JPS63190977U - - Google Patents

Info

Publication number
JPS63190977U
JPS63190977U JP8275987U JP8275987U JPS63190977U JP S63190977 U JPS63190977 U JP S63190977U JP 8275987 U JP8275987 U JP 8275987U JP 8275987 U JP8275987 U JP 8275987U JP S63190977 U JPS63190977 U JP S63190977U
Authority
JP
Japan
Prior art keywords
substrates
constant temperature
temperature chamber
connection system
power source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8275987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0633431Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8275987U priority Critical patent/JPH0633431Y2/ja
Publication of JPS63190977U publication Critical patent/JPS63190977U/ja
Application granted granted Critical
Publication of JPH0633431Y2 publication Critical patent/JPH0633431Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP8275987U 1987-05-28 1987-05-28 Ｉｃ用エ−ジング装置 Expired - Lifetime JPH0633431Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8275987U JPH0633431Y2 (ja) 1987-05-28 1987-05-28 Ｉｃ用エ−ジング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8275987U JPH0633431Y2 (ja) 1987-05-28 1987-05-28 Ｉｃ用エ−ジング装置

Publications (2)

Publication Number Publication Date
JPS63190977U true JPS63190977U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-12-08
JPH0633431Y2 JPH0633431Y2 (ja) 1994-08-31

Family

ID=30935705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8275987U Expired - Lifetime JPH0633431Y2 (ja) 1987-05-28 1987-05-28 Ｉｃ用エ−ジング装置

Country Status (1)

Country Link
JP (1) JPH0633431Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0633431Y2 (ja) 1994-08-31

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