JPS63190228A - Single-sheet grid member for ion source device - Google Patents

Abstract

PURPOSE:To facilitate the grid exchange by coupling the cylinder section of a holder fitted with a grid with the cylinder section of a holding member fixed to an ion source device main body via insulating insulators. CONSTITUTION:A holder 22 is constituted of a flange 22a and a cylinder section 22b, notches 23 are formed on the cylinder section 22b. The holder 22 is removably fitted to a holding member 24, the member 24 is constituted of a flange 24a and a cylinder 24b, when the cylinder 22b of the holder 22 is inserted into the cylinder 24b, the holder 22 is held by the holding member 24 via the spring force of the notches 23. Insulating insulators 16 are fitted to the flange 24a at the outside of the cylinder 24b and fixed in an insulated state at a fixed distance from the main body. An extracting electrode is connected to the member 24. Accordingly to this constitution, the holder 22 fitted with a grid 2 can be fitted or removed from the member 24 in one touch, and the grid exchange is made extremely simple.

Description

Detailed Description of the Invention "Field of Industrial Application" The present invention relates to an ion source device applied to an ion beam sputtering device, an ion milling device, etc.
The present invention relates to a one-piece grid member for an ion source device that can draw out a large beam current and also allows easy replacement of the grid, which is a consumable item.

"Conventional techniques/techniques" Ion beam sputtering equipment and ion milling equipment, which have been used in recent years to form fine patterns and produce magnetic films, generate inert gas ions and accelerate them. It requires an ion source device to create an ion beam that impinges on the target or object to be etched. FIG. 2 shows the overall schematic configuration of the ion beam sputtering device, and the symbol l in the figure indicates the ion source device;
2 is a grid. This ion beam sputtering device uses an ion source device! The ion beam 3 generated within the chamber passes through the grid 2 and hits a target 5 disposed within the chamber 4, where the sputtered particles are deposited on the substrate 6.

FIG. 3 is a cross-sectional view showing details of the ion source device 1 described above, in which the inert gas introduced into the device main body la from the gas introduction pipe 11 is connected to the cathode! The anode 13 is configured to be turned into plasma by thermionic electrons from the anode 2 . At this time, a magnetic field is applied by the magnet 14 so that the trajectory of the thermoelectrons can be made longer. Reference numeral 15 is an insulating ring.

In addition, as shown in FIG. 4, the two-legged grid 2 is sandwiched between an annular grid mounting member 17 and a presser ring 18 and fixed with screws. The member 17 is fixed to the main body 1a of the apparatus via insulators 16 while maintaining a predetermined distance and being electrically insulated. An extractor electrode is connected to this grid attachment member 17.

It should be noted that conventional ion source devices have generally been equipped with two grids parallel to each other, namely a screen grid mainly for blocking plasma and an extractor grid for accelerating ions. In recent years, it has been shown that in order to obtain a high beam current at a low accelerating voltage, it is necessary to omit the screen grid and use only the extractor grid (for example, J.

M.E., Harper et al., J.E.
1ectroche+*, S oc,.

128.5. p.107? (1981) ”), for this purpose, a single grid ion source device as described above is used.
was developed and started to be used.

"Problems to be Solved by the Invention 2" By the way, in the single-grid ion source device 1 as described above, the grid 2 is subject to direct plasma impact and is easily worn out, and furthermore, the thickness of the grid 2 is small. Since the grid 2 has to be sufficiently thin (the reason for which will be explained later), the life of the grid 2 is short, and therefore the grid 2 has to be replaced frequently.

However, in the above-mentioned ion source device ff1l, when replacing the grid 2, it is necessary to loosen at least three screws, remove the grid 2 and the holding ring 18 from the grid mounting member 17, and position the new grid 2. The work of tightening the screws has to be done, and this work has to be done in the narrow chamber 4, which makes the work extremely inefficient and makes it difficult to replace the grid 2. The drawback was that the positioning accuracy was also poor.

Here, it may be possible to increase the plate thickness of the grid 2 to extend the life of the grid 2 and reduce the frequency of replacement.
It is disadvantageous for the following reasons. FIG. 5 is a diagram showing the relationship between beam current and accelerating voltage of an ion source device using a single grid, and as shown in this diagram,
It can be seen that in order to obtain a high beam current at a low accelerating voltage, the hole diameter of the grid should be made as small as possible. However, it is difficult to form many small-diameter holes in a thick material due to processing technology, and the smaller the hole diameter is, the thinner the plate inevitably becomes. In other words, if the thickness of the grid is increased to extend the life of the grid, the diameter of the grid holes must be increased.
Therefore, a high beam current cannot be obtained.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a one-piece grid member that allows the grid, which is a consumable item, to be easily replaced.

