-F
Converted to e203 magnetic film.

上記処理方法により作成したγ−Fe203薄膜デイス
クについて、以下の如く、保護膜、表面潤滑処理を行な
った。
The γ-Fe203 thin film disk produced by the above treatment method was subjected to a protective film and surface lubrication treatment as follows.

γ−Fe2 03磁性薄膜上にスピンコード法によりS
i(OH)4溶液を塗布した後、150℃にて3時間電
気炉中で焼成を行なって膜中にミラノール基(Si−O
H)が多く残存する膜厚200λ程度の5i02膜を形
成した。次いで、カルボン酸−〇〇〇〇を末端極性基に
持つ分子量4000程度のパーフルオロポリエーテルを
ツー/素糸溶剤にQ、005wt%に希釈し、スピンコ
ードの方法にて塗布した。80℃で10分間乾燥したの
ち280℃にて10分間焼成した。
S is deposited on the γ-Fe203 magnetic thin film using the spin code method.
After applying the i(OH)4 solution, baking was performed in an electric furnace at 150°C for 3 hours to form milanols (Si-O) into the film.
A 5i02 film having a thickness of about 200λ and containing a large amount of H) was formed. Next, perfluoropolyether having a terminal polar group of carboxylic acid -〇〇〇〇 and having a molecular weight of about 4,000 was diluted to 0.005 wt % in a two-strand solvent and applied by a spin cord method. After drying at 80°C for 10 minutes, it was fired at 280°C for 10 minutes.

以上のように保護膜、表面潤滑層を形成した各ディスク
について以下のような測定を行なった。
The following measurements were performed on each disk on which the protective film and surface lubricant layer were formed as described above.

磁気記録媒体と記録再生用磁気へラドが起動時及び停止
時に接触状態を現出するコンタクト・スタート・ストッ
プ(CS S)方式による記録再生動作を繰り返し行な
い、前記各ディスク面のキズの有無、膜の剥離、摩耗等
の表面状態の観察及びその際ヘッドとディスク間の動摩
擦係数及び出力電流値等の電磁変換特性等の変化、又C
8S前後のヘッドとディスクとの摩擦係数の変化も測定
した。
Recording and reproducing operations using the Contact Start Stop (CSS) method, in which the magnetic recording medium and the magnetic helad for recording and reproducing are in contact with each other at startup and stop, are performed repeatedly, and the presence or absence of scratches on the surface of each disk and the film are checked. Observation of surface conditions such as peeling and wear, and changes in electromagnetic conversion characteristics such as dynamic friction coefficient and output current value between the head and disk, and C
Changes in the coefficient of friction between the head and disk before and after 8S were also measured.

又、耐環境試験として相対湿度80%、温度80℃の環
境下で50日放置した際の摩擦係数及びパーフルオロポ
リエーテル層の膜厚の変化、その時のエラー数の増加率
を測定した。
In addition, as an environmental resistance test, the coefficient of friction and the change in the thickness of the perfluoropolyether layer were measured when the film was left in an environment with a relative humidity of 80% and a temperature of 80° C. for 50 days, and the rate of increase in the number of errors at that time was measured.

これらの結果を表1に記する。These results are shown in Table 1.

比較のため従来技術によるSi(OH)4を高温処理す
る技術アミノシランを利用する技術で磁気記録媒体を作
成し特性を比較した。
For comparison, a magnetic recording medium was prepared using a conventional technique of processing Si(OH)4 at high temperature using aminosilane, and its characteristics were compared.

比較例1 γ−Fe2 03磁性薄膜上にスピンコード法によりS
i(OH)4溶液を塗布し、300℃、3時間電気炉中
で焼成を行ない、脱水縮合反応により膜厚200λ程度
の5i02膜を形成した0次いで、末端極性基としてカ
ルボン酸−COOHを持ち、分子量4000程度(7)
パーフルオロポリエーテルオリゴマーの液体潤滑剤をフ
ッ素系溶剤に0.005賛t%に希釈し、スピンコード
法により該5i02保護膜上に塗布した。80°Cで乾
燥し溶媒を飛ばして、潤滑膜とした。
Comparative Example 1 S was deposited on a γ-Fe2 03 magnetic thin film by spin coding
i(OH)4 solution was applied and baked in an electric furnace at 300°C for 3 hours to form a 5i02 film with a thickness of about 200λ by dehydration condensation reaction. , molecular weight around 4000 (7)
A liquid lubricant of perfluoropolyether oligomer was diluted to 0.005 t% in a fluorinated solvent and applied onto the 5i02 protective film by a spin code method. It was dried at 80°C to remove the solvent and form a lubricating film.

この磁気記録媒体につき実施例と同様の試験をし、結果
を表1に示す。
This magnetic recording medium was subjected to the same tests as in the example, and the results are shown in Table 1.

