JPS63190854U - - Google Patents
Info
- Publication number
- JPS63190854U JPS63190854U JP7923387U JP7923387U JPS63190854U JP S63190854 U JPS63190854 U JP S63190854U JP 7923387 U JP7923387 U JP 7923387U JP 7923387 U JP7923387 U JP 7923387U JP S63190854 U JPS63190854 U JP S63190854U
- Authority
- JP
- Japan
- Prior art keywords
- wall
- air passage
- suction port
- pressure regulating
- partitions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims description 2
Landscapes
- Duct Arrangements (AREA)
- Air-Flow Control Members (AREA)
- Safety Valves (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987079233U JP2514503Y2 (ja) | 1987-05-27 | 1987-05-27 | クリ−ンル−ム圧力調整装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987079233U JP2514503Y2 (ja) | 1987-05-27 | 1987-05-27 | クリ−ンル−ム圧力調整装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63190854U true JPS63190854U (US06368395-20020409-C00050.png) | 1988-12-08 |
| JP2514503Y2 JP2514503Y2 (ja) | 1996-10-23 |
Family
ID=30928904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987079233U Expired - Lifetime JP2514503Y2 (ja) | 1987-05-27 | 1987-05-27 | クリ−ンル−ム圧力調整装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2514503Y2 (US06368395-20020409-C00050.png) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005282953A (ja) * | 2004-03-30 | 2005-10-13 | Takasago Thermal Eng Co Ltd | 差圧装置 |
| JP2007120901A (ja) * | 2005-10-31 | 2007-05-17 | Nippon Spindle Mfg Co Ltd | 温調用ブース |
| JP2017048941A (ja) * | 2015-08-31 | 2017-03-09 | 株式会社日立製作所 | クリーンルーム用空調システム及びそれに用いられる排気ユニット |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5837429U (ja) * | 1981-09-05 | 1983-03-11 | 有限会社森製作所 | 室内圧調整ダンパ− |
| JPS5949127U (ja) * | 1982-09-21 | 1984-04-02 | 新日本空調株式会社 | 差圧調整ダンパ− |
-
1987
- 1987-05-27 JP JP1987079233U patent/JP2514503Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5837429U (ja) * | 1981-09-05 | 1983-03-11 | 有限会社森製作所 | 室内圧調整ダンパ− |
| JPS5949127U (ja) * | 1982-09-21 | 1984-04-02 | 新日本空調株式会社 | 差圧調整ダンパ− |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005282953A (ja) * | 2004-03-30 | 2005-10-13 | Takasago Thermal Eng Co Ltd | 差圧装置 |
| JP4651963B2 (ja) * | 2004-03-30 | 2011-03-16 | 高砂熱学工業株式会社 | 差圧装置 |
| JP2007120901A (ja) * | 2005-10-31 | 2007-05-17 | Nippon Spindle Mfg Co Ltd | 温調用ブース |
| JP2017048941A (ja) * | 2015-08-31 | 2017-03-09 | 株式会社日立製作所 | クリーンルーム用空調システム及びそれに用いられる排気ユニット |
| WO2017038484A1 (ja) * | 2015-08-31 | 2017-03-09 | 株式会社日立製作所 | クリーンルーム用空調システム及びそれに用いられる排気ユニット |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2514503Y2 (ja) | 1996-10-23 |
