JPS6319090U - - Google Patents
Info
- Publication number
- JPS6319090U JPS6319090U JP11315786U JP11315786U JPS6319090U JP S6319090 U JPS6319090 U JP S6319090U JP 11315786 U JP11315786 U JP 11315786U JP 11315786 U JP11315786 U JP 11315786U JP S6319090 U JPS6319090 U JP S6319090U
- Authority
- JP
- Japan
- Prior art keywords
- casing
- pressure
- exhaust port
- final
- roots blower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11315786U JPS6319090U (me) | 1986-07-23 | 1986-07-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11315786U JPS6319090U (me) | 1986-07-23 | 1986-07-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6319090U true JPS6319090U (me) | 1988-02-08 |
Family
ID=30994690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11315786U Pending JPS6319090U (me) | 1986-07-23 | 1986-07-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6319090U (me) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009063890A1 (ja) * | 2007-11-14 | 2009-05-22 | Ulvac, Inc. | 多段式ドライポンプ |
WO2018149598A1 (de) * | 2017-02-17 | 2018-08-23 | Leybold Gmbh | Mehrstufige wälzkolbenpumpe |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57146093A (en) * | 1980-12-05 | 1982-09-09 | Boc Ltd | Mechanical pump |
JPS5834320U (ja) * | 1981-08-31 | 1983-03-05 | 東芝機器株式会社 | 感震器付照明器具 |
-
1986
- 1986-07-23 JP JP11315786U patent/JPS6319090U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57146093A (en) * | 1980-12-05 | 1982-09-09 | Boc Ltd | Mechanical pump |
JPS5834320U (ja) * | 1981-08-31 | 1983-03-05 | 東芝機器株式会社 | 感震器付照明器具 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009063890A1 (ja) * | 2007-11-14 | 2009-05-22 | Ulvac, Inc. | 多段式ドライポンプ |
JP5073754B2 (ja) * | 2007-11-14 | 2012-11-14 | 株式会社アルバック | 多段式ドライポンプ |
WO2018149598A1 (de) * | 2017-02-17 | 2018-08-23 | Leybold Gmbh | Mehrstufige wälzkolbenpumpe |
CN110168227A (zh) * | 2017-02-17 | 2019-08-23 | 莱宝有限公司 | 多级罗茨泵 |
KR20190112002A (ko) * | 2017-02-17 | 2019-10-02 | 라이볼트 게엠베하 | 다단 루츠 펌프 |
JP2020507704A (ja) * | 2017-02-17 | 2020-03-12 | レイボルド ゲーエムベーハー | 多段式ルーツポンプ |
US11255328B2 (en) | 2017-02-17 | 2022-02-22 | Leybold Gmbh | Multi-stage rotary lobe pump |