"Means for Solving the Problems" The present invention provides a single-grid member applied to an ion source device configured with a single-grid, including a thin disc-shaped grid having a large number of microholes, and a a grid holder having a flange portion to which the grid is attached and a substantially cylindrical cylindrical portion; a presser ring for attaching the grid to the flange portion of the grid holder; and a cylindrical portion of the grid holder that is removably fitted. A grid holding member having a cylindrical part and a flange part that can be fitted together and to which an external extractor electrode is connected; It is characterized by being equipped with an insulator for fixing at a distance and for electrically insulating.

It is desirable that the insulator is installed outside the cylindrical portion of the grid holding member so that the cylindrical portion shields the insulating member, and the cylindrical portion of the grid holder is provided with a plurality of longitudinal By forming the mold slotted portion, the cylindrical portion of the grid holder is electrically connected to the cylindrical portion of the grid holding portion together with the holding slot by the spring force of the slotted portion. It is desirable to do so.

“Operation” The cylindrical portion of the grid holder to which the grid is attached is fitted into the cylindrical portion of the grid holding member fixed to the ion source device main body via an insulator. The grid is detachably attached to the main body of the apparatus.

When replacing the grid, the grid is removed from the apparatus main body by pulling out the grid holder from the grid holding member.

"Embodiment" An embodiment of the present invention will be described below with reference to FIG. The one-sheet grid member of this embodiment is applied to the conventional ion source device described above, and therefore the explanation of the conventional components such as the device main body 1a will be omitted.

FIG. 1 is an exploded perspective view showing the schematic structure of a one-piece grid member of this embodiment, in which reference numeral 2 is a grid similar to the conventional one, 22 is a grid holder to which the grid 2 is attached, 21 is a grid, 2 to the grid holder 22, and the grid 2 is attached to the grid holder 22 by sandwiching the grid 2 between the press ring 21 and the grid holder 22 and screwing it together. It has become.

The grid holder 22 includes a flange portion 22a to which the peripheral edge of the grid 2 is attached in close contact with the flange portion 22a;
The cylindrical portion 22b is composed of a substantially cylindrical portion 22b protruding from the back side of the cylindrical portion 2a, and the cylindrical portion 22b has two notches each made at multiple locations (four locations in this example) to create a slot. Sections 23... are formed.

The grid holder 22 described above is configured to be detachably attached to the grid holding member 24. The grid holding member 24 is formed with a flange portion 24a and a cylindrical portion 24b in a shape substantially similar to that of the grid holder 22 described above, and the cylindrical portion 22b of the grid holder 22 is inserted into the inside of the cylindrical portion 24t1. The grid holder 22 is held by the grid holding member 24 by the panels J of the slotted portions 23 .

Further, on the back surface of the flange portion 24a of the grid holding member 24 (the surface opposite to the surface facing the flange portion 22a of the grid holder 22), an insulator 16 is located outside the cylindrical portion 24b. Similar to the grid mounting member 17 in a conventional ion source device, the grid holding member 24 is maintained at a predetermined distance from the main body 1a of the device through insulators 16, and is connected to electricity. The grid holding member 24 is fixed in an insulated state, and an extractor electrode is connected to the grid holding member 24.

In the one-piece grid member having the above configuration, the grid holder 22 with the grid 2 attached is attached to the grid holding member 24.
The grid 2 can be attached and detached with one touch, and therefore the grid 2 can be replaced extremely easily. That is, in order to replace the grid 2, the grid holding member 2 must be replaced.
4 and take it out of the chamber 4, attach a new grid 2 to the grid holder 22 outside the chamber 4, and then attach the grid holder 22 to the grid holding member 24 again. Therefore, the labor of loosening and tightening screws in the narrow chamber 4 as in the conventional case is eliminated, and work efficiency is extremely high. Note that at this time, if a large number of grid holders 22 to which grids 2 are attached are prepared in advance, replacement can be performed in a shorter time.

Furthermore, simply by attaching the grid holder 22 to the grid holding member 24, highly accurate positioning of the grid 2 is automatically achieved, and the grid holder 22 is firmly attached to the grid holding member 24 by the spring force of the slotted portions 23. At the same time, sufficient electrical continuity between the grid holding member 24 and the grid holder 22 can be ensured.

