JPS63189332U - - Google Patents
Info
- Publication number
- JPS63189332U JPS63189332U JP7802287U JP7802287U JPS63189332U JP S63189332 U JPS63189332 U JP S63189332U JP 7802287 U JP7802287 U JP 7802287U JP 7802287 U JP7802287 U JP 7802287U JP S63189332 U JPS63189332 U JP S63189332U
- Authority
- JP
- Japan
- Prior art keywords
- gauge
- ion
- ion gauge
- reaction chamber
- gas phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000010574 gas phase reaction Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7802287U JPS63189332U (un) | 1987-05-23 | 1987-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7802287U JPS63189332U (un) | 1987-05-23 | 1987-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63189332U true JPS63189332U (un) | 1988-12-06 |
Family
ID=30926583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7802287U Pending JPS63189332U (un) | 1987-05-23 | 1987-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63189332U (un) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57163836A (en) * | 1981-04-01 | 1982-10-08 | Anelva Corp | Measuring device for degree of vacuum |
| JPS5952085B2 (ja) * | 1981-03-04 | 1984-12-18 | 川口 宏 | 自動包装装置 |
| JPS61243651A (ja) * | 1985-04-19 | 1986-10-29 | Toshiba Corp | イオン注入装置 |
-
1987
- 1987-05-23 JP JP7802287U patent/JPS63189332U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5952085B2 (ja) * | 1981-03-04 | 1984-12-18 | 川口 宏 | 自動包装装置 |
| JPS57163836A (en) * | 1981-04-01 | 1982-10-08 | Anelva Corp | Measuring device for degree of vacuum |
| JPS61243651A (ja) * | 1985-04-19 | 1986-10-29 | Toshiba Corp | イオン注入装置 |