JPS63189836A - Optical shutter array - Google Patents

Abstract

PURPOSE:To interrupt leaked light and to simplify the production of an optical shutter array by constituting the shutter array of a transparent porcelain substrate on which two strings of shutter elements having windows corresponding to approximately two picture elements are formed and masks formed on the substrate to interrupt one picture element of each window. CONSTITUTION:The shutter array 16 in a shutter array body 11 produced by using the transparent porcelain substrate 10 having an electrooptical effect consists of shutter elements 17 and a shutter array 18 symmetrical with the array 16 through a groove 12 consists of shutter elements 19. Each of windows 17w, 19w of the elements 17, 19 is a rectangle longitudinal in the array direction and has an area corresponding to two picture elements and more. Masks 30, 31 for interrupting the light formed on these windows 17w and 19w are zigzag arrayed on all the windows 17w, 19w. Each of masks 30, 31 has an area corresponding to approximately one picture element to expose only picture element windows 27w-29w respectively corresponding to almost a half of the area of each window 17w or 19w. Consequently, leaked light due to the influence of crosstalk can be removed. In addition, the production of the shutter array can be simplified.

Description

DETAILED DESCRIPTION OF THE INVENTION This invention relates to an optical shutter array using a material having an electro-optic effect.

Yoshiki α Materials with electro-optic effect, especially PL with large force constant
An optical shutter array in which a common electrode and individual electrodes are formed on a ZT transparent porcelain substrate is known, for example, from Japanese Patent Laid-Open No. 52-8842.

The original document that has been used for this purpose was written in the usual way, but in order to reduce the voltage for driving the shutter, the shutter element was formed into a three-dimensional shape and a parallel electric field was applied to the opposing electrode. There is a proposal to increase the effective electric field strength (
(Japanese Unexamined Patent Publication No. 170828/1982).

Based on these backgrounds, we proposed an optical shutter 7-ray that can realize even lower voltage and is easy to manufacture. This is shown in Figure 1.

Deep grooves (2) created using precision cutting technology on PLZT's transparent porcelain substrate (1)? (3) and (4) are provided, and a common electrode (5
) and individual fIt poles (6a) and t(ab) are simultaneously formed by sputtering, and m (7) is cut at a constant pitch to form the shutter element (8e) and the shutter element (
9e) and two rows of shutter arrays (8) and (9). When applied to an optical printer, it is installed between a polarizer and an analyzer, and a two-row shutter array (8)
, (9) in a time division manner (the driving voltage may be 50 V or less) to form one pixel line (8 to 12 pixels/-m).

Akira tries to do 7. However, Sugi is in the 2 rows of shutter arrays (8) and (9).
1, staggered 1. There are shutter elements that are not used at all, and light leakage from these unused shutter elements (hereinafter referred to as play windows) is a problem due to crosstalk and other factors.

The purpose of this invention is to solve the problem of light leakage from play windows and also to simplify the production of a shutter array.

The optical shutter array according to the present invention for the purpose of The basic feature is that the window is shielded from light by one pixel and consists of a mask arranged in a staggered manner for the window of two rows of shutter elements.

All shutter elements are driven and there is no RV window, so there is no light leakage. Approximately two pixels worth of light passes through the shutter element, and approximately one pixel of the light is completely blocked by the window mask. The light for one other pixel is
The light passes through a window, and since the passing window is arranged in a staggered manner due to a staggered mask, one pixel line can be formed by time-division driving of two rows of shutter elements.

X 凰鞞 An example is shown in FIG.

(11) is a shutter array body made by precision cutting a PLZT transparent porcelain substrate (10).

A groove (12) and a groove (13) shallower than this groove (12), (1
A groove (15) having a depth intermediate between the groove (12) and the grooves (13) and (14) is formed by depositing a metal film to serve as an electrode.
) is physically and electrically separated into shutter elements.

The shutter array (16) is a shutter element (17)
A symmetrical shutter array (
18) consists of a shutter element (19). Window (17w) of shutter element (17), (19) = (1
9w) forms a long rectangle in the arrangement direction and has an area of two pixels or more.