Furthermore, according to this one-piece grid member, the insulation/insulator 1
6... were attached to the outside of the cylindrical portion 24b of the grid holding member 24 with +, so these insulators!
6... are shielded by the cylindrical portion 24b, and the device main body Ia
The sputtered material generated inside these insulators 1G...
It is prevented from being attached to the For this reason, the insulator 16
...A metal film is not formed on the surface, and therefore insulation defects that conventionally occur due to the metal film can be effectively prevented.

Note that the shapes of the grid holder 22 and the grid holding member 24 are not limited to the above embodiments, and may be changed as appropriate as long as the cylindrical portions 22a and 24a can be fitted together.For example, contrary to the above, The cylindrical portion 2 of the grid holding member 24 is placed inside the cylindrical portion 22a of the grid holder 22.
4a may be inserted.

Furthermore, the insulator 16 for the grid holding member 24...
・The mounting position is fixed by holding the grid holding member 2.1 at a predetermined distance from the main body 1a of the apparatus.

As long as it can be determined, it is not limited to the above and may be used as appropriate.

Furthermore, in the above embodiment, the slotted portions 23 were formed in the cylindrical portion 22a of the grid holder 22, but the grid holder 22 is sufficiently held by the surfaces of both cylindrical portions 22a and 24a coming into close contact with each other. In addition, if electrical continuity can be ensured, the slotted portions 23 do not necessarily need to be provided.

"Effects of the Invention" As explained in detail above, according to the present invention, the grid holder with the grid attached thereto is configured to be removably attached to the grid holding member, making it extremely easy to replace the grid. This has the effect of significantly shortening the working time.

In addition, if the insulator is mounted outside the cylindrical part of the grid holding G5 material, the insulator is shielded by the cylindrical part and can be prevented from adhering to sputtered substances, thereby preventing insulation failure from occurring. It has the effect of being able to prevent this.

Furthermore, if a slot is formed in the cylindrical part of the grid holder, the grid holder can be firmly held on the grid holding member by its spring force, and sufficient electrical continuity between the grid holder and the grid holding member can be ensured. Make the most of what you can do.

[Brief explanation of the drawing]

FIG. 1 is an exploded perspective view showing the schematic structure of a one-piece grid member according to an embodiment of the present invention. Fig. 2 is a schematic configuration diagram of an ion beam sputtering device, Fig. 3 is a sectional view of a conventional ion source device in an ion beam sputtering device, Fig. 4 is an exploded perspective view of a conventional grid section (e), and Fig. 5 is an exploded perspective view of a conventional grid section (e). It is a diagram showing the relationship between beam current and accelerating voltage in a single-grid ion source device. l...Ion source device, Ia...Device main body, 2...... Grid, 16... Insulator, 2!... Presser ring 1, 22...
... Grid holder, 22a ... Flange part,
22b... Cylindrical part, 23... Slit part, 24... Grid holding member, 24a... Flange part, 24b... Cylindrical part Department. Applicant: Nippon Telegraph and Telephone Corporation 2...Rise 1,7 Do 16...Short ball strength 21...I K-S, link °. 22...2゛Lidho J letter゛24...2゛Ritsu゛゜゛゛゛44ToyFP body a...Flange 1 child 24b...Cylindrical part Fig. 2 Fig. 3 Artwork Fig. 4 5 figure 70 reaches @fL (KV)

Claims (1)

[Claims] 1. A single grid member applied to an ion source device configured with a single grid, which includes a thin disc-shaped grid having a large number of microholes, a flange portion to which the grid is attached, and a grid holder having a substantially cylindrical cylindrical portion; a presser ring for attaching the grid to a flange portion of the grid holder; a cylindrical portion into which the cylindrical portion of the grid holder can be removably fitted; a grid holding member having a flange portion and to which an external extractor electrode is connected; and a grid holding member attached to the flange portion of the grid holding member to fix the grid holding member to the ion source device main body while maintaining a predetermined interval. 1. A single-piece grid member for an ion source device, comprising: a ceramic insulator for electrical insulation; and an insulator for electrical insulation. 2. The insulator is positioned outside and attached to the cylindrical portion of the grid holding member, so that the cylindrical portion shields the insulator. Single grid member for ion source equipment. 3. By forming a plurality of vertical slots in the cylindrical part of the grid holder, the spring force of the slots holds the cylindrical part of the grid bolter in the cylindrical part of the grid holding part, and both Claim 1 characterized in that the cylindrical portion is configured to be electrically connected.
A single grid member for an ion source device according to item 1 or 2.