比較例2 比較例1と同様の方法で5i02保護膜を形成した後、
 7 ミ/ シラ7NH2CH2CH2NH(CH2)
 35i(OCH3)3を0.05wt%漬度に溶解し
たN−ブタノール溶液をスピンコードし、 100℃で
加熱してSiO2保!IIIと7ミノシラン層をシロキ
サン結合させた0次いで、カルボン酸−COOHを末端
極性基に持つ、パーフルオロポリエーテルを比較例1と
同様の方法にて塗布した。80℃で乾燥して溶媒を飛ば
して、潤滑膜とした。
Comparative Example 2 After forming a 5i02 protective film in the same manner as Comparative Example 1,
7 Mi/ Shira7NH2CH2CH2NH (CH2)
An N-butanol solution containing 35i(OCH3)3 dissolved at a concentration of 0.05 wt% was spin-coded and heated at 100°C to maintain SiO2! III and 7 The minosilane layers were bonded with siloxane, and then a perfluoropolyether having carboxylic acid -COOH as a terminal polar group was applied in the same manner as in Comparative Example 1. It was dried at 80°C to remove the solvent and form a lubricating film.

この磁気記録媒体につき実施例と同様の試験を行ない、
結果を表1に併記した。
This magnetic recording medium was subjected to the same test as in the example,
The results are also listed in Table 1.

(以下余白) 表    1 〔発明の効果〕 以上詳述したことから明らかなように、本発明の方法に
よれば5i02保護膜との間に中間物質層を介すること
なく、保護膜上に潤滑剤が固定され、長期信頼性に優れ
た潤滑表面を有する磁気記録媒体を製造することができ
る゛。
(The following is a blank space) Table 1 [Effects of the Invention] As is clear from the detailed description above, according to the method of the present invention, the lubricant can be applied to the protective film without intervening an intermediate layer between the 5i02 protective film and the 5i02 protective film. It is possible to manufacture a magnetic recording medium that has a lubricated surface that is fixed and has excellent long-term reliability.

また、公知の7ミノシラン結合法のように反応活性の制
御といった困難な手法を用いることなく、同等の信頼性
を有する潤滑膜が安価に製造できるので実用的効果はき
わめて大きい。
In addition, a lubricating film having the same reliability can be produced at low cost without using difficult techniques such as controlling reaction activity as in the known 7-minosilane bonding method, so the practical effect is extremely large.

Claims (2)

【特許請求の範囲】[Claims] (1)磁性薄膜上にテトラハイドロキシシラン(Si(
OH)_4)溶液を塗布し、100〜180℃の温度で
熱処理した後、この上に少なくとも一つの極性基を有す
るパーフルオロポリエーテル類からなる潤滑剤をコート
したのち250〜300℃で熱処理することを特徴とす
る磁気記録媒体の製造方法。
(1) Tetrahydroxysilane (Si(
OH)_4) After applying the solution and heat-treating at a temperature of 100 to 180°C, coat a lubricant made of perfluoropolyethers having at least one polar group thereon, and then heat-treating at 250 to 300°C. A method of manufacturing a magnetic recording medium, characterized in that:
(2)パーフルオロポリエーテル類が分子量1000〜
8000のオリゴマーであり、該ポリエーテル類の少な
くとも1つの末端極性基が−CO_2R、−ROR、−
ROH、−NH−R−OH、−NH_2、−NCOであ
ることを特徴とする特許請求の範囲第1項に記載の磁気
記録媒体の製造方法。
(2) Perfluoropolyethers have a molecular weight of 1000 or more
8000 oligomers, and at least one terminal polar group of the polyethers is -CO_2R, -ROR, -
2. The method for manufacturing a magnetic recording medium according to claim 1, wherein ROH, -NH-R-OH, -NH_2, and -NCO are used.
JP2249987A 1987-02-04 1987-02-04 Production of magnetic recording medium Pending JPS63191317A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2249987A JPS63191317A (en) 1987-02-04 1987-02-04 Production of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2249987A JPS63191317A (en) 1987-02-04 1987-02-04 Production of magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS63191317A true JPS63191317A (en) 1988-08-08

Family

ID=12084435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2249987A Pending JPS63191317A (en) 1987-02-04 1987-02-04 Production of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS63191317A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03153645A (en) * 1989-11-01 1991-07-01 Internatl Business Mach Corp <Ibm> Lubricating film for thin membrane disk
EP0515687A1 (en) * 1990-10-25 1992-12-02 Ebara Corporation Gas dynamic bearing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03153645A (en) * 1989-11-01 1991-07-01 Internatl Business Mach Corp <Ibm> Lubricating film for thin membrane disk
EP0515687A1 (en) * 1990-10-25 1992-12-02 Ebara Corporation Gas dynamic bearing

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