The metal film deposited on m (12) forms a common electrode (20) and separates the individual electrodes (21) of (17)
) forms an electrode lead portion (211) that continues up to the negative edge of the substrate (10). Also, Shattaniremen) (1
The individual electrode (22) of 9) also forms an electrode lead portion (221) continuously to the other edge of the substrate (10). Lead wires are bonded to the ends of the electrode lead parts (211) and (221) and connected to the drive circuit. Common electrode (20)
When grounded and a predetermined voltage is applied to the individual electrodes (21) and (22), the shutter elements (1) ゛) and (19)
exhibits an electro-optic effect and polarizes the light passing through the windows (17w) and (19w).

(30) and (31) are shutter elements (17);
This is a mask that blocks light formed on the windows (17w) and (19m) of (19). Masks (30) and (31) are shutter 7 rays (16).

For all windows (17w) * (19m) in (18),
They are arranged in a staggered pattern. Mask (30), (31)
Both have an area of one pixel, and part of it is a window (17w).

Window (17w) - (
Pixel window (27w) equivalent to half the area of 19w)
, 0 pixel window (27w) exposing only (29m)
, (29w) each correspond to one square pixel and are arranged in a staggered manner.

Masks (30) and (31) are this pixel window (27w),
Completely blocks light other than light passing through (29w). When the shutter array (16) and the shutter array (18) are driven in a time division manner and the time difference is matched with the movement of the photoreceptor, the projected images of the pixel windows (27w) and (29m) are displayed on the photoreceptor with one drive. One pixel line is formed.

It is preferable that the masks (30) and (31) described above be formed in conjunction with the fabrication of the shutter array main body (11), and the fabrication method thereof is shown in the order of steps in FIG.

First, a thin film of mask material (40) is formed by coating a PLZT transparent porcelain substrate (10) with, for example, photosensitive black bimarine (Fig. 3(a)).Next, a mask pattern is formed by otolithography. (41) ((b)
)), then this mask pattern (41) and the substrate (1
0) Apply a strip of photoresist (42) on top and heat cure. (Figure (c)).

Moving on to precision cutting, grooves (12), (13), (
14) Cut. Next, a metal for electrodes, such as Ai', Cr, etc., is deposited on the entire surface by vacuum deposition to form an electrode thin film (43) (see Figure (e)), and a groove (43) for separating the electrode and element ( 15) is cut in large numbers at a certain pitch, and finally, the resist (42) with the thin electrode l1l (43) on top is removed using a resist stripper to complete the process ((f) in the same figure).

Regarding the cutting of the groove (15) illustrated in FIG. 3(f), this is extremely advantageous in terms of the number of man-hours compared to the previous example. That is, the shutter array main body (1
As is clear from 1), the shutter element (17)
Since the windows (17m) and (19m) in (19) have an area equal to or more than two pixels, the number of times the element separation groove (15) is cut can be reduced to half compared to that of FIG. Normally, 1,000 to 2,000 grooves (15) are made, which requires a considerable amount of man-hours, but this eliminates this and simplifies the manufacturing process. In addition, the electrode lead part (211
) and (221) also have a width of 2g element or more, which avoids the difficulty of bonding.

As is clear from the above explanation, according to the present invention, since the structure does not have a play window, it is possible to eliminate light leakage due to the influence of crosstalk. This simplifies the production of the shutter array by reducing the number of times the grooves must be cut to achieve this, and at the same time, the electrode connection portion can be made wider, which facilitates bonding with the drive circuit.

[Brief explanation of the drawing]

Fig. 1 is an explanatory diagram of the previously proposed optical shutter 7-lay, Fig. 2 is a diagram showing an embodiment of the present invention, and Fig. 3 is a process diagram schematically showing a cross-sectional view of one manufacturing row of the embodiment. be. 11... PLZT transparent porcelain substrate on which a shutter array was formed, 16.18... Shutter array, 17.19.
...Shutter element, 17m, 19m...almost 2
Window with area for pixel, 27w, 29w...pixel window, 30
゜31...Staggered mask.

Claims (1)

[Claims] (1) A transparent porcelain substrate on which two rows of shutter elements with an electro-optical effect and a window for approximately two pixels are formed.
An optical shutter array characterized in that a mask is formed in a staggered manner to block one pixel of light from the windows of the two rows of shutter elements.